JPS59122967A - Apparatus for measuring electric characteristics - Google Patents

Abstract

PURPOSE:To enable high speed measurement of an active element or a passive element by a large current, by distributing a total current to be applied by mounting a plurality of voltage-current applying terminals. CONSTITUTION:In an electric characteristic apparatus of a Kelvin's contact for butt-connecting a pair of a voltage-current applying terminal 2 and a characteristic measuring terminal 4 to the leads 5a, 5b of an element 5 to be measured such as a diode, a plurality of voltage-current applying terminals 11, 21, 13, 23 for distributing the total current to be applied of a measuring power source apparatus part 8 are mounted. Therefore, with respect to a pair of multi-contacts, applying contacts are constituted of a plurality of numbers and contact resistance becomes low while a measuring contact is one and a measuring error is totally reduced because of Kelvin's connection and the electric characteristics of an active element or a passive element can be measured at a high speed by a large current.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an electrical characteristic measuring device, and in particular to an improved multi-contact device for precise electrical measurement of semiconductor devices, resistive elements, etc. at large currents.

[Technical Background of the Invention] Conventionally, in measuring the electrical characteristics of semiconductor devices, resistance elements, etc., a voltage contact and a current contact are configured as a pair with one contact each. For example, when measuring diodes, two pairs of contacts, so-called Kelvin contacts, shown in the circuit system of FIG. 1 have been used. In particular, the contact portion with the diode lead is shown in FIG. In FIGS. 1 and 2, (1) is an application contact for applying voltage and current, (2) is a measurement contact for measuring characteristics, and (1) and (2) form a pair.

Similarly, apply contact (3) and measurement contact (
4) forms a pair, - example diode (5) (object to be measured)
The leads (5a) and (5b) are connected by contact. Also,(
6) is a contact fixing table, (the force is a contact intermediate fixing device, both of which are glass epoxy resin molded bodies of - example, and the above-mentioned application contacts (1), (31), measurement contacts 1-+21, (41) The application contact (3) and the measurement contact (4) are electrically insulated (covered) from each other and connected to the measurement power supply unit (8) shown in FIG. , Measuring equipment department (
9) respectively.

The measuring device on the diagonal is an example of a diode, a power transistor, etc.VnIi! When measuring p (base-emitter forward voltage), it is possible to automate the measuring device, for example by reducing the feed time (index) to less than 0.5 seconds, thus reducing the contact time to several hundred milliJ seconds. , it is necessary to complete the measurement at a high speed with an actual measurement time of about 1 millisecond. Moreover, the contact current has a contact area of 1
．． At 8-, the durability (tested 10,000 times) is almost satisfactory for 5A, but it cannot withstand use for 10A. Note that this will be described later based on data.

[Problems with background technology]

According to the above-mentioned background technology, it is extremely difficult to measure a large amount of power with a large current on a semiconductor device, which is a serious obstacle to the automation of a measuring device that performs measurements at high speed. Furthermore, if the lead of the object to be measured is bent, the contact resistance with the contact increases, making it difficult to apply a large current. Due to the above two problems, the durability of the contact at the contact portion deteriorates. Furthermore, the heat generated by the contact has a large effect on the temperature characteristics of the object to be measured.

[Purpose of the invention]

The present invention has been made in view of the problems of the background art described above, and provides an electrical characteristic measuring device that enables high-speed measurement of active elements and passive elements with large currents.

1. Summary of the Invention The present invention is a device for measuring the characteristics of Kelvin connections in active elements and passive elements, and is characterized in that it is equipped with a plurality of voltage and current application terminals that distribute the total applied current.

[Embodiment of the Invention] Next, improvements in a diode measuring device according to one embodiment of the present invention will be explained in detail with reference to FIGS. 3 and 4.

As shown in the figure, the application contact is made up of two, for example, and the first application contact (1st application contact) is connected to one lead (5a).
(11), second application contact 1- +21), third application contact for the other lead (5h) (
13) Each Kelvin contact is formed by the fourth application contact (23). Therefore-
The contact fixing table aQ and the contact intermediate fixing device α force for orienting each of the measurement contacts +2+ and +4> are connected to three lines of contact leads for one lead (5a) and for the other lead (5b).
) and 3 lines of contact leads are penetrated and positioned. Note that the first and second application contacts are wired in place of the leads of the conventional application contact (1) of the measurement source device section (8), which is the same as the conventional one, and the third and second application contacts are This is the same as in the diagonal upper case in that the voltage application contacts (4) are both wired in place of the leads of the conventional voltage application contacts (3). In addition, the cutting device section (9
) and from this the diode leads (5a), (5b
) is the same as before.

Next, one multi-contact is shown in Figure 5 fa) * fb
) as an example. The contact area 0()) shown with crosshatching in the same area fb) is the lead ((5a) or (51)))
indicates the contact area, and is formed wide with respect to the lead, that is, the lead width is 3 to 5 mm, so even if the lead is bent, complete contact can be made at the contact area (adjacent to the contact area 101).

Next, the contact portion is not limited to the above embodiment;
As shown in FIGS. 1-(c), the contact portions may each correspond to the shape shown by dotting the lead terminal of the object to be measured.

〔Effect of the invention〕

This invention has the following advantages.

(1) Regarding a pair of multi-contacts, since the application contacts are composed of multiple contacts, the overall □contact resistance is low. This can be seen in Table 1 at the end.

(2) Regarding a pair of multi-contacts, there is only one measurement contact, and the overall measurement error is small because it is a Kelvin connection.

(3) According to each of the above items (1) and (2), precise measurement is possible by applying large current and large power. In other words, as shown in Table 1, a maximum applied current of 50 A can be achieved with 3 contacts, and the life performance is also the same as shown in the second table at the end.
As shown in the table, it is good. This facilitates maintenance of the device and completes measurement automation.

(4) The contact shape can be manufactured with approximately the same size as the conventional one, and the measuring handler itself can expand the measurement range with the same size as the conventional one. In addition, the measurement range (current value) can be adjusted by increasing or decreasing the number of application contacts.
It is easy to change.

(5) As a recent trend, there is a tendency for the material of the lead terminals of the object to be measured to be replaced with softer materials. For this reason, there is a strong tendency for lead terminals to bend during measurement, and this is becoming a problem as measurements become faster.However, according to the present invention, since there are multiple contacts for application, bending can be easily avoided. There are significant benefits of contact.

(6) Since the heat generation of the contact portion can be suppressed to a small level by each of the above items (1) and (51), the influence on the temperature of the object to be measured can be significantly reduced.

(111・jz white) Table 2 following Table 1 shows the initial non-defective rate (judgment level less than 50 mV is considered non-defective) (A4 Oka in the table) and the non-defective rate after 10,000 uses (judgment level same as above). , column B in the table).

Table 2

[Brief explanation of drawings]

1 and 2 show a conventional measuring device, FIG. 1 is a circuit diagram for measurement, FIG. 2 is a perspective view of a multi-contact part, and FIGS. 3 and 4 are a measuring device of one embodiment. 3 is a measurement circuit diagram, FIG. 4 is a perspective view of the multi-contact part, and FIG. 5 is one of the multi-contacts.
Fig. 6(a) is a side view of both a) and Fig. 6(b) viewed from directions different by 90°. (h) and (c) are both partially cross-sectional side views showing different methods of contact. 2.4 Measurement contact 5 Diode (object to be measured) 5a, 5b
Lead 8 Measuring power supply @ section 9 Measuring device section 10 Contact section 11 First application contact 21
Second application contact 13 Third application contact 23 Fourth application contact 16' Contact fixing base 17 Contact intermediate fixing device agent Patent attorney Inoue - Male Figure 1 Figure 2 Figure 3 Figure 4 ((1 > No. (0) Figure tb) n Figure 6 (Mu) (C)

Claims (1)

[Claims] A Kelvin contact electrical characteristic measuring device that connects voltage and current application terminals and characteristic measurement terminals in pairs to the leads of active elements and passive elements, and is equipped with multiple voltage and current application terminals that distribute the total applied current. An electrical property measuring device characterized by: