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JPS52116076A - Preparation of film for protecting surface of electronic parts - Google Patents

Preparation of film for protecting surface of electronic parts

Info

Publication number
JPS52116076A
JPS52116076A JP3256276A JP3256276A JPS52116076A JP S52116076 A JPS52116076 A JP S52116076A JP 3256276 A JP3256276 A JP 3256276A JP 3256276 A JP3256276 A JP 3256276A JP S52116076 A JPS52116076 A JP S52116076A
Authority
JP
Japan
Prior art keywords
film
preparation
electronic parts
protecting surface
protecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3256276A
Other languages
Japanese (ja)
Inventor
Hideo Sakai
Takeo Yoshimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3256276A priority Critical patent/JPS52116076A/en
Publication of JPS52116076A publication Critical patent/JPS52116076A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To prepare a surface protection film by forming a silicate glass film on the surface of a gold layer through Si3N4 film.
COPYRIGHT: (C)1977,JPO&Japio
JP3256276A 1976-03-26 1976-03-26 Preparation of film for protecting surface of electronic parts Pending JPS52116076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3256276A JPS52116076A (en) 1976-03-26 1976-03-26 Preparation of film for protecting surface of electronic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3256276A JPS52116076A (en) 1976-03-26 1976-03-26 Preparation of film for protecting surface of electronic parts

Publications (1)

Publication Number Publication Date
JPS52116076A true JPS52116076A (en) 1977-09-29

Family

ID=12362338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3256276A Pending JPS52116076A (en) 1976-03-26 1976-03-26 Preparation of film for protecting surface of electronic parts

Country Status (1)

Country Link
JP (1) JPS52116076A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5892201A (en) * 1981-11-27 1983-06-01 松下電器産業株式会社 Thin film platinum temperature sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5892201A (en) * 1981-11-27 1983-06-01 松下電器産業株式会社 Thin film platinum temperature sensor
JPS6335084B2 (en) * 1981-11-27 1988-07-13 Matsushita Electric Ind Co Ltd

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