JPS5789273A - Manufacture of light emitting element - Google Patents
Manufacture of light emitting elementInfo
- Publication number
- JPS5789273A JPS5789273A JP16456380A JP16456380A JPS5789273A JP S5789273 A JPS5789273 A JP S5789273A JP 16456380 A JP16456380 A JP 16456380A JP 16456380 A JP16456380 A JP 16456380A JP S5789273 A JPS5789273 A JP S5789273A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- groove
- around
- protective film
- outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010410 layer Substances 0.000 abstract 11
- 230000001681 protective effect Effects 0.000 abstract 3
- 230000006866 deterioration Effects 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 239000011241 protective layer Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Abstract
PURPOSE:To prevent deterioration of elements by providing an anode electrode of a horse shoe shape around the outside and a round cathode electrode around the main surface of inside of a groove by diffusing impurity to make a P<+> layer inside and outside of the circular groove which is formed on a P-N-N<+> type laminated substrate. CONSTITUTION:A Ga Al As layer 2 on a Ga As substrate 1 and a P layer 4, an N layer 5, an N<+> layer 6 and a protective layer 17 are consecutively formed. A groove 18 is made by etching the N layer and the N<+> layer 6 using a ring type groove made by a photo resist. The protective film around the groove is removed leaving the protective film surrounded by the groove. By diffusing Zn with a remaining protective film as a mask, a P<+> layer is formed in and around the groove. A round cathode electrode 8 and a horse shoe shaped anode electrode is formed on the N<+> layer and P layer inside and outside of the groove. Each layer is exposed by etching in mesa shape the inside surface of the groove 18. This makes the height of each electrode equal preventing the deterioration of element and maintaining high quality.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16456380A JPS5789273A (en) | 1980-11-25 | 1980-11-25 | Manufacture of light emitting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16456380A JPS5789273A (en) | 1980-11-25 | 1980-11-25 | Manufacture of light emitting element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5789273A true JPS5789273A (en) | 1982-06-03 |
Family
ID=15795534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16456380A Pending JPS5789273A (en) | 1980-11-25 | 1980-11-25 | Manufacture of light emitting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5789273A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108281528A (en) * | 2013-03-18 | 2018-07-13 | 晶元光电股份有限公司 | Light-emitting component |
| WO2019031009A1 (en) * | 2017-08-08 | 2019-02-14 | シャープ株式会社 | Light-emitting element and display device |
| JP2019212834A (en) * | 2018-06-07 | 2019-12-12 | 信越半導体株式会社 | Light-emitting element and method of manufacturing the same |
| US10529885B2 (en) | 2017-03-31 | 2020-01-07 | Asahi Kasei Microdevices Corporation | Optical device and method for manufacturing the same |
-
1980
- 1980-11-25 JP JP16456380A patent/JPS5789273A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108281528A (en) * | 2013-03-18 | 2018-07-13 | 晶元光电股份有限公司 | Light-emitting component |
| CN108281528B (en) * | 2013-03-18 | 2021-06-29 | 晶元光电股份有限公司 | Light emitting element |
| US10529885B2 (en) | 2017-03-31 | 2020-01-07 | Asahi Kasei Microdevices Corporation | Optical device and method for manufacturing the same |
| WO2019031009A1 (en) * | 2017-08-08 | 2019-02-14 | シャープ株式会社 | Light-emitting element and display device |
| JP2019212834A (en) * | 2018-06-07 | 2019-12-12 | 信越半導体株式会社 | Light-emitting element and method of manufacturing the same |
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