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JPS5698601A - Cubic form detection device - Google Patents

Cubic form detection device

Info

Publication number
JPS5698601A
JPS5698601A JP89980A JP89980A JPS5698601A JP S5698601 A JPS5698601 A JP S5698601A JP 89980 A JP89980 A JP 89980A JP 89980 A JP89980 A JP 89980A JP S5698601 A JPS5698601 A JP S5698601A
Authority
JP
Japan
Prior art keywords
slit beam
slit
measured
image projection
projection surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP89980A
Other languages
Japanese (ja)
Other versions
JPS64641B2 (en
Inventor
Yoshisada Oshida
Hiroshi Makihira
Yasuo Nakagawa
Nobuyuki Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP89980A priority Critical patent/JPS5698601A/en
Publication of JPS5698601A publication Critical patent/JPS5698601A/en
Publication of JPS64641B2 publication Critical patent/JPS64641B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To arrange so that a cubic form may be detected with high precision over an extensive range by irradiating a slit beam or slit beams of slit-shaped structure on an object to be measured from a single direction or plural directions.
CONSTITUTION: A relative position change of an image projection optical system and an effective image projection surface when an irradiation position on an object to be measured is changed due to a deflection of the slit beam, is constituted as illustrated. That is, an intensity distribution 1 on a surface vertical to the proceeding direction z of the slit beam 1 is as shown in Fig. along an axial direction. This intensity is constant where the y' axial direction is concerned. Although the slit beam 1 is irradiated on an object 2 to be measured, the position of the slit beam on an object to be measured is on a plane, so that it is focused on an image projection surface 4 by means of an image projecting lens 3. Next, the slit beam is deflected, and 1' becomes the next slit beam and at the same time, is focused as a clear image when the image projection surface shifts to a position shown by 4'.
COPYRIGHT: (C)1981,JPO&Japio
JP89980A 1980-01-10 1980-01-10 Cubic form detection device Granted JPS5698601A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP89980A JPS5698601A (en) 1980-01-10 1980-01-10 Cubic form detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP89980A JPS5698601A (en) 1980-01-10 1980-01-10 Cubic form detection device

Publications (2)

Publication Number Publication Date
JPS5698601A true JPS5698601A (en) 1981-08-08
JPS64641B2 JPS64641B2 (en) 1989-01-09

Family

ID=11486524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP89980A Granted JPS5698601A (en) 1980-01-10 1980-01-10 Cubic form detection device

Country Status (1)

Country Link
JP (1) JPS5698601A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009115612A (en) * 2007-11-06 2009-05-28 Panasonic Electric Works Co Ltd Three-dimensional shape measuring device and three-dimensional shape measurement method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009115612A (en) * 2007-11-06 2009-05-28 Panasonic Electric Works Co Ltd Three-dimensional shape measuring device and three-dimensional shape measurement method

Also Published As

Publication number Publication date
JPS64641B2 (en) 1989-01-09

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