JPS5518159A - Frequency control method for surface wave device - Google Patents
Frequency control method for surface wave deviceInfo
- Publication number
- JPS5518159A JPS5518159A JP9122178A JP9122178A JPS5518159A JP S5518159 A JPS5518159 A JP S5518159A JP 9122178 A JP9122178 A JP 9122178A JP 9122178 A JP9122178 A JP 9122178A JP S5518159 A JPS5518159 A JP S5518159A
- Authority
- JP
- Japan
- Prior art keywords
- comb
- sputtering
- surface wave
- wave device
- control method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
- H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE:To control the central frequency of the pass band by evaporating through sputtering the insulating film on the opposing electrodes of the comb-line electrodes provided on the substrate at the final stage of the manufacturing process. CONSTITUTION:Comb-line electrodes 2 and 2' are provided on substrate 1; piezoelectric substance 3 of 2.5mu thick is evaporated by sputtering on the comb-line electrodes; and furthermore opposing electrodes 4 and 4' are provided on substance 3. Thus a surface wave device is formed. In case the device thus manufactured in out of the standard, the insulator is evaporated by sputtering about 1000Angstrom on the device. As a result, the sound speed can be changed within the device, and the central frequency of the device is controlled to obtain the standardized products.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9122178A JPS5518159A (en) | 1978-07-26 | 1978-07-26 | Frequency control method for surface wave device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9122178A JPS5518159A (en) | 1978-07-26 | 1978-07-26 | Frequency control method for surface wave device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5518159A true JPS5518159A (en) | 1980-02-08 |
Family
ID=14020361
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9122178A Pending JPS5518159A (en) | 1978-07-26 | 1978-07-26 | Frequency control method for surface wave device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5518159A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0141487A2 (en) * | 1983-10-21 | 1985-05-15 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing surface acoustic wave device |
JPS62232209A (en) * | 1986-04-01 | 1987-10-12 | Murata Mfg Co Ltd | Frequency adjusting method for surface acoustic wave device |
JPS62232208A (en) * | 1986-04-01 | 1987-10-12 | Murata Mfg Co Ltd | Frequency adjusting method for surface acoustic wave device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS524830U (en) * | 1975-06-24 | 1977-01-13 | ||
JPS5230361A (en) * | 1975-09-04 | 1977-03-08 | Murata Mfg Co Ltd | Frequency adjustment method for elastic surface wave transducer |
-
1978
- 1978-07-26 JP JP9122178A patent/JPS5518159A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS524830U (en) * | 1975-06-24 | 1977-01-13 | ||
JPS5230361A (en) * | 1975-09-04 | 1977-03-08 | Murata Mfg Co Ltd | Frequency adjustment method for elastic surface wave transducer |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0141487A2 (en) * | 1983-10-21 | 1985-05-15 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing surface acoustic wave device |
JPS62232209A (en) * | 1986-04-01 | 1987-10-12 | Murata Mfg Co Ltd | Frequency adjusting method for surface acoustic wave device |
JPS62232208A (en) * | 1986-04-01 | 1987-10-12 | Murata Mfg Co Ltd | Frequency adjusting method for surface acoustic wave device |
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