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JPS5467452A - Laser induced damage evaluator - Google Patents

Laser induced damage evaluator

Info

Publication number
JPS5467452A
JPS5467452A JP13427477A JP13427477A JPS5467452A JP S5467452 A JPS5467452 A JP S5467452A JP 13427477 A JP13427477 A JP 13427477A JP 13427477 A JP13427477 A JP 13427477A JP S5467452 A JPS5467452 A JP S5467452A
Authority
JP
Japan
Prior art keywords
laser beam
damage
reflected
real time
induced damage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13427477A
Other languages
Japanese (ja)
Inventor
Toshiaki Murahashi
Takao Sawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13427477A priority Critical patent/JPS5467452A/en
Publication of JPS5467452A publication Critical patent/JPS5467452A/en
Pending legal-status Critical Current

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  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE: To make it possible to observe in real time the change in surface conditions due to a laser induced damage, while effecting irradiation with a laser beam, by using a built-in scanning type electronic microscope.
CONSTITUTION: A laser beam 3 is vertically incident upon an optical element 4 to make an optical damage. The concentrated spot of the laser beam 3 is scanned with the electron beam 2 from an electron gun 1 so that the resultant secondary and reflected electrons 8 are deflected in their path by the action of a magnetic field until they are guided into a detector 9. By the use of a shielding plate 6 which is provided by considering the thermal influences from the secondary and reflected electrons 8, the laser beam 3 can be protected from the thermal influences from the scattered light which is produced upon incidence on the optical element 4. By obsrving the image of the reflected or secondary electrons 8, the timely changes in the damage can be trapped in real time.
COPYRIGHT: (C)1979,JPO&Japio
JP13427477A 1977-11-09 1977-11-09 Laser induced damage evaluator Pending JPS5467452A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13427477A JPS5467452A (en) 1977-11-09 1977-11-09 Laser induced damage evaluator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13427477A JPS5467452A (en) 1977-11-09 1977-11-09 Laser induced damage evaluator

Publications (1)

Publication Number Publication Date
JPS5467452A true JPS5467452A (en) 1979-05-30

Family

ID=15124442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13427477A Pending JPS5467452A (en) 1977-11-09 1977-11-09 Laser induced damage evaluator

Country Status (1)

Country Link
JP (1) JPS5467452A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103364176A (en) * 2012-12-06 2013-10-23 西安工业大学 Testing system for laser induced damage threshold
CN105734523A (en) * 2016-02-24 2016-07-06 西安工业大学 Method and device capable of improving laser damage resistance capacity of diamond-like thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103364176A (en) * 2012-12-06 2013-10-23 西安工业大学 Testing system for laser induced damage threshold
CN105734523A (en) * 2016-02-24 2016-07-06 西安工业大学 Method and device capable of improving laser damage resistance capacity of diamond-like thin film

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