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JPS56122905A - Optical detecting device for surface defect - Google Patents

Optical detecting device for surface defect

Info

Publication number
JPS56122905A
JPS56122905A JP2709780A JP2709780A JPS56122905A JP S56122905 A JPS56122905 A JP S56122905A JP 2709780 A JP2709780 A JP 2709780A JP 2709780 A JP2709780 A JP 2709780A JP S56122905 A JPS56122905 A JP S56122905A
Authority
JP
Japan
Prior art keywords
light
optical fibers
conical surface
minute region
scattered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2709780A
Other languages
Japanese (ja)
Inventor
Junichi Ichihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2709780A priority Critical patent/JPS56122905A/en
Publication of JPS56122905A publication Critical patent/JPS56122905A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To enhance the capability for detection of scattered lights, by providing plural optical fibers, which receive scattered reflection lights, on the conical surface with the light condensed point as the apex and by leading the light to the photodetector through optical fibers. CONSTITUTION:The light from light source 1 is condensed through condenser lens 2 and is irradiated to minute region B on object 3. If a defect exists in minute region B, the reflection light becomes a scattered light. Many optical fibers 5 are arranged on conical surface D with minute region B as the apex so that their one end faces are placed on the same circle on conical surface D in the direction of light condensed point B, and they are fixed by fixing material 6. The other end faces of optical fibers 5 are bundled and are led to photodetector 4 arranged apart.
JP2709780A 1980-03-04 1980-03-04 Optical detecting device for surface defect Pending JPS56122905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2709780A JPS56122905A (en) 1980-03-04 1980-03-04 Optical detecting device for surface defect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2709780A JPS56122905A (en) 1980-03-04 1980-03-04 Optical detecting device for surface defect

Publications (1)

Publication Number Publication Date
JPS56122905A true JPS56122905A (en) 1981-09-26

Family

ID=12211574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2709780A Pending JPS56122905A (en) 1980-03-04 1980-03-04 Optical detecting device for surface defect

Country Status (1)

Country Link
JP (1) JPS56122905A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622114A (en) * 1985-06-28 1987-01-08 Ando Electric Co Ltd Surface roughness meter using reflected light
JPS622113A (en) * 1985-06-28 1987-01-08 Ando Electric Co Ltd Surface roughness meter using reflected light
US4681442A (en) * 1984-05-14 1987-07-21 International Business Machines Corporation Method for surface testing
US5450291A (en) * 1990-01-29 1995-09-12 Ezel Inc. Lighting system for camera

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4681442A (en) * 1984-05-14 1987-07-21 International Business Machines Corporation Method for surface testing
JPS622114A (en) * 1985-06-28 1987-01-08 Ando Electric Co Ltd Surface roughness meter using reflected light
JPS622113A (en) * 1985-06-28 1987-01-08 Ando Electric Co Ltd Surface roughness meter using reflected light
US5450291A (en) * 1990-01-29 1995-09-12 Ezel Inc. Lighting system for camera

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