JPS58209105A - Substrate material - Google Patents

Abstract

PURPOSE:To prevent an Fe-Ni metallic magnetic film from exfoliating during a heat treatment, by employing as a substrate a non-magnetic material represented by the formula, ZnxMn2-xNiO3 (0<=x<=1). CONSTITUTION:ZnO, MnO and NiO are weighed, mixed together and ground in water and then calcinated at 700-1,200 deg.C before being formed by means of a mold. Then, the mixture is sintered at 1,150-1,300 deg.C in N2 to prepare a material represented by the formura, ZnxMn2-xNiO3 (0<=x<=1). This material has the NaCl structure. The material is mirror-finished and provided with an Fe-Ni metallic magnetic film by sputtering and then annealed. The substrate formed in accordance with this constitution is equal in thermal expansion coefficient to the Fe-Ni metallic magnetic film; therefore, any desired annealing can be effected without any possibility of exfoliation. In addition, since the substrate has a hardness substantially equal to that of the magnetic powder in a magnetic tape, it is made possible to construct an excellent thin film magnetic head.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a non-magnetic substrate material for depositing metal magnetic films.

Conventionally, when manufacturing thin film magnetic heads, integrated circuit elements, etc., for example, barium titanate, calcium titanate, alumina, zinc ferrite, glass, etc. are used as nonmagnetic substrate materials, and a metal magnetic film is formed on the substrate material. Shitachino was used.

However, after using these materials as substrate materials and performing mirror processing, 1-rerolled ethylene was produced.

Washed in an organic solvent such as acetic acid, etc., and applied U ``＞'(4''-6 method, Subano Schilling) to this substrate-1-.
A film 1 of C several μm to several 1 μm is obtained using the known method technology such as Sil-Ning). , F-e-N! Formation of a metal magnetic v1 film (7. After A, heat treatment by heating in a clean air at 500-700°C is carried out to reconstitute the magnetic film f1.

However, in many of the conventional base monthly interest rates described in 1., the coefficient of thermal expansion of a is very different from the coefficient of thermal expansion α of the metal 1f'l film.
Since it is made of J, it has the disadvantage that the steamed male magnetic film is difficult to peel off. For example, in the case of glass whose coefficient of thermal expansion matches that of the metal magnetic film, there is no problem of peeling of the evaporation film, but when a 1PIA magnetic head is constructed ( The disadvantage is that it wears out due to sliding with the magnetic arm due to its low hardness.

For this reason, the thermal expansion of the FeNi metal mfi;
It has a coefficient of thermal expansion close to 120×10-'77'℃),
Moreover, the hardness is determined by the magnetic powder contained in the magnetic arp (
v = 500・~700KO/'1OI2) 1
It was hoped that a non-magnetic substrate material that could be made from 1F bamboo would emerge.3
゜The present invention was developed in response to the above-mentioned needs, and aims to provide a non-magnetic substrate material most suitable for forming c-Jli metal magnetic films by physical vaporization. Do1'ru.

In order to achieve the first object, the present invention provides ZO2ft,=I
The present invention is characterized in that an oxide represented by n27NtOa (/ζdashi0≦X≦1) having up to #4 salt type is used as a non-magnetic base material for metal magnetic deevaporation.

The oxide having the composition I is used as a structural material related to ferrite magnetic heads in the manufacturing technology of ferrite magnetic heads, and has previously been proposed by the applicant of the present invention (Japanese Patent Application Laid-Open No. 1983-1991). (See Publication No. 126797).

However, when the proposal was made earlier, the focus was on the characteristics of the structural material of the magnetic head, and it was not necessarily clear whether the monthly yield was suitable for the substrate material C on which the metal magnetic film was deposited.

The present inventors have developed a novel 4
As a result of various studies to realize A-size, we found that the non-magnetic material with the composition described in 1-1 is particularly suitable as a substrate material for Fe-Ni metal magnetic film deposition, and completed the present invention. (There is,.

In the present invention, a3 is C10, mo x'-1 and l- is number J, and this composition range C has a thermal expansion coefficient α or 100.~1iox
io.

It becomes 1!1 character of ℃ culm, [e-N! This is because the system ↑ belonging magnetic P [α□ of the film]: r is equivalent.

In addition, according to the present invention, in J3, the composition j is made into a 1-component.
Contains additives such as l, Cr, 3i, Sn, and 13ai.
In this case, there is an advantage that J can be highly electrified, so a becomes [ONi system ♀ genus 1af'! If it is roughly equivalent to α of the membrane, the effect of the present invention can be similarly reduced to 1.
((!ru.

Hereinafter, the present invention will be described as an example.

Examples] Compositional formula Zrl (back of oxide nonmagnetic material represented by Mn2-ENi03, XO,0,4,0,8J
＞, J, Bi1.0, 6 Sakeri Z
Weigh eO, MnCO, and NiO, and prepare up to 500 g of each desired oxide. Production, mixing, and pulverization are carried out using a ball mill in water or an organic solvent such as alcohol or acetone for 10 minutes.
- Treated for -20 hours. In addition, a material having a composition of X = 0.4 +;-Al2O, to which 4 small ω% was added during pulverization, was manufactured in the same manner.

Soft firing was carried out at 700-1200℃, and after molding,
Sintered in a temperature range of 1150-1300℃ in a nitrogen bath.
W 6 obtained 4) J $'l was analyzed by UX rays,
It was confirmed that it was aC1 Magazou. Next, a substrate with a shape of 10 x 20 x 2t with one side mirror-finished is processed from these materials, and a Fe-jNi metal magnetic film (permanent 11
A film) was formed to a thickness of about 5 μm. The thus obtained product was subjected to furnace cooling fl U heat treatment in vacuum at 600° C. for 10 minutes. The results are shown in Table 1.

For comparison, a substrate made of barium butanoate thread as a conventional material was also fabricated and processed in the same manner as above.

1st person O: No peeling, ×: Peeling: A 12 03 4 small -)
% As is clear from Table 1 of Appendix 111, conventional 1
, 1-i, jiji (There is no peeling of the A-group magnetic film during heat treatment in the monthly yield of the present invention.Also, when Δ1)Oyo is added as a subcomponent, α is 107×10/” C, there is no problem in A (it is clear that it is effective, and it is compatible with the advantage of increasing the high density to 4+) .

Below 1. As described in detail, by using the magnetized F1M treatment material of the present invention, it is possible to obtain 7 (, This has the advantage of being able to perform rapid heat treatment without worrying about peeling of the film, and thus producing a film with excellent magnetic properties. For this reason, the commercial 1+Tb solution of the present invention is extremely impressive.

Procedural amendment (method) % formula%
Ming's name (Ro)

Substrate material ++ti +F person who performs ・sog, I"4 other affiliated companies
]・ Koga! Ilr
Nori no Soyo River! Person 1, ~ 4 Heavy Industries; C Chiyo) 11 Wards 90 Contents 1
'll1 No. 28 Procedural Amendment (voluntary), 1□'fff15, 12. ,,6゜・IG r'l
(No. 11, 1988, Application No. 92798, J Sleeve)
Name to do 1・1... -II) Seki f4 Mochi □'
Dekoma 1 no (ji・ii Tokyo cho-dai 11
1 Ward Marunouchi 2 ``Eye 1 No. 25;-n, Izu ・50g
＋ ll, "Ig belongs to the corporation) 7h Norio Kono representative person residence -・! 1 Higashi City Bucho・dai 111 ward Marunouchi 21
'l11 No. 2ぢ11・''/, P Group Corporation Internal Telephone Tokyo 2B&-4642 Supplement 11 χ・ is the ``Detailed Description of the Invention'' section of the specification.

Contents of amendment L #Detailed description of the invention in the IA specification 411
Correct 2 as follows.

Note (1) f-zeo J in Mei #41, line 16, r Z
nOJK Correct.

that's all

Claims (1)

[Claims] 1, 2% M n2-z N! 03 (However, 0≦
A non-magnetic substrate material for depositing a metal magnetic film, characterized by having a right-handed salt structure represented by x≦1)r. 2. The metal magnetic film is Fe-N! 2. The nonmagnetic substrate material for depositing a metal magnetic film according to claim 1, wherein the nonmagnetic substrate material is a high permeability magnetic film.