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JPS5248347A - Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena - Google Patents

Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena

Info

Publication number
JPS5248347A
JPS5248347A JP12324575A JP12324575A JPS5248347A JP S5248347 A JPS5248347 A JP S5248347A JP 12324575 A JP12324575 A JP 12324575A JP 12324575 A JP12324575 A JP 12324575A JP S5248347 A JPS5248347 A JP S5248347A
Authority
JP
Japan
Prior art keywords
wave interference
contact method
level difference
interference phenomena
measuring clearance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12324575A
Other languages
Japanese (ja)
Inventor
Hiroshi Takasaki
Kazuo Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HIIMO LAB KK
HIIMO RABORATORII KK
Original Assignee
HIIMO LAB KK
HIIMO RABORATORII KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HIIMO LAB KK, HIIMO RABORATORII KK filed Critical HIIMO LAB KK
Priority to JP12324575A priority Critical patent/JPS5248347A/en
Publication of JPS5248347A publication Critical patent/JPS5248347A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)

Abstract

PURPOSE: To provide a non-contact method of measuring clearance between a reference plane and the object to be measured or surface ruggendness of the object, by the use of wave interference of light waves, microwaves, sound waves, etc., that have properties of wave interference, in which measurement can be performed without the necessity of direct handling of the object to be measured.
COPYRIGHT: (C)1977,JPO&Japio
JP12324575A 1975-10-15 1975-10-15 Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena Pending JPS5248347A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12324575A JPS5248347A (en) 1975-10-15 1975-10-15 Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12324575A JPS5248347A (en) 1975-10-15 1975-10-15 Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena

Publications (1)

Publication Number Publication Date
JPS5248347A true JPS5248347A (en) 1977-04-18

Family

ID=14855786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12324575A Pending JPS5248347A (en) 1975-10-15 1975-10-15 Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena

Country Status (1)

Country Link
JP (1) JPS5248347A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4325637A (en) * 1980-06-02 1982-04-20 Tropel, Inc. Phase modulation of grazing incidence interferometer
US5532821A (en) * 1995-03-16 1996-07-02 Tropel Corporation Testing of recessed surfaces at grazing incidence
JP2018077154A (en) * 2016-11-10 2018-05-17 日東電工株式会社 Reference device, spectroscopic interference type measuring device, coating device, measurement accuracy assurance method of spectroscopic interference type measuring device, and coating film manufacturing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4325637A (en) * 1980-06-02 1982-04-20 Tropel, Inc. Phase modulation of grazing incidence interferometer
US5532821A (en) * 1995-03-16 1996-07-02 Tropel Corporation Testing of recessed surfaces at grazing incidence
JP2018077154A (en) * 2016-11-10 2018-05-17 日東電工株式会社 Reference device, spectroscopic interference type measuring device, coating device, measurement accuracy assurance method of spectroscopic interference type measuring device, and coating film manufacturing method
KR20180052510A (en) * 2016-11-10 2018-05-18 닛토덴코 가부시키가이샤 Reference device, measuring device using spectroscopic interference method, coating device, measurement accuracy assurance method of measuring device using spectroscopic interference method, and method for producing coating film
TWI683097B (en) * 2016-11-10 2020-01-21 日商日東電工股份有限公司 Reference device, measuring device using spectroscopic interference method, coating device, measurement accuracy assurance method of measuring device using spectroscopic interference method, and method for producing coating film

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