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JPS5421182A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5421182A
JPS5421182A JP12515577A JP12515577A JPS5421182A JP S5421182 A JPS5421182 A JP S5421182A JP 12515577 A JP12515577 A JP 12515577A JP 12515577 A JP12515577 A JP 12515577A JP S5421182 A JPS5421182 A JP S5421182A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
substrate
semiconductor
insulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12515577A
Other languages
Japanese (ja)
Inventor
Hiroyuki Tango
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12515577A priority Critical patent/JPS5421182A/en
Publication of JPS5421182A publication Critical patent/JPS5421182A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To manufacture insulation isolating layer flat to the semiconductor surface, by placing a concave on the semiconductor on an insulation substrate, diffusing impurity on the concabe, and by oxidizing it until reaching the substrate.
COPYRIGHT: (C)1979,JPO&Japio
JP12515577A 1977-10-20 1977-10-20 Manufacture for semiconductor device Pending JPS5421182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12515577A JPS5421182A (en) 1977-10-20 1977-10-20 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12515577A JPS5421182A (en) 1977-10-20 1977-10-20 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5421182A true JPS5421182A (en) 1979-02-17

Family

ID=14903227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12515577A Pending JPS5421182A (en) 1977-10-20 1977-10-20 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5421182A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6250486A (en) * 1985-08-28 1987-03-05 Toyo Giken Kogyo Kk Liquid cooling method for anodizing etching vessel

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49135586A (en) * 1973-04-28 1974-12-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49135586A (en) * 1973-04-28 1974-12-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6250486A (en) * 1985-08-28 1987-03-05 Toyo Giken Kogyo Kk Liquid cooling method for anodizing etching vessel
JPH0567711B2 (en) * 1985-08-28 1993-09-27 Almex Inc

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