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JPS53118798A - Piezooelectric crystal film of zinc oxide - Google Patents

Piezooelectric crystal film of zinc oxide

Info

Publication number
JPS53118798A
JPS53118798A JP3351077A JP3351077A JPS53118798A JP S53118798 A JPS53118798 A JP S53118798A JP 3351077 A JP3351077 A JP 3351077A JP 3351077 A JP3351077 A JP 3351077A JP S53118798 A JPS53118798 A JP S53118798A
Authority
JP
Japan
Prior art keywords
piezooelectric
zinc oxide
crystal film
crystal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3351077A
Other languages
Japanese (ja)
Other versions
JPS571156B2 (en
Inventor
Toshio Ogawa
Kouji Nishiyama
Tasuku Masuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP3351077A priority Critical patent/JPS53118798A/en
Priority to GB2870/78A priority patent/GB1582317A/en
Priority to DE2802901A priority patent/DE2802901C3/en
Priority to NLAANVRAGE7800891,A priority patent/NL183615C/en
Priority to US05/872,342 priority patent/US4142124A/en
Priority to CH81378A priority patent/CH628464A5/en
Priority to FR7802077A priority patent/FR2378358A1/en
Publication of JPS53118798A publication Critical patent/JPS53118798A/en
Publication of JPS571156B2 publication Critical patent/JPS571156B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP3351077A 1977-01-25 1977-03-26 Piezooelectric crystal film of zinc oxide Granted JPS53118798A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP3351077A JPS53118798A (en) 1977-03-26 1977-03-26 Piezooelectric crystal film of zinc oxide
GB2870/78A GB1582317A (en) 1977-01-25 1978-01-24 Piezoelectric crystalline films
DE2802901A DE2802901C3 (en) 1977-01-25 1978-01-24 Piezoelectric crystalline film
NLAANVRAGE7800891,A NL183615C (en) 1977-01-25 1978-01-25 PILE-ELECTRIC CRYSTALLINE FILM.
US05/872,342 US4142124A (en) 1977-01-25 1978-01-25 Piezoelectric crystalline ZnO with 0.01 to 20.0 atomic % Mn
CH81378A CH628464A5 (en) 1977-01-25 1978-01-25 PIEZOELECTRIC CRYSTALINE FILM.
FR7802077A FR2378358A1 (en) 1977-01-25 1978-01-25 PIEZOELECTRIC CRYSTALLINE FILM

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3351077A JPS53118798A (en) 1977-03-26 1977-03-26 Piezooelectric crystal film of zinc oxide

Publications (2)

Publication Number Publication Date
JPS53118798A true JPS53118798A (en) 1978-10-17
JPS571156B2 JPS571156B2 (en) 1982-01-09

Family

ID=12388532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3351077A Granted JPS53118798A (en) 1977-01-25 1977-03-26 Piezooelectric crystal film of zinc oxide

Country Status (1)

Country Link
JP (1) JPS53118798A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614472A (en) * 1979-07-17 1981-02-12 Matsushita Electric Ind Co Ltd Manufacture of highhfrequency sputtring target ceramic
JP2021088773A (en) * 2021-02-10 2021-06-10 住友化学株式会社 Sputtering target material, method for producing sputtering target material, and method for producing multilayer substrate with piezoelectric thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614472A (en) * 1979-07-17 1981-02-12 Matsushita Electric Ind Co Ltd Manufacture of highhfrequency sputtring target ceramic
JP2021088773A (en) * 2021-02-10 2021-06-10 住友化学株式会社 Sputtering target material, method for producing sputtering target material, and method for producing multilayer substrate with piezoelectric thin film

Also Published As

Publication number Publication date
JPS571156B2 (en) 1982-01-09

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