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JPS52116078A - Electron beam-exposing device - Google Patents

Electron beam-exposing device

Info

Publication number
JPS52116078A
JPS52116078A JP3242076A JP3242076A JPS52116078A JP S52116078 A JPS52116078 A JP S52116078A JP 3242076 A JP3242076 A JP 3242076A JP 3242076 A JP3242076 A JP 3242076A JP S52116078 A JPS52116078 A JP S52116078A
Authority
JP
Japan
Prior art keywords
electron beam
exposing device
construct
roller
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3242076A
Other languages
Japanese (ja)
Other versions
JPS5413352B2 (en
Inventor
Tadahiro Takigawa
Kazuo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3242076A priority Critical patent/JPS52116078A/en
Publication of JPS52116078A publication Critical patent/JPS52116078A/en
Publication of JPS5413352B2 publication Critical patent/JPS5413352B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To construct an electron beam-exposing device from table guide, roller, bearing and the like formed on nonmagnetic material which can be precisely processed and has a hardness HRC of more than 60.
COPYRIGHT: (C)1977,JPO&Japio
JP3242076A 1976-03-26 1976-03-26 Electron beam-exposing device Granted JPS52116078A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3242076A JPS52116078A (en) 1976-03-26 1976-03-26 Electron beam-exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3242076A JPS52116078A (en) 1976-03-26 1976-03-26 Electron beam-exposing device

Publications (2)

Publication Number Publication Date
JPS52116078A true JPS52116078A (en) 1977-09-29
JPS5413352B2 JPS5413352B2 (en) 1979-05-30

Family

ID=12358445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3242076A Granted JPS52116078A (en) 1976-03-26 1976-03-26 Electron beam-exposing device

Country Status (1)

Country Link
JP (1) JPS52116078A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58107632A (en) * 1981-12-22 1983-06-27 Tohoku Tokushuko Kk Material for electron beam drawing apparatus
JPH07142558A (en) * 1994-03-14 1995-06-02 Canon Inc Stage device
JPH09129712A (en) * 1996-07-29 1997-05-16 Canon Inc Semiconductor manufacturing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58107632A (en) * 1981-12-22 1983-06-27 Tohoku Tokushuko Kk Material for electron beam drawing apparatus
JPH07142558A (en) * 1994-03-14 1995-06-02 Canon Inc Stage device
JPH09129712A (en) * 1996-07-29 1997-05-16 Canon Inc Semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
JPS5413352B2 (en) 1979-05-30

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