JPS542685A - Forming method for metal wiring - Google Patents
Forming method for metal wiringInfo
- Publication number
- JPS542685A JPS542685A JP6827877A JP6827877A JPS542685A JP S542685 A JPS542685 A JP S542685A JP 6827877 A JP6827877 A JP 6827877A JP 6827877 A JP6827877 A JP 6827877A JP S542685 A JPS542685 A JP S542685A
- Authority
- JP
- Japan
- Prior art keywords
- forming method
- metal wiring
- pattern
- vapor
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Weting (AREA)
Abstract
PURPOSE: To obtain fine-pattern metal wirings accurately, by vapor-depositing a metal film on the entire surface after providing a photosensitizer pattern onto the substrate and by removing the photosensitizer pattern and the vapor-deposited metal film together.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6827877A JPS542685A (en) | 1977-06-08 | 1977-06-08 | Forming method for metal wiring |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6827877A JPS542685A (en) | 1977-06-08 | 1977-06-08 | Forming method for metal wiring |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS542685A true JPS542685A (en) | 1979-01-10 |
Family
ID=13369124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6827877A Pending JPS542685A (en) | 1977-06-08 | 1977-06-08 | Forming method for metal wiring |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS542685A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58202546A (en) * | 1982-05-21 | 1983-11-25 | Mitsubishi Electric Corp | Formation of element isolation film |
JPS59215790A (en) * | 1983-05-23 | 1984-12-05 | マルイ工業株式会社 | Method of producing printed circuit board |
JPS62171169A (en) * | 1986-01-23 | 1987-07-28 | Kanegafuchi Chem Ind Co Ltd | Method manufacture for thin film pattern |
JP2007059520A (en) * | 2005-08-23 | 2007-03-08 | Iwate Univ | Fine work method, fine work structure, electronic device and manufacturing method thereof |
-
1977
- 1977-06-08 JP JP6827877A patent/JPS542685A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58202546A (en) * | 1982-05-21 | 1983-11-25 | Mitsubishi Electric Corp | Formation of element isolation film |
JPS59215790A (en) * | 1983-05-23 | 1984-12-05 | マルイ工業株式会社 | Method of producing printed circuit board |
JPS62171169A (en) * | 1986-01-23 | 1987-07-28 | Kanegafuchi Chem Ind Co Ltd | Method manufacture for thin film pattern |
JP2007059520A (en) * | 2005-08-23 | 2007-03-08 | Iwate Univ | Fine work method, fine work structure, electronic device and manufacturing method thereof |
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