[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPS53114098A - Piezooelectric crystal film of zinc oxide - Google Patents

Piezooelectric crystal film of zinc oxide

Info

Publication number
JPS53114098A
JPS53114098A JP2949777A JP2949777A JPS53114098A JP S53114098 A JPS53114098 A JP S53114098A JP 2949777 A JP2949777 A JP 2949777A JP 2949777 A JP2949777 A JP 2949777A JP S53114098 A JPS53114098 A JP S53114098A
Authority
JP
Japan
Prior art keywords
piezooelectric
zinc oxide
crystal film
crystal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2949777A
Other languages
Japanese (ja)
Other versions
JPS571154B2 (en
Inventor
Toshio Ogawa
Tasuku Masuo
Kouji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2949777A priority Critical patent/JPS53114098A/en
Priority to DE2811044A priority patent/DE2811044C3/en
Priority to US05/886,821 priority patent/US4151324A/en
Publication of JPS53114098A publication Critical patent/JPS53114098A/en
Publication of JPS571154B2 publication Critical patent/JPS571154B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP2949777A 1977-03-16 1977-03-16 Piezooelectric crystal film of zinc oxide Granted JPS53114098A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2949777A JPS53114098A (en) 1977-03-16 1977-03-16 Piezooelectric crystal film of zinc oxide
DE2811044A DE2811044C3 (en) 1977-03-16 1978-03-14 Piezoelectric Crystalline Films
US05/886,821 US4151324A (en) 1977-03-16 1978-03-15 Piezoelectric crystalline films and method of preparing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2949777A JPS53114098A (en) 1977-03-16 1977-03-16 Piezooelectric crystal film of zinc oxide

Publications (2)

Publication Number Publication Date
JPS53114098A true JPS53114098A (en) 1978-10-05
JPS571154B2 JPS571154B2 (en) 1982-01-09

Family

ID=12277701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2949777A Granted JPS53114098A (en) 1977-03-16 1977-03-16 Piezooelectric crystal film of zinc oxide

Country Status (1)

Country Link
JP (1) JPS53114098A (en)

Also Published As

Publication number Publication date
JPS571154B2 (en) 1982-01-09

Similar Documents

Publication Publication Date Title
GB2011953B (en) Thin film structures
JPS5417833A (en) Photographic element containing oonitro ooazaaallylidene capable of photoobleaching
JPS5492176A (en) Thin film structure
JPS5478119A (en) Film cassette
JPS52126476A (en) Adjusting of platness of thermplastic film
JPS5425497A (en) Piezoelectric crystal film of zinc oxide
JPS5396494A (en) Piezooelectric crystal film of zinc oxide
JPS5396495A (en) Piezooelectric crystal film of zinc oxide
JPS5445796A (en) Piezooelectric crystalline membrane of zinc oxide
JPS543297A (en) Piezoelectric crystal film of zinc oxide
JPS5443598A (en) Piezooelectric crystalline membrane of zinc oxide
JPS53142928A (en) Preparation of heattproof metal thin film
JPS53118798A (en) Piezooelectric crystal film of zinc oxide
JPS53114099A (en) Piezooelectric crystal film of zinc oxide
JPS5396496A (en) Piezooelectric crystal film of zinc oxide
JPS5392498A (en) Piezooelectric crystal film of zinc oxide
JPS53114098A (en) Piezooelectric crystal film of zinc oxide
JPS5459763A (en) Device of taking out film
JPS5429100A (en) Piezoelectric crystal film of zinc oxide
JPS5429099A (en) Piezoelectric crystal film of zinc oxide
JPS5425692A (en) Thin film structure
JPS5456380A (en) Thin film ic
JPS53142389A (en) Method of forming zinc oxide film
JPS544399A (en) Piezoelectric crystal film of zinc oxide
JPS544400A (en) Piezoelectric crystal film of zinc oxide