[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPS5248347A - Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena - Google Patents

Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena

Info

Publication number
JPS5248347A
JPS5248347A JP12324575A JP12324575A JPS5248347A JP S5248347 A JPS5248347 A JP S5248347A JP 12324575 A JP12324575 A JP 12324575A JP 12324575 A JP12324575 A JP 12324575A JP S5248347 A JPS5248347 A JP S5248347A
Authority
JP
Japan
Prior art keywords
wave interference
contact method
level difference
interference phenomena
measuring clearance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12324575A
Other languages
English (en)
Inventor
Hiroshi Takasaki
Kazuo Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HIIMO LAB KK
HIIMO RABORATORII KK
Original Assignee
HIIMO LAB KK
HIIMO RABORATORII KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HIIMO LAB KK, HIIMO RABORATORII KK filed Critical HIIMO LAB KK
Priority to JP12324575A priority Critical patent/JPS5248347A/ja
Publication of JPS5248347A publication Critical patent/JPS5248347A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
JP12324575A 1975-10-15 1975-10-15 Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena Pending JPS5248347A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12324575A JPS5248347A (en) 1975-10-15 1975-10-15 Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12324575A JPS5248347A (en) 1975-10-15 1975-10-15 Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena

Publications (1)

Publication Number Publication Date
JPS5248347A true JPS5248347A (en) 1977-04-18

Family

ID=14855786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12324575A Pending JPS5248347A (en) 1975-10-15 1975-10-15 Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena

Country Status (1)

Country Link
JP (1) JPS5248347A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4325637A (en) * 1980-06-02 1982-04-20 Tropel, Inc. Phase modulation of grazing incidence interferometer
US5532821A (en) * 1995-03-16 1996-07-02 Tropel Corporation Testing of recessed surfaces at grazing incidence
JP2018077154A (ja) * 2016-11-10 2018-05-17 日東電工株式会社 基準器、分光干渉式計測装置、塗布装置、分光干渉式計測装置の計測精度保証方法、及び、塗布膜の製造方法。

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4325637A (en) * 1980-06-02 1982-04-20 Tropel, Inc. Phase modulation of grazing incidence interferometer
US5532821A (en) * 1995-03-16 1996-07-02 Tropel Corporation Testing of recessed surfaces at grazing incidence
JP2018077154A (ja) * 2016-11-10 2018-05-17 日東電工株式会社 基準器、分光干渉式計測装置、塗布装置、分光干渉式計測装置の計測精度保証方法、及び、塗布膜の製造方法。
KR20180052510A (ko) * 2016-11-10 2018-05-18 닛토덴코 가부시키가이샤 기준기, 분광 간섭식 계측 장치, 도포 장치, 분광 간섭식 계측 장치의 계측 정밀도 보증 방법, 및 도포막의 제조 방법
TWI683097B (zh) * 2016-11-10 2020-01-21 日商日東電工股份有限公司 基準器、分光干涉式計測裝置、塗布裝置、分光干涉式計測裝置之計測精度保證方法、及塗布膜之製造方法

Similar Documents

Publication Publication Date Title
GB2016710B (en) Device and method for measuring surface properties
JPS53121675A (en) Method and apparatus of measuring surface stress
JPS5249055A (en) Method of measuring surface roughness
JPS5248347A (en) Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena
JPS522547A (en) Optical method to measure displacement of plane
JPS5322763A (en) Method of measuring surface with interference
JPS52129545A (en) Method and apparatus for measurement of uniformity in surface roughnes s
JPS51151584A (en) Measuring method for number of fish
DE3485371D1 (de) Stellungsdetektor eines zu messenden gegenstandes.
JPS5216284A (en) Detecting method of fatigue
JPS5242140A (en) Non-contact type method of measuring the outer diameter of a member ha ving a circular shape in section
JPS5411793A (en) Immersion type oblique flaw detecting method and apparatus for the same
JPS53117465A (en) Method and apparatus of measuring surface roughness
JPS524276A (en) Two-signal distortion measuring circuit
JPS5226879A (en) Method of measuring phase constants in waveguides
JPS5253447A (en) Measuring method
JPS51131670A (en) Method to measure magnetism of the magnetic body
JPS5222479A (en) Method of inspecting masks
JPS525592A (en) Ultrasonic copying flaw detection method
JPS522546A (en) Optical device to measure displacement of plane
JPS5430865A (en) Surface shape measuring method
JPS5222944A (en) Thickness gauge using ultrasonic waves
JPS5424693A (en) Measuring method of superface strength of roller made of elastic material
JPS5245955A (en) Method for measuring characteristics of round test piece without any c ontact
JPS52146289A (en) Method of inspecting surface of steel piece