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JPS5426666A - Positioning method of semiconductor wafer - Google Patents

Positioning method of semiconductor wafer

Info

Publication number
JPS5426666A
JPS5426666A JP9242277A JP9242277A JPS5426666A JP S5426666 A JPS5426666 A JP S5426666A JP 9242277 A JP9242277 A JP 9242277A JP 9242277 A JP9242277 A JP 9242277A JP S5426666 A JPS5426666 A JP S5426666A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
positioning method
aligning
lines
depressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9242277A
Other languages
Japanese (ja)
Other versions
JPS5620691B2 (en
Inventor
Tadahiko Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Original Assignee
Tokyo Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sanyo Electric Co Ltd, Sanyo Electric Co Ltd filed Critical Tokyo Sanyo Electric Co Ltd
Priority to JP9242277A priority Critical patent/JPS5426666A/en
Publication of JPS5426666A publication Critical patent/JPS5426666A/en
Publication of JPS5620691B2 publication Critical patent/JPS5620691B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To enable automatic alignment, by depressing the sides of a semiconductor wafer in which two positioning lines are formed with a shifter reciprocating in circular arc and by aligning the aligning lines with the reference alignment unit.
COPYRIGHT: (C)1979,JPO&Japio
JP9242277A 1977-07-29 1977-07-29 Positioning method of semiconductor wafer Granted JPS5426666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9242277A JPS5426666A (en) 1977-07-29 1977-07-29 Positioning method of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9242277A JPS5426666A (en) 1977-07-29 1977-07-29 Positioning method of semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS5426666A true JPS5426666A (en) 1979-02-28
JPS5620691B2 JPS5620691B2 (en) 1981-05-15

Family

ID=14053974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9242277A Granted JPS5426666A (en) 1977-07-29 1977-07-29 Positioning method of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5426666A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472477U (en) * 1977-10-31 1979-05-23
JPS5785285A (en) * 1980-11-17 1982-05-27 Fujitsu Ltd Method of positioning board for carrying mask exposure device
JPS6136526A (en) * 1984-03-12 1986-02-21 ア−バン　トランスポ−テ−シヨン　デベロツプメント　コ−ポレ−シヨン　リミテツド Brake-disk assembly

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472477U (en) * 1977-10-31 1979-05-23
JPS5785285A (en) * 1980-11-17 1982-05-27 Fujitsu Ltd Method of positioning board for carrying mask exposure device
JPS6119031B2 (en) * 1980-11-17 1986-05-15 Fujitsu Ltd
JPS6136526A (en) * 1984-03-12 1986-02-21 ア−バン　トランスポ−テ−シヨン　デベロツプメント　コ−ポレ−シヨン　リミテツド Brake-disk assembly
JPH0227531B2 (en) * 1984-03-12 1990-06-18 Aaban Toransuhooteeshon Dev Corp Ltd

Also Published As

Publication number Publication date
JPS5620691B2 (en) 1981-05-15

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