JPS557661B2 - - Google Patents
Info
- Publication number
- JPS557661B2 JPS557661B2 JP9232973A JP9232973A JPS557661B2 JP S557661 B2 JPS557661 B2 JP S557661B2 JP 9232973 A JP9232973 A JP 9232973A JP 9232973 A JP9232973 A JP 9232973A JP S557661 B2 JPS557661 B2 JP S557661B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00281375A US3809899A (en) | 1972-08-17 | 1972-08-17 | Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49132975A JPS49132975A (ru) | 1974-12-20 |
| JPS557661B2 true JPS557661B2 (ru) | 1980-02-27 |
Family
ID=23077025
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9232973A Expired JPS557661B2 (ru) | 1972-08-17 | 1973-08-17 | |
| JP13038078A Pending JPS54161263A (en) | 1972-08-17 | 1978-10-23 | Electron beam generator |
| JP1980138035U Pending JPS5661960U (ru) | 1972-08-17 | 1980-09-26 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13038078A Pending JPS54161263A (en) | 1972-08-17 | 1978-10-23 | Electron beam generator |
| JP1980138035U Pending JPS5661960U (ru) | 1972-08-17 | 1980-09-26 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3809899A (ru) |
| JP (3) | JPS557661B2 (ru) |
| CA (1) | CA1031080A (ru) |
| DE (2) | DE2341377A1 (ru) |
| FR (2) | FR2199613B1 (ru) |
| GB (2) | GB1433944A (ru) |
| NL (2) | NL7311344A (ru) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2514266C2 (de) * | 1975-03-27 | 1977-04-28 | Siemens Ag | Korpuskularstrahloptisches geraet mit zwei in strahlrichtung aufeinanderfolgenden teilraeumen unterschiedlicher druecke |
| US4175234A (en) * | 1977-08-05 | 1979-11-20 | University Of Virginia | Apparatus for producing ions of thermally labile or nonvolatile solids |
| US4139773A (en) * | 1977-11-04 | 1979-02-13 | Oregon Graduate Center | Method and apparatus for producing bright high resolution ion beams |
| JPS5648028A (en) * | 1979-09-26 | 1981-05-01 | Toshiba Corp | Electron gun |
| US4379250A (en) * | 1979-10-19 | 1983-04-05 | Hitachi, Ltd. | Field emission cathode and method of fabricating the same |
| US4468586A (en) * | 1981-05-26 | 1984-08-28 | International Business Machines Corporation | Shaped electron emission from single crystal lanthanum hexaboride with intensity distribution |
| EP0189498B1 (en) * | 1985-01-29 | 1989-05-03 | International Business Machines Corporation | Field-emission scanning auger electron microscope |
| EP0462554B1 (en) * | 1990-06-20 | 2000-10-11 | Hitachi, Ltd. | Charged particle beam apparatus |
| DE69125229T2 (de) * | 1990-08-10 | 1997-08-28 | Koninkl Philips Electronics Nv | Ladungspartikelstrahlanordnung |
| JP3148353B2 (ja) * | 1991-05-30 | 2001-03-19 | ケーエルエー・インストルメンツ・コーポレーション | 電子ビーム検査方法とそのシステム |
| US5616926A (en) * | 1994-08-03 | 1997-04-01 | Hitachi, Ltd. | Schottky emission cathode and a method of stabilizing the same |
| JP2951609B2 (ja) * | 1997-01-20 | 1999-09-20 | 株式会社日立製作所 | 電子ビーム検査装置 |
| JP2951610B2 (ja) * | 1997-01-20 | 1999-09-20 | 株式会社日立製作所 | 欠陥検査方法 |
| JP2969091B2 (ja) * | 1997-01-20 | 1999-11-02 | 株式会社日立製作所 | 電子ビーム検査装置 |
| EP2365511B1 (en) * | 2010-03-10 | 2013-05-08 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Feedback loop for emitter flash cleaning |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE438468A (ru) * | 1939-05-08 | |||
| NL112758C (ru) * | 1942-10-28 | |||
| NL102095C (ru) * | 1955-07-01 | |||
| NL289910A (ru) * | 1962-03-08 | |||
| US3174026A (en) * | 1962-06-20 | 1965-03-16 | Budd Co | Method and means of circumventing cathode maintenance in electron beam devices |
| US3374386A (en) * | 1964-11-02 | 1968-03-19 | Field Emission Corp | Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder |
| US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
| JPS5852244B2 (ja) * | 1977-05-04 | 1983-11-21 | 松下電器産業株式会社 | モ−タの回転数調整装置 |
-
1972
- 1972-08-17 US US00281375A patent/US3809899A/en not_active Expired - Lifetime
-
1973
- 1973-08-13 GB GB3818173A patent/GB1433944A/en not_active Expired
- 1973-08-13 GB GB3159874A patent/GB1433945A/en not_active Expired
- 1973-08-16 FR FR7330655A patent/FR2199613B1/fr not_active Expired
- 1973-08-16 DE DE19732341377 patent/DE2341377A1/de not_active Ceased
- 1973-08-16 CA CA178,925A patent/CA1031080A/en not_active Expired
- 1973-08-16 DE DE2366144A patent/DE2366144C2/de not_active Expired
- 1973-08-17 NL NL7311344A patent/NL7311344A/xx unknown
- 1973-08-17 JP JP9232973A patent/JPS557661B2/ja not_active Expired
-
1974
- 1974-04-04 FR FR7412881A patent/FR2214962B1/fr not_active Expired
-
1978
- 1978-10-23 JP JP13038078A patent/JPS54161263A/ja active Pending
-
1979
- 1979-11-21 NL NL7908479A patent/NL7908479A/nl not_active Application Discontinuation
-
1980
- 1980-09-26 JP JP1980138035U patent/JPS5661960U/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49132975A (ru) | 1974-12-20 |
| NL7311344A (ru) | 1974-02-19 |
| DE2341377A1 (de) | 1974-03-07 |
| DE2366144C2 (de) | 1982-12-30 |
| FR2214962B1 (ru) | 1978-07-07 |
| GB1433945A (en) | 1976-04-28 |
| FR2199613A1 (ru) | 1974-04-12 |
| US3809899A (en) | 1974-05-07 |
| GB1433944A (en) | 1976-04-28 |
| JPS54161263A (en) | 1979-12-20 |
| NL7908479A (nl) | 1980-03-31 |
| FR2199613B1 (ru) | 1977-02-25 |
| JPS5661960U (ru) | 1981-05-26 |
| CA1031080A (en) | 1978-05-09 |
| FR2214962A1 (ru) | 1974-08-19 |