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JPS5719647A - Inspecting device for sample of face plate - Google Patents

Inspecting device for sample of face plate

Info

Publication number
JPS5719647A
JPS5719647A JP9387580A JP9387580A JPS5719647A JP S5719647 A JPS5719647 A JP S5719647A JP 9387580 A JP9387580 A JP 9387580A JP 9387580 A JP9387580 A JP 9387580A JP S5719647 A JPS5719647 A JP S5719647A
Authority
JP
Japan
Prior art keywords
light
luminous flux
beltlike
reflects
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9387580A
Other languages
Japanese (ja)
Inventor
Nobuyuki Akiyama
Yoshimasa Oshima
Mitsuyoshi Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9387580A priority Critical patent/JPS5719647A/en
Publication of JPS5719647A publication Critical patent/JPS5719647A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To highly precisely detect a convex fault at a less energy consumption, by a method wherein a device is provided with a means which produces a cylindrical beltlike luminous flux from a dispersion light from a light source, and with a toroidal reflector which reflects the luminous flux at right angles and collects light into a point at the center. CONSTITUTION:A dispersion light 27A from a light 27 is produced into a cylindrical beltlike luminous flux 29 by means of a means 29. A toroidal reflector 28 reflects a beltlike luminous flux 29c approximately at right angles, and the luminous flux 29C is collected into a point 30 at the center. A plate sample 1 is supported in parallel to a light collecting path 30A at a support plate 32 at a light collecting point 20. A convex fault 3 on the surface of the face plate sample 1 reflects the light in a light collecting path 28A, produces a scattered light 3a, and an objective lens 7 and a TV camera 8 and other detecting means detect the scattered light. Through the installation of a parabolic concave mirror particularly at a light collecting system in an illuminating source, light from the light source can be collected over the full circumference, and thus, a light collecting effeciency can be improved and wide scattered light can be obtained even from a minute fault.
JP9387580A 1980-07-11 1980-07-11 Inspecting device for sample of face plate Pending JPS5719647A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9387580A JPS5719647A (en) 1980-07-11 1980-07-11 Inspecting device for sample of face plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9387580A JPS5719647A (en) 1980-07-11 1980-07-11 Inspecting device for sample of face plate

Publications (1)

Publication Number Publication Date
JPS5719647A true JPS5719647A (en) 1982-02-01

Family

ID=14094636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9387580A Pending JPS5719647A (en) 1980-07-11 1980-07-11 Inspecting device for sample of face plate

Country Status (1)

Country Link
JP (1) JPS5719647A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200908A (en) * 1983-04-28 1984-11-14 Hitachi Ltd Method and apparatus for lighting wafer
JPS6042001U (en) * 1983-08-26 1985-03-25 財団法人鉄道総合技術研究所 Test equipment for electric vehicle control equipment
JPS6199845A (en) * 1984-10-22 1986-05-17 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Optical defect detector
JPS62191741A (en) * 1986-02-18 1987-08-22 Kobe Steel Ltd Method for detecting surface flaw
JPS62261045A (en) * 1986-05-06 1987-11-13 Hitachi Electronics Eng Co Ltd Surface inspecting device
WO1993013406A1 (en) * 1988-11-18 1993-07-08 Taro Sato Apparatus for discriminating defects in an optical recording medium and method thereof
EP0650043A1 (en) * 1993-10-25 1995-04-26 Jasco Corporation Optical system for high-sensitivity reflectivity measurement equipment
WO1999066314A1 (en) * 1998-06-16 1999-12-23 Orbotech Ltd. Illuminator for inspecting substantially flat surfaces
JP2017530408A (en) * 2014-09-25 2017-10-12 ライカ マイクロシステムズ シーエムエス ゲゼルシャフト ミット ベシュレンクテル ハフツングＬｅｉｃａ Ｍｉｃｒｏｓｙｓｔｅｍｓ ＣＭＳ ＧｍｂＨ Mirror device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200908A (en) * 1983-04-28 1984-11-14 Hitachi Ltd Method and apparatus for lighting wafer
JPH0151121B2 (en) * 1983-04-28 1989-11-01 Hitachi Ltd
JPS6042001U (en) * 1983-08-26 1985-03-25 財団法人鉄道総合技術研究所 Test equipment for electric vehicle control equipment
JPS6199845A (en) * 1984-10-22 1986-05-17 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Optical defect detector
JPS62191741A (en) * 1986-02-18 1987-08-22 Kobe Steel Ltd Method for detecting surface flaw
JPS62261045A (en) * 1986-05-06 1987-11-13 Hitachi Electronics Eng Co Ltd Surface inspecting device
WO1993013406A1 (en) * 1988-11-18 1993-07-08 Taro Sato Apparatus for discriminating defects in an optical recording medium and method thereof
EP0650043A1 (en) * 1993-10-25 1995-04-26 Jasco Corporation Optical system for high-sensitivity reflectivity measurement equipment
US5483350A (en) * 1993-10-25 1996-01-09 Kazuhiro Kawasaki Optical system for infrared spectroscopy having an aspherical concave mirror
WO1999066314A1 (en) * 1998-06-16 1999-12-23 Orbotech Ltd. Illuminator for inspecting substantially flat surfaces
GB2357577A (en) * 1998-06-16 2001-06-27 Orbotech Ltd Illuminator for inspecting substantially flat surfaces
GB2357577B (en) * 1998-06-16 2003-08-20 Orbotech Ltd Illuminator for inspecting substantially flat surfaces
JP2017530408A (en) * 2014-09-25 2017-10-12 ライカ マイクロシステムズ シーエムエス ゲゼルシャフト ミット ベシュレンクテル ハフツングＬｅｉｃａ Ｍｉｃｒｏｓｙｓｔｅｍｓ ＣＭＳ ＧｍｂＨ Mirror device

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