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JPS57104831A - Temperature sensor - Google Patents

Temperature sensor

Info

Publication number
JPS57104831A
JPS57104831A JP18238080A JP18238080A JPS57104831A JP S57104831 A JPS57104831 A JP S57104831A JP 18238080 A JP18238080 A JP 18238080A JP 18238080 A JP18238080 A JP 18238080A JP S57104831 A JPS57104831 A JP S57104831A
Authority
JP
Japan
Prior art keywords
piezo
electric film
inverter
alloy
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18238080A
Other languages
Japanese (ja)
Other versions
JPS6112214B2 (en
Inventor
Takeshi Nakamura
Koji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP18238080A priority Critical patent/JPS57104831A/en
Publication of JPS57104831A publication Critical patent/JPS57104831A/en
Publication of JPS6112214B2 publication Critical patent/JPS6112214B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To enable manufacturing of a small-sized temperature sensor which has a rectilinear temperature dependency of a resonace frequency, a low time constant, and a less consumption power, by a method wherein a piezo-electric film and an electrode are mounted on an optional vibrating surface of a vibrator body made of an inverter alloy. CONSTITUTION:A piezo-electric film is formed on an optional vibrating surface of a vibratro body made of an inverter alloy, an electrode is further formed thereon. The body is formed in a laminar manner, a tuning fork, or a tuning bar, and zinc oxide, zinc sulfide, nitriding aliminum or other types are formed as the piezo-electric film by a vacuum evaporating, a spattering, an ion plating, or a gaseous phase evaporating method. For example, a tuning fork-shaped vibrator body 1, made of an inverter alloy, is held between the nip formed by support rods 5 and 6, and the one support rod is electrically connected to said body to form a lead terminal. A piezo-electric film 2 is further formed on the vibrating surface of said body, and an electrode 3, mounted thereon, is connected to the lead terminal 7 via a lead wire 8 to form a temperature sensor.
JP18238080A 1980-12-22 1980-12-22 Temperature sensor Granted JPS57104831A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18238080A JPS57104831A (en) 1980-12-22 1980-12-22 Temperature sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18238080A JPS57104831A (en) 1980-12-22 1980-12-22 Temperature sensor

Publications (2)

Publication Number Publication Date
JPS57104831A true JPS57104831A (en) 1982-06-30
JPS6112214B2 JPS6112214B2 (en) 1986-04-07

Family

ID=16117293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18238080A Granted JPS57104831A (en) 1980-12-22 1980-12-22 Temperature sensor

Country Status (1)

Country Link
JP (1) JPS57104831A (en)

Also Published As

Publication number Publication date
JPS6112214B2 (en) 1986-04-07

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