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JPS5239371A - Method for selective diffusion - Google Patents

Method for selective diffusion

Info

Publication number
JPS5239371A
JPS5239371A JP11478475A JP11478475A JPS5239371A JP S5239371 A JPS5239371 A JP S5239371A JP 11478475 A JP11478475 A JP 11478475A JP 11478475 A JP11478475 A JP 11478475A JP S5239371 A JPS5239371 A JP S5239371A
Authority
JP
Japan
Prior art keywords
selective diffusion
sio
diffusion
selective
aid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11478475A
Other languages
Japanese (ja)
Inventor
Mitsuo Nanba
Hisayuki Higuchi
Akira Shintani
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11478475A priority Critical patent/JPS5239371A/en
Publication of JPS5239371A publication Critical patent/JPS5239371A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To protect P from its diffusion into substrate and to get Ga with an aid of three-layered mask of SiO2-SiO2(P2O5)-SiO2 type.
COPYRIGHT: (C)1977,JPO&Japio
JP11478475A 1975-09-25 1975-09-25 Method for selective diffusion Pending JPS5239371A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11478475A JPS5239371A (en) 1975-09-25 1975-09-25 Method for selective diffusion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11478475A JPS5239371A (en) 1975-09-25 1975-09-25 Method for selective diffusion

Publications (1)

Publication Number Publication Date
JPS5239371A true JPS5239371A (en) 1977-03-26

Family

ID=14646585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11478475A Pending JPS5239371A (en) 1975-09-25 1975-09-25 Method for selective diffusion

Country Status (1)

Country Link
JP (1) JPS5239371A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834914A (en) * 1981-08-25 1983-03-01 Nec Corp Mask for selective diffusion
JPS60154195A (en) * 1984-01-25 1985-08-13 株式会社日立製作所 Method of removing fast breeder reactor cover gas system sodium
JP2008076036A (en) * 2006-08-22 2008-04-03 Shichiyo Seisakusho:Kk Stackable confectionery oven

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834914A (en) * 1981-08-25 1983-03-01 Nec Corp Mask for selective diffusion
JPS60154195A (en) * 1984-01-25 1985-08-13 株式会社日立製作所 Method of removing fast breeder reactor cover gas system sodium
JPH0365877B2 (en) * 1984-01-25 1991-10-15
JP2008076036A (en) * 2006-08-22 2008-04-03 Shichiyo Seisakusho:Kk Stackable confectionery oven

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