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JPS5214386A - Process formation of pattern with multi-layer structure - Google Patents

Process formation of pattern with multi-layer structure

Info

Publication number
JPS5214386A
JPS5214386A JP9027375A JP9027375A JPS5214386A JP S5214386 A JPS5214386 A JP S5214386A JP 9027375 A JP9027375 A JP 9027375A JP 9027375 A JP9027375 A JP 9027375A JP S5214386 A JPS5214386 A JP S5214386A
Authority
JP
Japan
Prior art keywords
pattern
layer structure
process formation
deterioration
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9027375A
Other languages
Japanese (ja)
Inventor
Yoshimichi Hirobe
Yasunobu Osa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9027375A priority Critical patent/JPS5214386A/en
Publication of JPS5214386A publication Critical patent/JPS5214386A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To avoid the deterioration of insulation at a hole contacted with conductor by forming a poly-crystalline silicon layer under a layer of aluminium leads.
COPYRIGHT: (C)1977,JPO&Japio
JP9027375A 1975-07-25 1975-07-25 Process formation of pattern with multi-layer structure Pending JPS5214386A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9027375A JPS5214386A (en) 1975-07-25 1975-07-25 Process formation of pattern with multi-layer structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9027375A JPS5214386A (en) 1975-07-25 1975-07-25 Process formation of pattern with multi-layer structure

Publications (1)

Publication Number Publication Date
JPS5214386A true JPS5214386A (en) 1977-02-03

Family

ID=13993893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9027375A Pending JPS5214386A (en) 1975-07-25 1975-07-25 Process formation of pattern with multi-layer structure

Country Status (1)

Country Link
JP (1) JPS5214386A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1058989C (en) * 1993-10-18 2000-11-29 Ag技术株式会社 Mixed solvent composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1058989C (en) * 1993-10-18 2000-11-29 Ag技术株式会社 Mixed solvent composition

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