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JPS5432978A - Correcting method for pattern - Google Patents

Correcting method for pattern

Info

Publication number
JPS5432978A
JPS5432978A JP9976377A JP9976377A JPS5432978A JP S5432978 A JPS5432978 A JP S5432978A JP 9976377 A JP9976377 A JP 9976377A JP 9976377 A JP9976377 A JP 9976377A JP S5432978 A JPS5432978 A JP S5432978A
Authority
JP
Japan
Prior art keywords
pattern
correcting method
correct
substrate
work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9976377A
Other languages
Japanese (ja)
Inventor
Takeshi Sakashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9976377A priority Critical patent/JPS5432978A/en
Publication of JPS5432978A publication Critical patent/JPS5432978A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To correct and to work a pattern accurately by forming a protective film on a substrate and the pattern surface before laser-beam irradiation.
COPYRIGHT: (C)1979,JPO&Japio
JP9976377A 1977-08-19 1977-08-19 Correcting method for pattern Pending JPS5432978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9976377A JPS5432978A (en) 1977-08-19 1977-08-19 Correcting method for pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9976377A JPS5432978A (en) 1977-08-19 1977-08-19 Correcting method for pattern

Publications (1)

Publication Number Publication Date
JPS5432978A true JPS5432978A (en) 1979-03-10

Family

ID=14256005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9976377A Pending JPS5432978A (en) 1977-08-19 1977-08-19 Correcting method for pattern

Country Status (1)

Country Link
JP (1) JPS5432978A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163029A (en) * 1984-09-03 1986-04-01 Sanyo Electric Co Ltd Method for correction of chromium mask
WO2004088416A1 (en) * 2003-03-28 2004-10-14 Fujitsu Limited Method for measuring/inspecting pattern size of photomask
US6856374B1 (en) 1999-11-19 2005-02-15 Fujitsu Display Technologies Corporation Display and method for repairing defects thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6163029A (en) * 1984-09-03 1986-04-01 Sanyo Electric Co Ltd Method for correction of chromium mask
US6856374B1 (en) 1999-11-19 2005-02-15 Fujitsu Display Technologies Corporation Display and method for repairing defects thereof
US7187423B2 (en) 1999-11-19 2007-03-06 Sharp Kabushiki Kaisha Display and method for repairing defects thereof
WO2004088416A1 (en) * 2003-03-28 2004-10-14 Fujitsu Limited Method for measuring/inspecting pattern size of photomask

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