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JPS5435176A - Depositing method by vacuum evaporation - Google Patents

Depositing method by vacuum evaporation

Info

Publication number
JPS5435176A
JPS5435176A JP10049677A JP10049677A JPS5435176A JP S5435176 A JPS5435176 A JP S5435176A JP 10049677 A JP10049677 A JP 10049677A JP 10049677 A JP10049677 A JP 10049677A JP S5435176 A JPS5435176 A JP S5435176A
Authority
JP
Japan
Prior art keywords
vacuum evaporation
depositing method
deposition
electroconductive
effecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10049677A
Other languages
Japanese (ja)
Inventor
Masachika Narushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10049677A priority Critical patent/JPS5435176A/en
Publication of JPS5435176A publication Critical patent/JPS5435176A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To form coating without contamination due to impurities, by effecting blank deposition prior to the proper run of deposition by vacuum evaporation of material to be evaporated contained in and electroconductive, composite ceramic boat.
JP10049677A 1977-08-24 1977-08-24 Depositing method by vacuum evaporation Pending JPS5435176A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10049677A JPS5435176A (en) 1977-08-24 1977-08-24 Depositing method by vacuum evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10049677A JPS5435176A (en) 1977-08-24 1977-08-24 Depositing method by vacuum evaporation

Publications (1)

Publication Number Publication Date
JPS5435176A true JPS5435176A (en) 1979-03-15

Family

ID=14275528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10049677A Pending JPS5435176A (en) 1977-08-24 1977-08-24 Depositing method by vacuum evaporation

Country Status (1)

Country Link
JP (1) JPS5435176A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206557A (en) * 1981-04-23 1982-12-17 Tokyo Yogyo Co Ltd Pipe for air sealing during casting of molten steel
JPH03114639A (en) * 1990-08-17 1991-05-15 Harima Ceramic Co Ltd Nozzle for casting molten steel
JPH06154973A (en) * 1992-11-25 1994-06-03 Akechi Ceramics Kk Nozzle for continuous casting

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206557A (en) * 1981-04-23 1982-12-17 Tokyo Yogyo Co Ltd Pipe for air sealing during casting of molten steel
JPH03114639A (en) * 1990-08-17 1991-05-15 Harima Ceramic Co Ltd Nozzle for casting molten steel
JPH0579431B2 (en) * 1990-08-17 1993-11-02 Harima Ceramic Co Ltd
JPH06154973A (en) * 1992-11-25 1994-06-03 Akechi Ceramics Kk Nozzle for continuous casting

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