[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPS5618708A - Optoelectronic inspector - Google Patents

Optoelectronic inspector

Info

Publication number
JPS5618708A
JPS5618708A JP10044680A JP10044680A JPS5618708A JP S5618708 A JPS5618708 A JP S5618708A JP 10044680 A JP10044680 A JP 10044680A JP 10044680 A JP10044680 A JP 10044680A JP S5618708 A JPS5618708 A JP S5618708A
Authority
JP
Japan
Prior art keywords
test
test specimen
error
image sensor
undertaken
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10044680A
Other languages
English (en)
Inventor
Deemensu Giyuntaa
Hendoritsukusu Ururitsuhi
Shiyunaidaa Rihiaruto
Uiruto Kaaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS5618708A publication Critical patent/JPS5618708A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30141—Printed circuit board [PCB]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Quality & Reliability (AREA)
  • Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Toxicology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Image Input (AREA)
  • Closed-Circuit Television Systems (AREA)
JP10044680A 1979-07-23 1980-07-22 Optoelectronic inspector Pending JPS5618708A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792929846 DE2929846A1 (de) 1979-07-23 1979-07-23 Opto-elektronisches pruefsystem zur automatischen beschaffenheitspruefung von leiterplatten, deren zwischenprodukte und druckwerkzeuge

Publications (1)

Publication Number Publication Date
JPS5618708A true JPS5618708A (en) 1981-02-21

Family

ID=6076547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10044680A Pending JPS5618708A (en) 1979-07-23 1980-07-22 Optoelectronic inspector

Country Status (5)

Country Link
US (1) US4305097A (ja)
EP (1) EP0023574B1 (ja)
JP (1) JPS5618708A (ja)
AT (1) ATE9848T1 (ja)
DE (1) DE2929846A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPS5833154A (ja) * 1981-08-24 1983-02-26 Hitachi Ltd 検査装置
JPH02503775A (ja) * 1988-03-15 1990-11-08 オセ　プリンテイング　システムズ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 発光ダイオード行を作るための組立方法

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016673B2 (ja) * 1978-12-25 1985-04-26 川崎重工業株式会社 サ−ボ系における被検体認識装置
SE449531B (sv) * 1980-12-11 1987-05-04 Gerhard Westerberg Forfarande och anordning for kontroll av mikromasker
EP0054596B1 (fr) * 1980-12-18 1985-05-29 International Business Machines Corporation Procédé d'inspection et de tri automatique d'objets présentant des configurations avec des tolérances dimensionnelles et des critères de rejet variables selon l'emplacement, équipement et circuits de mise en oeuvre
FR2500925A1 (fr) * 1981-03-02 1982-09-03 Atelier Outillage Orleanais Sa Procede pour controler des percages pratiques dans une piece, notamment une carte a circuits imprimes, et appareil pour la mise en oeuvre de ce procede
DE3204086A1 (de) * 1982-02-06 1983-08-11 Ibm Deutschland Gmbh, 7000 Stuttgart Vorrichtung zur automatischen optischen beschaffenheitspruefung
US4513438A (en) * 1982-04-15 1985-04-23 Coulter Electronics, Inc. Automated microscopy system and method for locating and re-locating objects in an image
DE3267548D1 (en) * 1982-05-28 1986-01-02 Ibm Deutschland Process and device for an automatic optical inspection
JPS5958586A (ja) * 1982-09-28 1984-04-04 Toshiba Mach Co Ltd マスクの検査方法および装置
EP0108439A3 (en) * 1982-11-02 1986-04-02 Administratie- en Automatiseringscentrum Vulcaan B.V. Weighing device
JPS59111589A (ja) * 1982-12-17 1984-06-27 ロ−レルバンクマシン株式会社 紙葉類判別装置
US4589140A (en) * 1983-03-21 1986-05-13 Beltronics, Inc. Method of and apparatus for real-time high-speed inspection of objects for identifying or recognizing known and unknown portions thereof, including defects and the like
US4692690A (en) * 1983-12-26 1987-09-08 Hitachi, Ltd. Pattern detecting apparatus
DE3347645C1 (de) * 1983-12-30 1985-10-10 Dr.-Ing. Ludwig Pietzsch Gmbh & Co, 7505 Ettlingen Verfahren und Einrichtung zum opto-elektronischen Pruefen eines Flaechenmusters an einem Objekt
DE3427981A1 (de) * 1984-07-28 1986-02-06 Telefunken electronic GmbH, 7100 Heilbronn Verfahren zur fehlererkennung an definierten strukturen
CA1273224A (en) * 1985-03-14 1990-08-28 Timothy R. Pryor Panel surface flaw inspection
DE4003983C1 (en) * 1990-02-09 1991-08-29 Abos Automation, Bildverarbeitung, Optische Systeme Gmbh, 8057 Eching, De Automated monitoring of space=shape data for mfg. semiconductors - compares image signals for defined illumination angle range with master signals, to determine defects
DE4027902C2 (de) * 1990-09-03 1994-07-14 Siemens Ag Verfahren zur visuellen Prüfung bestückter Flachbaugruppen und Anordnung zur Durchführung des Verfahrens
IT1272853B (it) * 1994-11-30 1997-06-30 Circuit Line Spa Metodo e apparecchiatura per il carico e lo scarico automatico di circuiti stampati su macchine per l'esecuzione del test elettrico
DE19525081B4 (de) * 1995-07-10 2006-06-29 Display Products Group, Inc., Hayward Verfahren und Vorrichtung zum Testen der Funktion von Mikrostrukturelementen
DE19709939A1 (de) * 1997-03-11 1998-09-17 Atg Test Systems Gmbh Verfahren und Vorrichtung zum Prüfen von Leiterplatten
US6321338B1 (en) * 1998-11-09 2001-11-20 Sri International Network surveillance
TWI323503B (en) * 2005-12-12 2010-04-11 Optopac Co Ltd Apparatus, unit and method for testing image sensor packages
JP5534715B2 (ja) * 2009-05-27 2014-07-02 株式会社ジャパンディスプレイ 電子回路パターンの欠陥修正方法およびその装置
CN102142086A (zh) * 2010-02-03 2011-08-03 鸿富锦精密工业（深圳）有限公司 电路板侦测系统及其图像获取装置
US8902765B1 (en) 2010-02-25 2014-12-02 Integrated Device Technology, Inc. Method and apparatus for congestion and fault management with time-to-live
CN104035009B (zh) * 2014-06-14 2016-04-13 国网四川省电力公司双流县供电分公司 一种方便操作人员调整位置的绝缘子故障侦测装置
CN107543828B (zh) * 2017-08-25 2020-09-11 广东工业大学 一种工件表面缺陷检测方法及系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4065212A (en) * 1975-06-30 1977-12-27 International Business Machines Corporation Inspection tool
DE2643809B2 (de) * 1976-09-29 1980-10-09 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Einjustieren eines Körpers
DE2700252C2 (de) * 1977-01-05 1985-03-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Prüfen definierter Strukturen
GB1564181A (en) * 1977-02-11 1980-04-02 Paabo M Device for examination of distances in a picture
US4208675A (en) * 1978-03-20 1980-06-17 Agence Nationale De Valorization De La Recherche (Anvar) Method and apparatus for positioning an object
CH643959A5 (de) * 1978-04-14 1984-06-29 Siemens Ag Verfahren und vorrichtung zur automatischen lageerkennung von halbleiterchips.

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPS5833154A (ja) * 1981-08-24 1983-02-26 Hitachi Ltd 検査装置
JPH0325738B2 (ja) * 1981-08-24 1991-04-08 Hitachi Seisakusho Kk
JPH02503775A (ja) * 1988-03-15 1990-11-08 オセ　プリンテイング　システムズ　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 発光ダイオード行を作るための組立方法

Also Published As

Publication number Publication date
US4305097A (en) 1981-12-08
EP0023574A1 (de) 1981-02-11
EP0023574B1 (de) 1984-10-10
DE2929846A1 (de) 1981-03-12
ATE9848T1 (de) 1984-10-15

Similar Documents

Publication Publication Date Title
JPS5618708A (en) Optoelectronic inspector
US4926489A (en) Reticle inspection system
KR0141444B1 (ko) 전자부품의 외관검사장치 및 외관검사방법
US4347001A (en) Automatic photomask inspection system and apparatus
US4269515A (en) Electro-optical system for inspecting printed circuit boards
IE43287B1 (en) Process and apparatus for the automatic inspection of patterns on printed circuit boards
EP0116716A3 (en) Process and apparatus for separating media
DK153182A (da) Fremgangsmaade og apparat til farvemetrisk analyse af en tryktfarvemaalestribe
JPS61501057A (ja) 位置決めシステムを校正する方法および装置
US4553844A (en) Configuration detecting method and system
JPH0534124A (ja) 異物検査装置
US2927216A (en) Photometric character recognition device
US5164666A (en) Method and apparatus for analyzing errors in integrated circuits
JPH0680420B2 (ja) Ｘ線ｃｔ装置
US5554858A (en) Segmented position sensing detector for reducing non-uniformly distributed stray light from a spot image
US4380395A (en) Reduction projection aligner system
EP0019941B1 (en) Reduction projection aligner system
US3881102A (en) Electro-optical sensing apparatus
CA1075795A (en) Automatic machine tool
GB1571836A (en) Electronic image analyzer method and apparatus
AU606679B2 (en) Optical inspection system for cylindrical objects
US4808001A (en) Optical inspection system for cylindrical objects
SE7701424L (sv) Anordning for kontroll av flaskor
RU1779290C (ru) Устройство ультразвукового контрол
JPH01500056A (ja) 透明材料製コンテナ好ましくは瓶を、真直度と、おそらくは高さ及び／又は変形とについて検査するための装置