JPS5364467A - Electrode - Google Patents
ElectrodeInfo
- Publication number
- JPS5364467A JPS5364467A JP13991776A JP13991776A JPS5364467A JP S5364467 A JPS5364467 A JP S5364467A JP 13991776 A JP13991776 A JP 13991776A JP 13991776 A JP13991776 A JP 13991776A JP S5364467 A JPS5364467 A JP S5364467A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- layer
- alloying
- reproducibility
- providing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent surface roughening and improve electrical characteristics and reproducibility by providing an Au layer containing less than 2.0 wt. % of Ge on a semiconductor layer and forming an electrode through alloying said layer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13991776A JPS5364467A (en) | 1976-11-20 | 1976-11-20 | Electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13991776A JPS5364467A (en) | 1976-11-20 | 1976-11-20 | Electrode |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5364467A true JPS5364467A (en) | 1978-06-08 |
JPS6231487B2 JPS6231487B2 (en) | 1987-07-08 |
Family
ID=15256647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13991776A Granted JPS5364467A (en) | 1976-11-20 | 1976-11-20 | Electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5364467A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5658231A (en) * | 1979-10-01 | 1981-05-21 | Western Electric Co | Method of forming electric contact in gaas active region of semiconductor device |
JPS56116619A (en) * | 1980-02-20 | 1981-09-12 | Matsushita Electric Ind Co Ltd | Electrode formation to gallium aluminum arsenic crystal |
JPS5928376A (en) * | 1982-08-09 | 1984-02-15 | Hitachi Ltd | Semiconductor device and manufacture thereof |
-
1976
- 1976-11-20 JP JP13991776A patent/JPS5364467A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5658231A (en) * | 1979-10-01 | 1981-05-21 | Western Electric Co | Method of forming electric contact in gaas active region of semiconductor device |
JPS56116619A (en) * | 1980-02-20 | 1981-09-12 | Matsushita Electric Ind Co Ltd | Electrode formation to gallium aluminum arsenic crystal |
JPS5928376A (en) * | 1982-08-09 | 1984-02-15 | Hitachi Ltd | Semiconductor device and manufacture thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS6231487B2 (en) | 1987-07-08 |
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