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JPS57124238A - Humidity sensor - Google Patents

Humidity sensor

Info

Publication number
JPS57124238A
JPS57124238A JP933081A JP933081A JPS57124238A JP S57124238 A JPS57124238 A JP S57124238A JP 933081 A JP933081 A JP 933081A JP 933081 A JP933081 A JP 933081A JP S57124238 A JPS57124238 A JP S57124238A
Authority
JP
Japan
Prior art keywords
resonance frequencies
change
humidity sensor
humidity
stem
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP933081A
Other languages
Japanese (ja)
Inventor
Takeshi Nakamura
Koji Nishiyama
Tasuku Masuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP933081A priority Critical patent/JPS57124238A/en
Publication of JPS57124238A publication Critical patent/JPS57124238A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain a humidity sensor having characteristics wherein resonance frequencies change roughly linearly with a change in humidity by forming piezoelectric films and electrodes on an oscillator body consisting of an invar alloy. CONSTITUTION:Piezoelectric films 2 are formed on the parts where oscillations are produced of an oscillator body 1 of tuning fork type consisting of an invar alloy and electrodes 3 are formed by a dry plating method on the films 2. This body 1 is grasped and fixed to support bars 5, 6 of a stem 4, and the bar 5 is used as a lead terminal. Other terminal 7 is fixed to the stem 4. A cover is put on this humidity sensor, and a gauge is mounted to the outside surface of the cover. With one end thereof held immersed in water, resonance frequencies are measured and relative humidity is determined. Thereby, the rate of change in the resonance frequencies with respect to relative humidity is made roughly linear, and the need for intricate correction circuits is eliminated.
JP933081A 1981-01-23 1981-01-23 Humidity sensor Pending JPS57124238A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP933081A JPS57124238A (en) 1981-01-23 1981-01-23 Humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP933081A JPS57124238A (en) 1981-01-23 1981-01-23 Humidity sensor

Publications (1)

Publication Number Publication Date
JPS57124238A true JPS57124238A (en) 1982-08-03

Family

ID=11717454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP933081A Pending JPS57124238A (en) 1981-01-23 1981-01-23 Humidity sensor

Country Status (1)

Country Link
JP (1) JPS57124238A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2532047A1 (en) * 1982-08-19 1984-02-24 Asulab Sa MEASURING SENSOR PROVIDED WITH A PIEZOELECTRIC RESONATOR COMPENSATED IN TEMPERATURE
US8899761B2 (en) 2011-03-23 2014-12-02 Gentex Corporation Lens cleaning apparatus
US10012530B2 (en) 2013-03-14 2018-07-03 Gentex Corporation Light sensing device
EP4067893A1 (en) * 2021-03-31 2022-10-05 MEAS France A fluid sensor for sensing properties of a fluid comprising a tuning fork mechanical resonator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135180B2 (en) * 1972-04-14 1976-09-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135180B2 (en) * 1972-04-14 1976-09-30

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2532047A1 (en) * 1982-08-19 1984-02-24 Asulab Sa MEASURING SENSOR PROVIDED WITH A PIEZOELECTRIC RESONATOR COMPENSATED IN TEMPERATURE
US8899761B2 (en) 2011-03-23 2014-12-02 Gentex Corporation Lens cleaning apparatus
US10012530B2 (en) 2013-03-14 2018-07-03 Gentex Corporation Light sensing device
EP4067893A1 (en) * 2021-03-31 2022-10-05 MEAS France A fluid sensor for sensing properties of a fluid comprising a tuning fork mechanical resonator
US11921073B2 (en) 2021-03-31 2024-03-05 MEAS France Fluid sensor for sensing properties of a fluid comprising a tuning fork mechanical resonator

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