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JPS522176A - Method of forming integrated circuit pattern - Google Patents

Method of forming integrated circuit pattern

Info

Publication number
JPS522176A
JPS522176A JP51056775A JP5677576A JPS522176A JP S522176 A JPS522176 A JP S522176A JP 51056775 A JP51056775 A JP 51056775A JP 5677576 A JP5677576 A JP 5677576A JP S522176 A JPS522176 A JP S522176A
Authority
JP
Japan
Prior art keywords
integrated circuit
circuit pattern
forming integrated
forming
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP51056775A
Other languages
English (en)
Other versions
JPS5329581B2 (ja
Inventor
Pii Chiyan Taiihon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS522176A publication Critical patent/JPS522176A/ja
Publication of JPS5329581B2 publication Critical patent/JPS5329581B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electron Beam Exposure (AREA)
JP51056775A 1975-06-13 1976-05-19 Method of forming integrated circuit pattern Granted JPS522176A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/586,697 US3956635A (en) 1975-06-13 1975-06-13 Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns

Publications (2)

Publication Number Publication Date
JPS522176A true JPS522176A (en) 1977-01-08
JPS5329581B2 JPS5329581B2 (ja) 1978-08-22

Family

ID=24346799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51056775A Granted JPS522176A (en) 1975-06-13 1976-05-19 Method of forming integrated circuit pattern

Country Status (7)

Country Link
US (1) US3956635A (ja)
JP (1) JPS522176A (ja)
CA (1) CA1043912A (ja)
DE (1) DE2620262C2 (ja)
FR (1) FR2314580A1 (ja)
GB (1) GB1483171A (ja)
IT (1) IT1063968B (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54179142U (ja) * 1978-06-08 1979-12-18
JPS58202529A (ja) * 1982-05-21 1983-11-25 Toshiba Corp 荷電ビ−ム光学鏡筒
JPS60244024A (ja) * 1984-05-18 1985-12-03 Hitachi Ltd 電子線露光装置

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4075488A (en) * 1974-09-06 1978-02-21 Agency Of Industrial Science & Technology Pattern forming apparatus using quadrupole lenses
JPS5283177A (en) * 1975-12-31 1977-07-11 Fujitsu Ltd Electron beam exposure device
US4393312A (en) * 1976-02-05 1983-07-12 Bell Telephone Laboratories, Incorporated Variable-spot scanning in an electron beam exposure system
JPS52119178A (en) * 1976-03-31 1977-10-06 Toshiba Corp Electron beam exposure device
US4039810A (en) * 1976-06-30 1977-08-02 International Business Machines Corporation Electron projection microfabrication system
FR2361190A1 (fr) * 1976-08-09 1978-03-10 Zeiss Carl Fa Procede et dispositif d'usinage a froid par faisceau electronique
DE2755399A1 (de) * 1976-12-14 1978-06-22 Ernst Prof Dipl Phys Froeschle Elektronenstrahlbelichtungsverfahren mit kompensation des proximityeffekts
GB1598219A (en) * 1977-08-10 1981-09-16 Ibm Electron beam system
US4199689A (en) * 1977-12-21 1980-04-22 Tokyo Shibaura Denki Kabushiki Kaisha Electron beam exposing method and electron beam apparatus
NL182924C (nl) * 1978-05-12 1988-06-01 Philips Nv Inrichting voor het implanteren van ionen in een trefplaat.
US4263514A (en) * 1979-09-13 1981-04-21 Hughes Aircraft Company Electron beam system
US4276477A (en) * 1979-09-17 1981-06-30 Varian Associates, Inc. Focusing apparatus for uniform application of charged particle beam
US4449051A (en) * 1982-02-16 1984-05-15 Varian Associates, Inc. Dose compensation by differential pattern scanning
FR2532783A1 (fr) * 1982-09-07 1984-03-09 Vu Duy Phach Machine de traitement thermique pour semiconducteurs
CN86105432A (zh) * 1985-09-27 1987-05-27 美国电话电报公司 带电粒子束曝光
GB2190567A (en) * 1986-05-16 1987-11-18 Philips Electronic Associated Electron beam pattern generator control
JPH0616405B2 (ja) * 1987-09-02 1994-03-02 株式会社日立製作所 電子顕微鏡
US5130547A (en) * 1989-11-30 1992-07-14 Fujitsu Limited Charged-particle beam exposure method and apparatus
US5159201A (en) * 1991-07-26 1992-10-27 International Business Machines Corporation Shape decompositon system and method
US5251140A (en) * 1991-07-26 1993-10-05 International Business Machines Corporation E-beam control data compaction system and method
WO1996028838A1 (en) * 1995-03-10 1996-09-19 Leica Cambridge, Ltd. Method of writing a pattern by an electron beam
US6979831B2 (en) * 2004-02-19 2005-12-27 Seagate Technology Llc Method and apparatus for a formatter following electron beam substrate processing system
US7038225B2 (en) * 2004-06-23 2006-05-02 Seagate Technology Llc Method and apparatus for electron beam processing of substrates
DE102012010707A1 (de) * 2012-05-30 2013-12-05 Carl Zeiss Microscopy Gmbh Verfahren und vorrichtung zum abrastern einer oberfläche einesobjekts mit einem teilchenstrahl

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3547074A (en) * 1967-04-13 1970-12-15 Block Engineering Apparatus for forming microelements
US3483427A (en) * 1967-11-03 1969-12-09 Minnesota Mining & Mfg Lens for electron beam recorder
NL6807439A (ja) * 1968-05-27 1969-12-01
DE1765852C3 (de) * 1968-07-26 1979-03-01 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen
GB1308077A (en) * 1970-02-27 1973-02-21 Mullard Ltd Exposing a target to a beam of charged particles

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54179142U (ja) * 1978-06-08 1979-12-18
JPS58202529A (ja) * 1982-05-21 1983-11-25 Toshiba Corp 荷電ビ−ム光学鏡筒
JPS638610B2 (ja) * 1982-05-21 1988-02-23 Toshiba Kk
JPS60244024A (ja) * 1984-05-18 1985-12-03 Hitachi Ltd 電子線露光装置

Also Published As

Publication number Publication date
DE2620262C2 (de) 1985-04-18
US3956635A (en) 1976-05-11
JPS5329581B2 (ja) 1978-08-22
IT1063968B (it) 1985-02-18
FR2314580A1 (fr) 1977-01-07
GB1483171A (en) 1977-08-17
FR2314580B1 (ja) 1979-04-27
DE2620262A1 (de) 1976-12-23
CA1043912A (en) 1978-12-05

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