JPS59169046U - adsorption device - Google Patents
adsorption deviceInfo
- Publication number
- JPS59169046U JPS59169046U JP6455283U JP6455283U JPS59169046U JP S59169046 U JPS59169046 U JP S59169046U JP 6455283 U JP6455283 U JP 6455283U JP 6455283 U JP6455283 U JP 6455283U JP S59169046 U JPS59169046 U JP S59169046U
- Authority
- JP
- Japan
- Prior art keywords
- adsorption device
- attracted
- plate
- sucks
- vacuum suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図Ａ、 Ｂ及び第２図は本考案の１実施例を示す吸
着器の斜視図である。第３図は上記吸着器に適用される
保持具の１実施例を示す斜視図である。
１・・・本体、２・・・プレート、３・・・凹部、４・
・・環状枠、５・・・溝、６．７・・・真空吸引孔、８
・・・貫通孔。FIGS. 1A and 1B and FIG. 2 are perspective views of an adsorption device showing one embodiment of the present invention. FIG. 3 is a perspective view showing one embodiment of a holder applied to the suction device. 1... Main body, 2... Plate, 3... Recess, 4...
...Annular frame, 5...Groove, 6.7...Vacuum suction hole, 8
...Through hole.
Claims (1)
接触するプレートを吸引する第２の真空−吸引部とを本
体に有し、前記プレートを介して前記被吸着体を着脱す
ることを特徴とする吸着器。The main body includes a first vacuum suction section that sucks an object to be attracted, and a second vacuum suction section that sucks a plate that is in contact with the object to be attracted, and the object to be attracted is attached and detached via the plate. An adsorption device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6455283U JPS59169046U (en) | 1983-04-26 | 1983-04-26 | adsorption device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6455283U JPS59169046U (en) | 1983-04-26 | 1983-04-26 | adsorption device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59169046U true JPS59169046U (en) | 1984-11-12 |
Family
ID=30194737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6455283U Pending JPS59169046U (en) | 1983-04-26 | 1983-04-26 | adsorption device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59169046U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS571077U (en) * | 1980-05-30 | 1982-01-06 | ||
| JPS5830128A (en) * | 1981-08-17 | 1983-02-22 | Hitachi Ltd | Waffer chuck device |
-
1983
- 1983-04-26 JP JP6455283U patent/JPS59169046U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS571077U (en) * | 1980-05-30 | 1982-01-06 | ||
| JPS5830128A (en) * | 1981-08-17 | 1983-02-22 | Hitachi Ltd | Waffer chuck device |
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