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JPS534484A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS534484A
JPS534484A JP7782776A JP7782776A JPS534484A JP S534484 A JPS534484 A JP S534484A JP 7782776 A JP7782776 A JP 7782776A JP 7782776 A JP7782776 A JP 7782776A JP S534484 A JPS534484 A JP S534484A
Authority
JP
Japan
Prior art keywords
electrodes
insulation material
production
semiconductor device
interlayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7782776A
Other languages
Japanese (ja)
Other versions
JPS6114662B2 (en
Inventor
Ryoichi Hori
Yoshiaki Kamigaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7782776A priority Critical patent/JPS534484A/en
Publication of JPS534484A publication Critical patent/JPS534484A/en
Publication of JPS6114662B2 publication Critical patent/JPS6114662B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To eliminate the shape difference of interlayer communicating holes and evade shortcircuiting by beforehand removing by photoetching the interlayer insulation material of the communication hole parts provided for communicating electrodes other than uppermost layer gate electrodes out of plural gate electrodes prior to the formation of the insulation material under wiring electrodes.
COPYRIGHT: (C)1978,JPO&Japio
JP7782776A 1976-07-02 1976-07-02 Production of semiconductor device Granted JPS534484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7782776A JPS534484A (en) 1976-07-02 1976-07-02 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7782776A JPS534484A (en) 1976-07-02 1976-07-02 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS534484A true JPS534484A (en) 1978-01-17
JPS6114662B2 JPS6114662B2 (en) 1986-04-19

Family

ID=13644861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7782776A Granted JPS534484A (en) 1976-07-02 1976-07-02 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS534484A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5580980U (en) * 1978-11-28 1980-06-04
JPS5650571A (en) * 1979-10-01 1981-05-07 Hitachi Ltd Semiconductor device and manufacture thereof
JPS58107430A (en) * 1981-12-18 1983-06-27 Kobe Steel Ltd Method of attaching plate for repairing throat in vacuum cell
JPS6085542A (en) * 1983-10-17 1985-05-15 Fujitsu Ltd Manufacture of semiconductor device
JPS6261362U (en) * 1986-10-03 1987-04-16

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5580980U (en) * 1978-11-28 1980-06-04
JPS5650571A (en) * 1979-10-01 1981-05-07 Hitachi Ltd Semiconductor device and manufacture thereof
JPS58107430A (en) * 1981-12-18 1983-06-27 Kobe Steel Ltd Method of attaching plate for repairing throat in vacuum cell
JPS6085542A (en) * 1983-10-17 1985-05-15 Fujitsu Ltd Manufacture of semiconductor device
JPS6261362U (en) * 1986-10-03 1987-04-16

Also Published As

Publication number Publication date
JPS6114662B2 (en) 1986-04-19

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