JPS5694517A - Manufacture for thin film head - Google Patents
Manufacture for thin film headInfo
- Publication number
- JPS5694517A JPS5694517A JP17201779A JP17201779A JPS5694517A JP S5694517 A JPS5694517 A JP S5694517A JP 17201779 A JP17201779 A JP 17201779A JP 17201779 A JP17201779 A JP 17201779A JP S5694517 A JPS5694517 A JP S5694517A
- Authority
- JP
- Japan
- Prior art keywords
- film
- etching
- coil
- gap
- gap length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Heads (AREA)
Abstract
PURPOSE: To form desired gap length suitable for high density recording easily with high accuracy, by increasing the electromagnetic conversion efficiency through multilayer construction for coil use conductive film.
CONSTITUTION: After a lower magnetic substance 2 is formed to a glass base 1 and an isolation film 3 is formed, a conductive film 8 for coil is formed on the film 3. In forming a conductive film 8 for coil, a conductor film 21 for etching end marker made of aluminum is formed on the insulation film 3 other than said conductor film 8 at the same time. While the insulating film corresponding to the desired gap length is formed on the gap forming section on the conductor film 21, a shutter 22 is fitted to this part to avoide the formation of insulation film for further lamination. The formation of gap is made by etching. When etching progresses, the conductor film 21 is foamed and changed visually, then if the etching is stopped in this case, the gap with desired gap length can be formed.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17201779A JPS5694517A (en) | 1979-12-27 | 1979-12-27 | Manufacture for thin film head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17201779A JPS5694517A (en) | 1979-12-27 | 1979-12-27 | Manufacture for thin film head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5694517A true JPS5694517A (en) | 1981-07-31 |
Family
ID=15933973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17201779A Pending JPS5694517A (en) | 1979-12-27 | 1979-12-27 | Manufacture for thin film head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5694517A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62219216A (en) * | 1986-03-19 | 1987-09-26 | Hitachi Ltd | Thin film magnetic head and its production |
JPH01118209A (en) * | 1987-10-30 | 1989-05-10 | Matsushita Electric Ind Co Ltd | Production of thin film magnetic head |
-
1979
- 1979-12-27 JP JP17201779A patent/JPS5694517A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62219216A (en) * | 1986-03-19 | 1987-09-26 | Hitachi Ltd | Thin film magnetic head and its production |
JPH01118209A (en) * | 1987-10-30 | 1989-05-10 | Matsushita Electric Ind Co Ltd | Production of thin film magnetic head |
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