[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPS5781986A - Method and device for laser working - Google Patents

Method and device for laser working

Info

Publication number
JPS5781986A
JPS5781986A JP55158295A JP15829580A JPS5781986A JP S5781986 A JPS5781986 A JP S5781986A JP 55158295 A JP55158295 A JP 55158295A JP 15829580 A JP15829580 A JP 15829580A JP S5781986 A JPS5781986 A JP S5781986A
Authority
JP
Japan
Prior art keywords
work
holder
slit
hologram
fine adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55158295A
Other languages
Japanese (ja)
Inventor
Hideo Fujiwara
Kiichi Kamiyanagi
Keiji Kataoka
Masahide Suenaga
Sanehiro Kudo
Takeshi Kimura
Takayuki Kumasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55158295A priority Critical patent/JPS5781986A/en
Publication of JPS5781986A publication Critical patent/JPS5781986A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/0066—Adaptation of holography to specific applications for wavefront matching wherein the hologram is arranged to convert a predetermined wavefront into a comprehensive wave, e.g. associative memory

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Holo Graphy (AREA)
  • Laser Beam Processing (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)

Abstract

PURPOSE:To etch a desired pattern on the work without lowering the rate of utilization of laser beams by irradiating the laser beam shaped by the use of a holography. CONSTITUTION:A work holder 534 is provided partly with a transparent part 535, and the surface of the part 535 is covered with a nontransparent film 537 having a fine slit group 536, and further the holder 534 is designed to permit fine adjustment of vertical, lateral and rotating displacements from the outside of a evacuated vessel 540. In working, the work 533 is installed in a prescribed position with respect to the slit 536, and the position deviation of the reproduced image of a hologram and the desired working position of the work 533 is observed as the position deviation of the reproduced image of the reproduced light 514' of the reference pattern provided to a photomask for manufacturing the hologram and the slit 536. In accordance with the result thereof, the position is adjusted by the fine adjustment mechanism for displacement of the holder 534.
JP55158295A 1980-11-12 1980-11-12 Method and device for laser working Pending JPS5781986A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55158295A JPS5781986A (en) 1980-11-12 1980-11-12 Method and device for laser working

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55158295A JPS5781986A (en) 1980-11-12 1980-11-12 Method and device for laser working

Publications (1)

Publication Number Publication Date
JPS5781986A true JPS5781986A (en) 1982-05-22

Family

ID=15668481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55158295A Pending JPS5781986A (en) 1980-11-12 1980-11-12 Method and device for laser working

Country Status (1)

Country Link
JP (1) JPS5781986A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58224370A (en) * 1982-06-23 1983-12-26 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Apparatus for forming light source with desired shape and number of openings
EP0679469A1 (en) 1994-04-28 1995-11-02 Mitsubishi Denki Kabushiki Kaisha Laser transfer machining apparatus
US6008914A (en) * 1994-04-28 1999-12-28 Mitsubishi Denki Kabushiki Kaisha Laser transfer machining apparatus
US6618174B2 (en) * 1996-11-15 2003-09-09 Diffraction, Ltd In-line holographic mask for micromachining
WO2009063670A1 (en) * 2007-11-14 2009-05-22 Hamamatsu Photonics K.K. Laser machining device and laser machining method
JP2010058128A (en) * 2008-09-01 2010-03-18 Hamamatsu Photonics Kk Laser beam irradiation apparatus and laser beam irradiation method

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58224370A (en) * 1982-06-23 1983-12-26 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Apparatus for forming light source with desired shape and number of openings
EP0679469A1 (en) 1994-04-28 1995-11-02 Mitsubishi Denki Kabushiki Kaisha Laser transfer machining apparatus
US6008914A (en) * 1994-04-28 1999-12-28 Mitsubishi Denki Kabushiki Kaisha Laser transfer machining apparatus
US6618174B2 (en) * 1996-11-15 2003-09-09 Diffraction, Ltd In-line holographic mask for micromachining
WO2009063670A1 (en) * 2007-11-14 2009-05-22 Hamamatsu Photonics K.K. Laser machining device and laser machining method
US8324529B2 (en) 2007-11-14 2012-12-04 Hamamatsu Photonics K.K. Laser machining device with a converged laser beam and laser machining method
JP5216019B2 (en) * 2007-11-14 2013-06-19 浜松ホトニクス株式会社 Laser processing apparatus and laser processing method
US8575514B2 (en) 2007-11-14 2013-11-05 Hamamatsu Photonics K.K. Light irradiation device and light irradiation method irradiating converged light with an object
JP2010058128A (en) * 2008-09-01 2010-03-18 Hamamatsu Photonics Kk Laser beam irradiation apparatus and laser beam irradiation method

Similar Documents

Publication Publication Date Title
JPS5290269A (en) Forming method for fine resist patterns
JPS55150225A (en) Method of correcting white spot fault of photomask
JPS5781986A (en) Method and device for laser working
EP0207528A3 (en) Photomask and production process
JPS5619052A (en) Pattern correcting device
FR2343331A1 (en) PROCESS FOR MACHINING CONTROL BY IONIC BOMBARDING, OF A PIEZO-ELECTRIC PLATE
MX9205477A (en) LATHE TO GENERATE OPHTHALMIC PRODUCTS FROM ROUGH PARTS AND A METHOD FOR OPERATING THE LATHE
GB1527179A (en) Process of providing an apertured photoresist layer
BE858958A (en) PROCESS FOR CARRYING OUT THE ADJUSTMENT OF EXPOSURE MASKS IN RELATION TO A SUBSTRATE TABLET
JPS5657010A (en) Holographic grating
JPS5429180A (en) Method of producing retainer
JPS5318387A (en) Pattern inspection system
GB1280625A (en) Method of forming fringe pattern images
GB1356499A (en) Printing plate blank and processing method
JPS57132113A (en) Method and device for pattern formation using laser
JPS57107034A (en) Exposure equipment for contraction projection
JPS6487169A (en) Laser marking device
JPS5730837A (en) Manufacture of photomask for printing plate
JPS5432978A (en) Correcting method for pattern
JPS57192023A (en) Correcting device for photo-mask
JPS649617A (en) Exposure method
JPS5313880A (en) Fine patterning method
JPS5357581A (en) Method and apparatus for aligning cutting line of travelling shear
JPS5574502A (en) Laser beam cutoff device
JPS5243444A (en) Process for fabricating an acoustic hologram