JPS56161674A - Metal oxide semiconductor device - Google Patents
Metal oxide semiconductor deviceInfo
- Publication number
- JPS56161674A JPS56161674A JP6474980A JP6474980A JPS56161674A JP S56161674 A JPS56161674 A JP S56161674A JP 6474980 A JP6474980 A JP 6474980A JP 6474980 A JP6474980 A JP 6474980A JP S56161674 A JPS56161674 A JP S56161674A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrode wire
- wiring
- semiconductor device
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 229910044991 metal oxide Inorganic materials 0.000 title abstract 2
- 150000004706 metal oxides Chemical class 0.000 title abstract 2
- 239000010410 layer Substances 0.000 abstract 7
- 150000001875 compounds Chemical class 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000011229 interlayer Substances 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- 229920005591 polysilicon Polymers 0.000 abstract 2
- 238000007743 anodising Methods 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6474980A JPS56161674A (en) | 1980-05-16 | 1980-05-16 | Metal oxide semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6474980A JPS56161674A (en) | 1980-05-16 | 1980-05-16 | Metal oxide semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56161674A true JPS56161674A (en) | 1981-12-12 |
Family
ID=13267114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6474980A Pending JPS56161674A (en) | 1980-05-16 | 1980-05-16 | Metal oxide semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56161674A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61212040A (ja) * | 1985-03-18 | 1986-09-20 | Hitachi Ltd | 半導体装置の製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5236477A (en) * | 1975-09-17 | 1977-03-19 | Philips Nv | Method of producing semiconductor device |
JPS547864A (en) * | 1977-06-21 | 1979-01-20 | Toshiba Corp | Manufacture for semiconductor device |
JPS54133089A (en) * | 1978-04-06 | 1979-10-16 | Nec Corp | Thin film capacitor and its manufacture |
-
1980
- 1980-05-16 JP JP6474980A patent/JPS56161674A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5236477A (en) * | 1975-09-17 | 1977-03-19 | Philips Nv | Method of producing semiconductor device |
JPS547864A (en) * | 1977-06-21 | 1979-01-20 | Toshiba Corp | Manufacture for semiconductor device |
JPS54133089A (en) * | 1978-04-06 | 1979-10-16 | Nec Corp | Thin film capacitor and its manufacture |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61212040A (ja) * | 1985-03-18 | 1986-09-20 | Hitachi Ltd | 半導体装置の製造方法 |
JPH0789549B2 (ja) * | 1985-03-18 | 1995-09-27 | 株式会社日立製作所 | 半導体装置の製造方法 |
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