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JPS5410688A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5410688A
JPS5410688A JP7581877A JP7581877A JPS5410688A JP S5410688 A JPS5410688 A JP S5410688A JP 7581877 A JP7581877 A JP 7581877A JP 7581877 A JP7581877 A JP 7581877A JP S5410688 A JPS5410688 A JP S5410688A
Authority
JP
Japan
Prior art keywords
oxide film
production
semiconductor device
isolation region
region oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7581877A
Other languages
Japanese (ja)
Inventor
Saburo Osaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7581877A priority Critical patent/JPS5410688A/en
Publication of JPS5410688A publication Critical patent/JPS5410688A/en
Pending legal-status Critical Current

Links

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  • Element Separation (AREA)

Abstract

PURPOSE: To improve the electrical characteristics of element and to prevent breakage of electrode wiring by substituting an oxide film of polycrystalline Si for part of isolation region oxide film so as to reduce the number of projections in the vicinity of isolation region oxide film and to lessen distortion to epitaxial layer.
COPYRIGHT: (C)1979,JPO&Japio
JP7581877A 1977-06-24 1977-06-24 Production of semiconductor device Pending JPS5410688A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7581877A JPS5410688A (en) 1977-06-24 1977-06-24 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7581877A JPS5410688A (en) 1977-06-24 1977-06-24 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5410688A true JPS5410688A (en) 1979-01-26

Family

ID=13587135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7581877A Pending JPS5410688A (en) 1977-06-24 1977-06-24 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5410688A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0263511U (en) * 1988-11-01 1990-05-11
US4927780A (en) * 1989-10-02 1990-05-22 Motorola, Inc. Encapsulation method for localized oxidation of silicon

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0263511U (en) * 1988-11-01 1990-05-11
US4927780A (en) * 1989-10-02 1990-05-22 Motorola, Inc. Encapsulation method for localized oxidation of silicon

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