JPS51140571A - Method for forming a semiconductor protective film - Google Patents
Method for forming a semiconductor protective filmInfo
- Publication number
- JPS51140571A JPS51140571A JP6562375A JP6562375A JPS51140571A JP S51140571 A JPS51140571 A JP S51140571A JP 6562375 A JP6562375 A JP 6562375A JP 6562375 A JP6562375 A JP 6562375A JP S51140571 A JPS51140571 A JP S51140571A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- forming
- semiconductor protective
- semiconductor
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To obtain a semiconductor device stable in characteristics, by preventing unfavorable influence on the electric characteristics during forming a protective film on the surface thereof.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6562375A JPS51140571A (en) | 1975-05-30 | 1975-05-30 | Method for forming a semiconductor protective film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6562375A JPS51140571A (en) | 1975-05-30 | 1975-05-30 | Method for forming a semiconductor protective film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51140571A true JPS51140571A (en) | 1976-12-03 |
Family
ID=13292323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6562375A Pending JPS51140571A (en) | 1975-05-30 | 1975-05-30 | Method for forming a semiconductor protective film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51140571A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60158672A (en) * | 1984-01-27 | 1985-08-20 | Seiko Instr & Electronics Ltd | Manufacture of semiconductor device |
-
1975
- 1975-05-30 JP JP6562375A patent/JPS51140571A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60158672A (en) * | 1984-01-27 | 1985-08-20 | Seiko Instr & Electronics Ltd | Manufacture of semiconductor device |
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