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JPS5349943A - Impurity diffusion method - Google Patents

Impurity diffusion method

Info

Publication number
JPS5349943A
JPS5349943A JP12381576A JP12381576A JPS5349943A JP S5349943 A JPS5349943 A JP S5349943A JP 12381576 A JP12381576 A JP 12381576A JP 12381576 A JP12381576 A JP 12381576A JP S5349943 A JPS5349943 A JP S5349943A
Authority
JP
Japan
Prior art keywords
impurity diffusion
diffusion method
coarsesurface
installing
sending
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12381576A
Other languages
Japanese (ja)
Other versions
JPS5524261B2 (en
Inventor
Mitsuo Nanba
Michio Suzuki
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12381576A priority Critical patent/JPS5349943A/en
Publication of JPS5349943A publication Critical patent/JPS5349943A/en
Publication of JPS5524261B2 publication Critical patent/JPS5524261B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To obtain a diffusion layer of low sheet resistance by installing a coarsesurface substrate opposing to a semiconductor substrate and sending the gas containing impurity.
COPYRIGHT: (C)1978,JPO&Japio
JP12381576A 1976-10-18 1976-10-18 Impurity diffusion method Granted JPS5349943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12381576A JPS5349943A (en) 1976-10-18 1976-10-18 Impurity diffusion method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12381576A JPS5349943A (en) 1976-10-18 1976-10-18 Impurity diffusion method

Publications (2)

Publication Number Publication Date
JPS5349943A true JPS5349943A (en) 1978-05-06
JPS5524261B2 JPS5524261B2 (en) 1980-06-27

Family

ID=14870012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12381576A Granted JPS5349943A (en) 1976-10-18 1976-10-18 Impurity diffusion method

Country Status (1)

Country Link
JP (1) JPS5349943A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6090123U (en) * 1983-11-29 1985-06-20 石崎産業株式会社 Packing box with pallet function for cargo handling

Also Published As

Publication number Publication date
JPS5524261B2 (en) 1980-06-27

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