JPH10321742A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPH10321742A JPH10321742A JP9132237A JP13223797A JPH10321742A JP H10321742 A JPH10321742 A JP H10321742A JP 9132237 A JP9132237 A JP 9132237A JP 13223797 A JP13223797 A JP 13223797A JP H10321742 A JPH10321742 A JP H10321742A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- chip
- electrostatic protection
- chips
- semiconductor integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
- H01L2224/49113—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting different bonding areas on the semiconductor or solid-state body to a common bonding area outside the body, e.g. converging wires
Landscapes
- Lead Frames For Integrated Circuits (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、リードフレームの
チップ搭載部の両面に、それぞれ集積回路チップが搭載
され、該各集積回路チップの対応する各電極が、それぞ
れ、共通リード端子に接続されて成る樹脂封止型半導体
集積回路装置に関するものである。[0001] The present invention relates to an integrated circuit chip mounted on both sides of a chip mounting portion of a lead frame, and corresponding electrodes of each integrated circuit chip are connected to common lead terminals. The present invention relates to a resin-sealed semiconductor integrated circuit device.
【0002】[0002]
【従来の技術】樹脂封止型半導体集積回路装置は、リー
ドフレームのチップ搭載部に集積回路チップが搭載さ
れ、該集積回路チップの各電極とリード端子間がボンデ
ィングワイヤにより接続された構成となっている。かか
る通常の樹脂封止型半導体集積回路装置に対して、機能
の向上、或いは実装密度の向上を企図して、リードフレ
ームのチップ搭載部の両面に、それぞれ集積回路チップ
を搭載する構成とした両面搭載型半導体集積回路装置が
提案されている。2. Description of the Related Art A resin-sealed semiconductor integrated circuit device has a configuration in which an integrated circuit chip is mounted on a chip mounting portion of a lead frame, and each electrode of the integrated circuit chip and a lead terminal are connected by a bonding wire. ing. With respect to such a normal resin-encapsulated semiconductor integrated circuit device, in order to improve the function or the mounting density, both sides of the chip mounting portion of the lead frame are configured to mount integrated circuit chips on both surfaces. A mounted semiconductor integrated circuit device has been proposed.
【0003】図2に、従来の両面搭載型半導体集積回路
装置の構成図を示す。図において、31は、リードフレ
ームのチップ搭載部であり、その両面に、それぞれ、集
積回路チップ32、33が搭載されている。各集積回路
チップ32及び33の対応する電極(図示せず)と、共
通リード端子34との間は、それぞれボンディングワイ
ヤ35にて接続されている。36は封止樹脂である。例
えば、集積回路チップ32及び33が、それぞれ、同一
容量のメモリチップであり、両面搭載により、容量を2
倍とする場合は、チップ選択信号入力に基づき内部回路
に選択信号を出力するデコーダ回路部分のみが相違し、
他の部分は同一構成の2つのメモリチップ(但し、一方
のチップは、他方のチップに対して、左右(又は上下)
反転構造となっている)をチップ搭載部の両面に搭載
し、各メモリチップの対応する電極は同一のリード端子
に接続する構成とすることにより、面積的に同一であり
ながら、機能(容量)を2倍とした半導体集積回路装置
を得ることができる。かかる半導体集積回路装置は、例
えば、特開平2−87661号公報に開示されている。FIG. 2 shows a configuration diagram of a conventional double-sided semiconductor integrated circuit device. In the figure, reference numeral 31 denotes a chip mounting portion of a lead frame, and integrated circuit chips 32 and 33 are mounted on both surfaces thereof, respectively. The corresponding electrodes (not shown) of the integrated circuit chips 32 and 33 are connected to the common lead terminals 34 by bonding wires 35, respectively. 36 is a sealing resin. For example, each of the integrated circuit chips 32 and 33 is a memory chip having the same capacity.
In the case of doubling, only the decoder circuit portion that outputs the selection signal to the internal circuit based on the chip selection signal input differs,
The other parts are two memory chips of the same configuration (however, one chip is left / right (or up / down) with respect to the other chip)
(Inverted structure) is mounted on both sides of the chip mounting portion, and the corresponding electrodes of each memory chip are connected to the same lead terminal, so that the function (capacity) is the same, while the area is the same. Can be obtained twice. Such a semiconductor integrated circuit device is disclosed, for example, in Japanese Patent Laid-Open No. 2-87661.
【0004】[0004]
【発明が解決しようとする課題】しかしながら、上記従
来の両面搭載型半導体集積回路装置には、以下に示す問
題点があった。However, the conventional double-sided semiconductor integrated circuit device has the following problems.
【0005】一般に、集積回路チップの各電極に対して
は、外部よりの静電気の侵入に備えて静電保護回路が設
けられている。すなわち、該静電保護回路により、外部
より侵入した静電荷を電源ライン等に逃がし、内部回路
に高電圧が印加されることを防止して、その破壊を未然
に防止するようにしている。両面搭載型半導体集積回路
装置に於いては、かかる、静電保護回路を、それぞれ、
その内部に有する2個の集積回路チップがリードフレー
ムのチップ搭載部の両面に搭載され、各集積回路チップ
の対応する電極が、それぞれ共通のリード端子にボンデ
ィングワイヤにより接続されることになる。したがっ
て、各リード端子から見た場合、必要な2倍の機能を有
する静電保護回路が接続されることになる。これは、必
要以上に無駄な回路を設けていることになる。また、静
電保護回路は、一般に、図3に示すように、トランジス
タ、ダイオード等により構成されており、PN接合や配
線容量等の容量が付加される。したがって、両面搭載型
半導体集積回路装置においては、通常の半導体集積回路
装置の約2倍の容量が付くことになり、信号伝搬の遅延
が増大するいう不都合を生じる。Generally, an electrostatic protection circuit is provided for each electrode of an integrated circuit chip in preparation for the intrusion of static electricity from the outside. That is, the electrostatic protection circuit allows the static charge that has entered from the outside to escape to the power supply line or the like, thereby preventing a high voltage from being applied to the internal circuit and preventing its destruction. In a double-sided semiconductor integrated circuit device, such an electrostatic protection circuit is
The two integrated circuit chips contained therein are mounted on both sides of the chip mounting portion of the lead frame, and the corresponding electrodes of each integrated circuit chip are connected to the common lead terminals by bonding wires. Therefore, when viewed from each lead terminal, an electrostatic protection circuit having a required double function is connected. This means that an unnecessary circuit is provided more than necessary. In addition, the electrostatic protection circuit generally includes a transistor, a diode, and the like, as shown in FIG. 3, to which a capacitance such as a PN junction or a wiring capacitance is added. Therefore, in a double-sided semiconductor integrated circuit device, the capacity is about twice as large as that of a normal semiconductor integrated circuit device, and the delay of signal propagation increases.
【0006】本発明は、かかる従来の問題点を解決すべ
くなされたものであり、上記の無駄を排し、チップ面積
の縮小を図ると共に、信号伝搬遅延の増大を防止した両
面搭載型半導体集積回路装置を提供するものである。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and eliminates the above waste, reduces the chip area, and prevents an increase in signal propagation delay. A circuit device is provided.
【0007】[0007]
【課題を解決するための手段】本発明(請求項1)の半
導体集積回路装置は、リードフレームのチップ搭載部の
両面に、それぞれ集積回路チップが搭載され、該各集積
回路チップの対応する各電極が、それぞれ、共通リード
端子に接続されて成る樹脂封止型半導体集積回路装置に
おいて、上記共通リード端子に対して設けられる静電保
護回路が、何れか一方の集積回路チップにのみ設けられ
て成ることを特徴とするものである。According to a first aspect of the present invention, there is provided a semiconductor integrated circuit device in which integrated circuit chips are mounted on both sides of a chip mounting portion of a lead frame. In a resin-sealed semiconductor integrated circuit device in which electrodes are respectively connected to a common lead terminal, an electrostatic protection circuit provided for the common lead terminal is provided only on one of the integrated circuit chips. It is characterized by becoming.
【0008】また、本発明(請求項2)の半導体集積回
路装置は、リードフレームのチップ搭載部の両面に、そ
れぞれ集積回路チップが搭載され、該各集積回路チップ
の対応する各電極が、それぞれ、共通リード端子に接続
されて成る樹脂封止型半導体集積回路装置において、上
記共通リード端子に対して設けられる静電保護回路が、
一方の集積回路チップに設けられる第1部分と、他方の
集積回路チップに設けられる第2部分とから成り、該両
部分の集合により、必要な機能を満たすべく構成されて
成ることを特徴とするものである。Further, in the semiconductor integrated circuit device of the present invention (claim 2), integrated circuit chips are mounted on both sides of the chip mounting portion of the lead frame, and the corresponding electrodes of the integrated circuit chips are respectively provided. In a resin-sealed semiconductor integrated circuit device connected to a common lead terminal, an electrostatic protection circuit provided for the common lead terminal
It is characterized by comprising a first portion provided on one integrated circuit chip and a second portion provided on the other integrated circuit chip, and configured to satisfy a required function by a set of both portions. Things.
【0009】かかる本発明の半導体集積回路装置によれ
ば、両面搭載型半導体集積回路装置において、静電保護
回路を何れか一方の集積回路チップにのみ設け、或い
は、所定規模の静電保護回路を2つの集積回路チップに
分散させて設ける構成としているので、無駄な回路を無
くすことができ、チップ面積の縮小を図ることができる
と共に、各電極に付加される寄生容量の増加を防止する
ことができ、信号遅延の増大を防止することができるも
のである。According to the semiconductor integrated circuit device of the present invention, in the double-sided semiconductor integrated circuit device, the electrostatic protection circuit is provided on only one of the integrated circuit chips, or the electrostatic protection circuit of a predetermined scale is provided. Since it is configured to be provided separately on two integrated circuit chips, useless circuits can be eliminated, the chip area can be reduced, and an increase in parasitic capacitance added to each electrode can be prevented. This can prevent an increase in signal delay.
【0010】[0010]
【発明の実施の形態】以下、本発明の実施形態につい
て、図面を参照して詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【0011】図1は、本発明の一実施形態である半導体
集積回路装置の概略的構成図である。FIG. 1 is a schematic configuration diagram of a semiconductor integrated circuit device according to one embodiment of the present invention.
【0012】本実施形態は、構造的には、図2に示す従
来の半導体集積回路装置の構造と同一であり、図1にお
いては、特徴部分のみを示している。図において、11
及び12は、それぞれ、集積回路チップであり、例え
ば、同一容量のメモリチップ(DRAM、ROM等)で
ある。本実施形態においては、必要規模の静電保護回路
を2つの集積回路チップ11及び12に分散させて(例
えば、それぞれに、1/2規模ずつ設ける)設ける構成
としている。図において、13及び14は、それぞれ、
集積回路チップ11及び12に設けられた静電保護回路
であり、該分散して設けられた2つの静電保護回路13
及び14の両者によって、必要な静電保護機能が得られ
るように構成されている。15及び16は、それぞれ、
静電保護回路13及び14が接続される電極、17は、
上記電極15及び16に対する共通リード端子、18及
び19は、それぞれ、共通リード端子17と、各電極1
5及び16間を接続するボンディングワイヤである。The present embodiment is structurally the same as the structure of the conventional semiconductor integrated circuit device shown in FIG. 2, and FIG. 1 shows only the characteristic portions. In the figure, 11
And 12 are integrated circuit chips, for example, memory chips (DRAM, ROM, etc.) having the same capacity. In the present embodiment, a configuration is adopted in which electrostatic protection circuits of a required scale are provided separately on the two integrated circuit chips 11 and 12 (for example, each is provided with a half scale). In the figure, 13 and 14 are respectively
An electrostatic protection circuit provided on the integrated circuit chips 11 and 12;
And 14 are configured so as to obtain a necessary electrostatic protection function. 15 and 16 are respectively
The electrodes 17 to which the electrostatic protection circuits 13 and 14 are connected are:
The common lead terminals 18 and 19 for the electrodes 15 and 16 are the common lead terminal 17 and each electrode 1
It is a bonding wire connecting between 5 and 16.
【0013】図4に、外部より入力されるチップ選択信
号に応じて、集積回路チップ11と、集積回路チップ1
2の何れか一方を有効とする制御回路部分の構成を示
す。FIG. 4 shows an integrated circuit chip 11 and an integrated circuit chip 1 according to a chip selection signal input from the outside.
2 shows a configuration of a control circuit portion that makes one of the two effective.
【0014】図に示す電極に、外部よりのチップ選択信
号が印加される。配線修正部の接続を集積回路チップ1
1と12とで異ならせることにより、チップ選択信号の
H、Lに応じて、何れか一方の集積回路チップの内部制
御信号がH、他方の集積回路チップの内部制御信号がL
となり、チップ選択が行われる。An external chip select signal is applied to the electrodes shown in FIG. Connect the wiring correction unit to the integrated circuit chip 1.
1 and 12, the internal control signal of one of the integrated circuit chips is H and the internal control signal of the other integrated circuit chip is L in accordance with the H and L of the chip selection signal.
And the chip selection is performed.
【0015】上記実施形態においては、1個のリード端
子に対する静電保護回路を2つの集積回路チップに分散
させて設け、それぞれの集積回路チップに設けられた各
静電保護回路の集合によって、所定の機能が得られる構
成としているが、1個のリード端子に対して必要な規模
の静電保護回路を、何れか一方の集積回路チップにのみ
設ける構成としてもしてもよい。この場合、全リード端
子に対するすべての静電保護回路を、何れか一方の集積
回路チップ(例えば、集積回路チップ11)にのみ設け
る構成としても良いし、適当に分散配置させる構成とし
ても良い。例えば、入力端子に対する静電保護回路は集
積回路チップ11の側に設け、出力端子に対する静電保
護回路は集積回路チップ12の側に設けるといった振り
分けを行ってもよい。In the above embodiment, an electrostatic protection circuit for one lead terminal is provided separately on two integrated circuit chips, and a predetermined set of the electrostatic protection circuits provided on each integrated circuit chip is used. However, the configuration may be such that an electrostatic protection circuit of a necessary scale for one lead terminal is provided only on one of the integrated circuit chips. In this case, all the electrostatic protection circuits for all the lead terminals may be provided only on one of the integrated circuit chips (for example, the integrated circuit chip 11), or may be appropriately dispersed. For example, the electrostatic protection circuit for the input terminal may be provided on the integrated circuit chip 11 side, and the electrostatic protection circuit for the output terminal may be provided on the integrated circuit chip 12 side.
【0016】2つの集積回路チップは、導電性リードフ
レームのチップ搭載部に基板を共通に張り合わせられる
ため、チップ間の基板抵抗を低く抑えることができる。
したがって、共通リード端子の静電保護回路を一方の集
積回路チップにのみ設けたり、2つの集積回路チップの
静電保護回路の規模を約半分に減少させても、通常の単
一集積回路チップから成る半導体集積回路装置の場合と
同様の、静電破壊耐性が得られるものである。Since the substrates of the two integrated circuit chips can be bonded together to the chip mounting portion of the conductive lead frame, the substrate resistance between the chips can be reduced.
Therefore, even if the electrostatic protection circuit of the common lead terminal is provided only on one of the integrated circuit chips, or the size of the electrostatic protection circuit of the two integrated circuit chips is reduced by about half, a normal single integrated circuit chip can be used. The same electrostatic breakdown resistance as that of the semiconductor integrated circuit device can be obtained.
【0017】[0017]
【発明の効果】以上詳細に説明したように、本発明の半
導体集積回路装置によれば、両面搭載型半導体集積回路
装置において、静電保護回路を何れか一方の集積回路チ
ップにのみ設け、或いは、所定規模の静電保護回路を2
つの集積回路チップに分散させて設ける構成としている
ので、無駄な回路を無くすことができ、チップ面積の縮
小を図ることができると共に、各電極に付加される寄生
容量の増加を防止することができ、信号遅延の増大を防
止することができるものである。As described above in detail, according to the semiconductor integrated circuit device of the present invention, in the double-sided semiconductor integrated circuit device, the electrostatic protection circuit is provided only on one of the integrated circuit chips, or , An electrostatic protection circuit of a predetermined scale
Since it is configured to be provided separately on one integrated circuit chip, unnecessary circuits can be eliminated, chip area can be reduced, and increase in parasitic capacitance added to each electrode can be prevented. , It is possible to prevent an increase in signal delay.
【図1】本発明の一実施形態の概略構成図である。FIG. 1 is a schematic configuration diagram of an embodiment of the present invention.
【図2】従来の両面搭載型半導体集積回路装置の構成図
である。FIG. 2 is a configuration diagram of a conventional double-sided mounted semiconductor integrated circuit device.
【図3】静電保護回路の構成例を示す図である。FIG. 3 is a diagram illustrating a configuration example of an electrostatic protection circuit.
【図4】図1に示される各集積回路チップに設けられる
チップ選択制御回路部分の構成図である。FIG. 4 is a configuration diagram of a chip selection control circuit portion provided in each integrated circuit chip shown in FIG. 1;
11、12 集積回路チップ 13、14 静電保護回路 15、16 電極 17 共通リード端子 18、19 ボンディングワイヤ 11, 12 Integrated circuit chip 13, 14 Electrostatic protection circuit 15, 16 Electrode 17 Common lead terminal 18, 19 Bonding wire
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 FI H01L 25/18 ──────────────────────────────────────────────────の Continued on front page (51) Int.Cl. 6 Identification code FI H01L 25/18
Claims (2)
に、それぞれ集積回路チップが搭載され、該各集積回路
チップの対応する各電極が、それぞれ、共通リード端子
に接続されて成る樹脂封止型半導体集積回路装置におい
て、 上記共通リード端子に対して設けられる静電保護回路
が、何れか一方の集積回路チップにのみ設けられて成る
ことを特徴とする半導体集積回路装置。An integrated circuit chip is mounted on both sides of a chip mounting portion of a lead frame, and respective electrodes of each integrated circuit chip are connected to common lead terminals, respectively. In the integrated circuit device, the electrostatic protection circuit provided for the common lead terminal is provided only on one of the integrated circuit chips.
に、それぞれ集積回路チップが搭載され、該各集積回路
チップの対応する各電極が、それぞれ、共通リード端子
に接続されて成る樹脂封止型半導体集積回路装置におい
て、 上記共通リード端子に対して設けられる静電保護回路
が、一方の集積回路チップに設けられる第1部分と、他
方の集積回路チップに設けられる第2部分とから成り、
該両部分の集合により、必要な機能を満たすべく構成さ
れて成ることを特徴とする半導体集積回路装置。2. A resin-sealed semiconductor in which integrated circuit chips are mounted on both surfaces of a chip mounting portion of a lead frame, and respective electrodes of the integrated circuit chips are connected to common lead terminals, respectively. In the integrated circuit device, the electrostatic protection circuit provided for the common lead terminal includes a first portion provided on one integrated circuit chip and a second portion provided on the other integrated circuit chip,
A semiconductor integrated circuit device configured to satisfy a required function by a set of the two parts.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13223797A JP3304283B2 (en) | 1997-05-22 | 1997-05-22 | Semiconductor integrated circuit device |
TW087105017A TW432669B (en) | 1997-04-25 | 1998-04-02 | Semiconductor integrated circuit device capable of achieving reductions in chip area and consumption power |
US09/054,893 US5949139A (en) | 1997-04-25 | 1998-04-03 | Semiconductor integrated circuit device capable of achieving reductions in chip area and consumption power |
KR1019980014637A KR19980081691A (en) | 1997-04-25 | 1998-04-24 | Semiconductor integrated circuit device can reduce chip area and power consumption |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13223797A JP3304283B2 (en) | 1997-05-22 | 1997-05-22 | Semiconductor integrated circuit device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH10321742A true JPH10321742A (en) | 1998-12-04 |
JP3304283B2 JP3304283B2 (en) | 2002-07-22 |
Family
ID=15076582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13223797A Expired - Fee Related JP3304283B2 (en) | 1997-04-25 | 1997-05-22 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3304283B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001274315A (en) * | 2000-03-24 | 2001-10-05 | Sony Corp | Semiconductor device and its manufacturing method |
US6972487B2 (en) | 2001-03-30 | 2005-12-06 | Fujitsu Limited | Multi chip package structure having a plurality of semiconductor chips mounted in the same package |
US7598537B2 (en) | 2002-10-07 | 2009-10-06 | Oki Semiconductor Co., Ltd | Semiconductor device |
JP2010129958A (en) * | 2008-12-01 | 2010-06-10 | Seiko Epson Corp | Semiconductor device, and manufacturing method thereof |
-
1997
- 1997-05-22 JP JP13223797A patent/JP3304283B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001274315A (en) * | 2000-03-24 | 2001-10-05 | Sony Corp | Semiconductor device and its manufacturing method |
US6972487B2 (en) | 2001-03-30 | 2005-12-06 | Fujitsu Limited | Multi chip package structure having a plurality of semiconductor chips mounted in the same package |
US7598537B2 (en) | 2002-10-07 | 2009-10-06 | Oki Semiconductor Co., Ltd | Semiconductor device |
JP2010129958A (en) * | 2008-12-01 | 2010-06-10 | Seiko Epson Corp | Semiconductor device, and manufacturing method thereof |
US8338890B2 (en) | 2008-12-01 | 2012-12-25 | Seiko Epson Corporation | Semiconductor device and method for manufacturing semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JP3304283B2 (en) | 2002-07-22 |
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