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JPS57179704A - Method and device for measuring length - Google Patents

Method and device for measuring length

Info

Publication number
JPS57179704A
JPS57179704A JP6622581A JP6622581A JPS57179704A JP S57179704 A JPS57179704 A JP S57179704A JP 6622581 A JP6622581 A JP 6622581A JP 6622581 A JP6622581 A JP 6622581A JP S57179704 A JPS57179704 A JP S57179704A
Authority
JP
Japan
Prior art keywords
measured
waist
speckle patterns
omega
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6622581A
Other languages
Japanese (ja)
Other versions
JPS6334963B2 (en
Inventor
Yasukazu Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP6622581A priority Critical patent/JPS57179704A/en
Publication of JPS57179704A publication Critical patent/JPS57179704A/en
Publication of JPS6334963B2 publication Critical patent/JPS6334963B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

PURPOSE:To make the stable and highly accurate measurement that does not depend upon the surface condition of a surface to be measured possible by controlling the waist position of an irradiation beam in such a way that the surface to be measured is located therein by using the speckle patterns in reflected light. CONSTITUTION:When the coherent light from a semiconductor laser is made into a convergent Gaussian beam with a lens 13 and is irradiated to a surface A to be measured and when the reflected beams R, L thereof are imaged on a one- dimensional image sensor 19, speckle patterns S1-S3 are produced. If the position of a beam waist omega is sdisplaced to omega' within the plane perpendicular to the optical axis by an acoustooptic deflecting element, the moving directions of the speckle patterns are reversed by the position relation between the waist and the suface to be measured. The position of the optical system is so controlled that the patterns do not move, and if the lens position is defined as a1, this is the focal position, and the distance from a reference position P to the surface to be measured is obtained.
JP6622581A 1981-04-30 1981-04-30 Method and device for measuring length Granted JPS57179704A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6622581A JPS57179704A (en) 1981-04-30 1981-04-30 Method and device for measuring length

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6622581A JPS57179704A (en) 1981-04-30 1981-04-30 Method and device for measuring length

Publications (2)

Publication Number Publication Date
JPS57179704A true JPS57179704A (en) 1982-11-05
JPS6334963B2 JPS6334963B2 (en) 1988-07-13

Family

ID=13309674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6622581A Granted JPS57179704A (en) 1981-04-30 1981-04-30 Method and device for measuring length

Country Status (1)

Country Link
JP (1) JPS57179704A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63295911A (en) * 1987-05-21 1988-12-02 Anritsu Corp Measuring apparatus for displacement
JPH01287725A (en) * 1988-05-16 1989-11-20 Fuji Xerox Co Ltd Position designation device
EP0352952A2 (en) * 1988-07-25 1990-01-31 KEYMED (MEDICAL & INDUSTRIAL EQUIPMENT) LIMITED Optical apparatus
JPH05126568A (en) * 1991-10-30 1993-05-21 Mitsutoyo Corp Optical displacement gauge
JP2006511895A (en) * 2002-12-18 2006-04-06 シンボル テクノロジーズ インコーポレイテッド Image scanning apparatus having a system for measuring the distance to a target
CN105301865A (en) * 2014-07-28 2016-02-03 奥宝科技股份有限公司 Auto-focus system

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63295911A (en) * 1987-05-21 1988-12-02 Anritsu Corp Measuring apparatus for displacement
JPH01287725A (en) * 1988-05-16 1989-11-20 Fuji Xerox Co Ltd Position designation device
EP0352952A2 (en) * 1988-07-25 1990-01-31 KEYMED (MEDICAL & INDUSTRIAL EQUIPMENT) LIMITED Optical apparatus
JPH05126568A (en) * 1991-10-30 1993-05-21 Mitsutoyo Corp Optical displacement gauge
JP2006511895A (en) * 2002-12-18 2006-04-06 シンボル テクノロジーズ インコーポレイテッド Image scanning apparatus having a system for measuring the distance to a target
CN105301865A (en) * 2014-07-28 2016-02-03 奥宝科技股份有限公司 Auto-focus system
JP2016031535A (en) * 2014-07-28 2016-03-07 オーボテック リミテッド Auto-focus system, distance measuring system, auto-focus method, and auto-focus system calibration method

Also Published As

Publication number Publication date
JPS6334963B2 (en) 1988-07-13

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