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JPH10271850A - Medium carrying device - Google Patents

Medium carrying device

Info

Publication number
JPH10271850A
JPH10271850A JP7374897A JP7374897A JPH10271850A JP H10271850 A JPH10271850 A JP H10271850A JP 7374897 A JP7374897 A JP 7374897A JP 7374897 A JP7374897 A JP 7374897A JP H10271850 A JPH10271850 A JP H10271850A
Authority
JP
Japan
Prior art keywords
stator
medium
insulating layer
base material
strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7374897A
Other languages
Japanese (ja)
Inventor
Shinji Hayakawa
慎司 早川
Masayasu Sato
正康 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP7374897A priority Critical patent/JPH10271850A/en
Publication of JPH10271850A publication Critical patent/JPH10271850A/en
Pending legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a medium carrying device, the carrying characteristic of which is reduced in changes over aging and which can highly stably transport a medium even under a high-humidity condition, by covering the belt-like electrode forming surface of the base material of a stator composed of a fluoroplastic with an insulating layer so that belt-like electrodes may not be exposed. SOLUTION: A medium carrying device is composed of a platy stator 1 and a platy mover 2 and carries the mover 2 together with a medium 3, by utilizing the carrying force applied to the mover 2 from the stator 1 by placing the mover 2 on the stator 1 and the medium 3 on the mover 2. The stator 1 is provided with a plurality of belt-like electrodes 12 arranged in parallel with each other on a base material 11 and an insulating layer 13 covering the electrodes 12. Since the surface of the base material 11 of the stator 1 made of a fluoroplastic material is coated with the insulating layer 13 made of a fluroplastic or silicon resin, the changes, of the carrying characteristic of the carrying device over aging becomes extremely small, and the carrying stability of the device is extensively improved even under a high humid condition.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、複写機、プリン
タ、ファクシミリ、現金自動入出金装置等に組み込ま
れ、用紙や紙幣等の紙葉類や、キャッシュカードやプリ
ペイドカード等のカード類といった媒体を搬送する媒体
搬送装置に関するもので、特に、静電気力を利用した媒
体搬送装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to a copying machine, a printer, a facsimile, an automatic cash dispenser, and the like, and is used for media such as paper sheets and bills, and cards such as cash cards and prepaid cards. The present invention relates to a medium conveying device for conveying, and particularly to a medium conveying device using electrostatic force.

【0002】[0002]

【従来の技術】従来、複写機、プリンタ、ファクシミ
リ、現金自動入出金装置等では、特開平5−27068
1号公報に開示されるように、回転型電磁モータ駆動の
ゴムローラを紙葉類等の媒体に圧接する搬送装置が使用
されていた。しかし、このような搬送装置では、モータ
自体の発熱や大消費電力が問題となり、電磁モータとゴ
ムローラを使用する構成上、小型化にも限界がある。ま
た、媒体の搬送に用いる力としてゴムローラと搬送媒体
間の摩擦力を利用しているため、ゴムの磨耗、紙粉の付
着等により、安定した搬送力を得るためにはゴムローラ
自体やゴムローラと媒体の圧接力を定期的に検査および
補修する必要があった。
2. Description of the Related Art Conventionally, copiers, printers, facsimile machines, automatic cash dispensers and the like have been disclosed in Japanese Unexamined Patent Publication No. 5-27068.
As disclosed in Japanese Unexamined Patent Publication No. 1 (1993), there has been used a transfer device that presses a rubber roller driven by a rotary electromagnetic motor against a medium such as paper sheets. However, in such a transfer device, heat generation and large power consumption of the motor itself become problems, and there is a limit to downsizing due to the configuration using the electromagnetic motor and the rubber roller. In addition, since the frictional force between the rubber roller and the transport medium is used as the force used for transporting the medium, the rubber roller itself or the rubber roller and the medium are used to obtain a stable transport force due to wear of rubber, adhesion of paper powder, and the like. It was necessary to periodically inspect and repair the pressure contact force.

【0003】これら問題を解決するため、特開平5−3
19602号公報や特開平6−56290号公報に開示
される静電気力を利用する搬送装置がある。このような
搬送装置は、帯状電極を有する固定子と、抵抗層を有す
る移動子から構成される。特開平5−319602号公
報では、移動子として搬送する紙を直接使用し、特開平
6−56290号公報では、高い抵抗値を有する移動子
の上に紙等の搬送物を載せる装置である。両者とも、固
定子の電極は3系統(3相)に分割されており、それが
等間隔で順に並んでいる。動作原理の概要は、特開平2
−285978号公報や、上述した特開平5−3196
02号公報および特開平6−56290号公報に開示さ
れているように、搬送直前に固定子電極の各相に特殊な
電圧の組み合わせを印加することにより、移動子の抵抗
層内に存在する正負の電荷を静電分極させる。以降、こ
の動作を初期分極行程と呼ぶ。移動子内で静電分極が十
分進んだところで、搬送用の電圧パターンの組み合わせ
を切り換えながら固定子電極の各相に印加すると、電荷
の反発と吸引によって移動子は搬送される。
In order to solve these problems, Japanese Patent Laid-Open Publication No.
There is a transfer device using an electrostatic force disclosed in 19602 and JP-A-6-56290. Such a transport device includes a stator having strip electrodes and a movable element having a resistance layer. In Japanese Patent Application Laid-Open No. Hei 5-319602, a paper to be conveyed is directly used as a moving element. In Japanese Patent Application Laid-Open No. 6-56290, a conveyed object such as paper is placed on a moving element having a high resistance value. In both cases, the electrodes of the stator are divided into three systems (three phases), which are sequentially arranged at equal intervals. For an overview of the operating principle, see
-285978 and the above-mentioned JP-A-5-3196.
As disclosed in Japanese Unexamined Patent Application Publication No. 02-206 and Japanese Unexamined Patent Application Publication No. Hei 6-56290, by applying a special combination of voltages to each phase of the stator electrode immediately before transport, positive and negative currents existing in the resistance layer of the mover can be obtained. Is electrostatically polarized. Hereinafter, this operation is referred to as an initial polarization step. When electrostatic polarization is sufficiently advanced in the movable element, when the voltage is applied to each phase of the stator electrode while switching the combination of the voltage patterns for transport, the movable element is transported by repulsion and attraction of electric charges.

【0004】しかしながら、上述したような静電気力を
利用した搬送装置は、高湿度環境下では移動子の搬送が
不安定になる問題が生じた。これは、高湿度環境下で
は、移動子と固定子が吸着しやすい状態となるためと考
えられる。このため、安定化対策として、特開平5−1
91984号公報では、移動子と固定子の吸着除去を目
的に、固定子に穴を開け、その穴から移動子に向かって
空気を吹き出して移動子と固定子の密着を防ぐ技術が開
示されている。
[0004] However, the transfer device utilizing the electrostatic force as described above has a problem that the transfer of the moving element becomes unstable in a high humidity environment. It is considered that this is because in a high humidity environment, the movable element and the stator are in a state of being easily adsorbed. For this reason, as a stabilization measure, Japanese Patent Laid-Open No.
Japanese Patent No. 91984 discloses a technique in which a hole is formed in a stator and air is blown out from the hole toward the moving element to prevent the moving element and the stator from sticking together for the purpose of suction removal of the moving element and the stator. I have.

【0005】また、特開平5−22959号公報では、
同様な目的で、移動子や固定子表面に凹凸を設けて、移
動子と固定子が接触する面を粗面化したり、移動子に穴
を開ける技術が開示されている。
In Japanese Patent Laid-Open Publication No. Hei 5-22959,
For the same purpose, there has been disclosed a technique in which a surface of a moving element or a stator is provided with irregularities to roughen a surface where the moving element and the stator come into contact, or a hole is formed in the moving element.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、固定子
に穴を開けて空気を噴出する方法は、搬送路の延長に比
例して送風用の配管数も増え、送風装置や空気圧縮用外
部動力の設置も含めてコストが大幅に上昇し、同時に搬
送装置が大型になるため、従来の電磁モータを利用した
搬送路との差別化が困難となる。さらに、移動子と固定
子との間隔が離れ過ぎると、搬送安定性が減少するた
め、移動子と固定子との距離を常に一定に保つ必要があ
る。このためには、送風用空気の流量,圧力等を制御し
なければならず、制御用の回路や流量センサ、距離セン
サ等を付加するのでコストが上昇し、製品としては実用
的ではない。
However, in the method of blowing air by making holes in the stator, the number of blower pipes increases in proportion to the extension of the transport path, and the blower and external power for air compression are increased. The cost including installation is greatly increased, and at the same time, the size of the transfer device is increased. Therefore, it is difficult to differentiate the transfer device from a transfer path using a conventional electromagnetic motor. Further, if the distance between the moving element and the stator is too large, the conveyance stability is reduced. Therefore, the distance between the moving element and the stator needs to be always kept constant. For this purpose, it is necessary to control the flow rate, pressure, and the like of the air for blowing, and a control circuit, a flow rate sensor, a distance sensor, and the like are added, so that the cost increases and the product is not practical.

【0007】また、移動子や固定子表面に凹凸を設ける
方法も、接着剤にガラスビーズ等のスペーサ用材料を混
入して移動子や固定子に塗布するため、スペーサ用材料
の混入比率や、接着剤中での分散度合いが重要な要因と
なり、凹凸の均一性が大きく変化する。その結果、搬送
安定性を固定子上の全面で得るためには、上述したスペ
ーサ用材料の混入比率や分散度合いを均一に制御する必
要があるため、混入、分散、塗布の工程には非常に高い
精度が要求され、コストの大幅な増加を伴う。また、こ
の様なスペーサ用材料と接着剤を移動子に塗布すると、
移動子の重量が著しく増加するため、搬送できる媒体の
最大重量が減少する。なお、特開平5−22959号公
報に開示される技術を用いても、高湿度環境下では安定
動作が得られず、搬送特性も著しい経時変化を伴い悪化
するものであった。
Also, a method of providing irregularities on the surface of the moving element or the stator is to mix the spacer material such as glass beads into the adhesive and apply it to the moving element or the stator. The degree of dispersion in the adhesive is an important factor, and the uniformity of the irregularities changes significantly. As a result, in order to obtain transport stability over the entire surface of the stator, it is necessary to uniformly control the mixing ratio and the degree of dispersion of the spacer material described above. High precision is required, accompanied by a significant increase in cost. When such a spacer material and an adhesive are applied to the moving element,
Because the weight of the mover is significantly increased, the maximum weight of the medium that can be conveyed is reduced. Even if the technique disclosed in Japanese Patent Application Laid-Open No. 5-22959 was used, stable operation could not be obtained in a high-humidity environment, and the transport characteristics deteriorated with a significant change with time.

【0008】[0008]

【課題を解決するために手段】上述した課題を解決する
ため、本発明は、絶縁体の基材に複数の帯状電極を平行
に並べて配列し、この帯状電極を覆う絶縁層を設けた固
定子に移動子を乗せ、前記帯状電極への印加電圧極性を
決められたパターンで切り換えることにより、前記固定
子と移動子との間に発生する静電気力を利用して、該移
動子を搬送する媒体搬送装置において、前記基材をフッ
素系樹脂材料で構成するとともに、絶縁層をフッ素系樹
脂材料で構成し、前記絶縁層は、前記帯状電極が露出し
ないよう少なくとも基材の帯状電極形成面を覆うことと
したものである。
In order to solve the above-mentioned problems, the present invention provides a stator having a plurality of strip electrodes arranged in parallel on an insulating base material and provided with an insulating layer covering the strip electrodes. And a medium for transporting the movable element by using an electrostatic force generated between the stator and the movable element by switching a polarity of a voltage applied to the strip electrode in a predetermined pattern. In the transfer device, the base material is made of a fluorine-based resin material, and the insulating layer is made of a fluorine-based resin material. The insulating layer covers at least a band-shaped electrode forming surface of the base material so that the band-shaped electrode is not exposed. It was decided that.

【0009】[0009]

【発明の実施の形態】図1は本発明の媒体搬送装置の実
施の形態の一例を示す構成図で、図1(a)は全体斜視
図、図1(b)は固定子の側面図と駆動機構のブロック
図を組み合わせたものである。この本実施の形態の媒体
搬送装置は、板状の固定子1と移動子2からなり、固定
子1の上に移動子2を載せ、この移動子2の上に媒体3
を乗せて、固定子1から移動子2に作用する搬送力によ
って、移動子2と媒体3とを一緒に搬送する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram showing an example of an embodiment of a medium conveying device according to the present invention. FIG. 1 (a) is an overall perspective view, and FIG. 1 (b) is a side view of a stator. FIG. 2 is a combination of block diagrams of a driving mechanism. The medium transporting apparatus according to the present embodiment includes a plate-like stator 1 and a moving member 2, the moving member 2 is mounted on the stator 1, and the medium 3 is mounted on the moving member 2.
Is carried, and the moving element 2 and the medium 3 are conveyed together by the conveying force acting on the moving element 2 from the stator 1.

【0010】固定子1は、基材11上に複数の帯状電極
12を所定の間隔で平行に配置し、その上に絶縁層13
を設けたものである。以後、移動子2側と固定子1側が
接触する面をしゅう動面と呼ぶ。基材11はフッ素樹脂
を用いた絶縁体である。フッ素樹脂の1例として、PT
FE,FEP,ETFE,PFA,PCTFE等があ
る。本実施の形態では、高抵抗、低吸湿、低誘電率を併
せ持つPTFEを用いた。
The stator 1 has a plurality of strip electrodes 12 arranged in parallel on a base material 11 at predetermined intervals, and an insulating layer 13
Is provided. Hereinafter, the surface where the movable element 2 and the stator 1 are in contact is referred to as a sliding surface. The base material 11 is an insulator using a fluororesin. As an example of a fluororesin, PT
There are FE, FEP, ETFE, PFA, PCTFE and the like. In this embodiment, PTFE having high resistance, low moisture absorption, and low dielectric constant is used.

【0011】ここで、基材11を構成するフッ素樹脂材
料中に、ガラス繊維を混入させることとしてもよい。ガ
ラス繊維を混入することで、基材11のたわみを防止す
ることが可能となる。基材11の形状や厚さ等は自由に
設計できるが、基材11としてPTFEを用いた場合、
PTFEは非接着性が強いため、そのままでは、帯状電
極12やその上の絶縁層13の形成をできないことがあ
る。この様な場合は、金属Naの液体アンモニア溶液に
よる化学処理や、NH3 中での放電処理等、公知の表面
改質技術によって、接着性を向上させることができる。
Here, glass fibers may be mixed into the fluororesin material constituting the base material 11. By mixing glass fibers, it is possible to prevent the substrate 11 from bending. The shape and thickness of the base material 11 can be freely designed, but when PTFE is used as the base material 11,
Since PTFE has a strong non-adhesive property, it may not be possible to form the strip electrode 12 and the insulating layer 13 thereon as it is. In such a case, the adhesion can be improved by a known surface modification technique such as a chemical treatment with a liquid ammonia solution of metallic Na or a discharge treatment in NH 3 .

【0012】帯状電極12は、金や銅等の導電性材料な
らばいずれも使用でき、基材11上に印刷やエッチング
等の公知の技術によって形成することができる。帯状電
極12は3相に分割接続されており、それぞれA相、B
相、C相と呼び、A相に接続される帯状電極は12A、
B相に接続される帯状電極は12B、C相に接続される
帯状電極は12Cとして表示する。帯状電極12の幅や
電極ピッチは自由に設定できる。例えば、電極ピッチは
0.2mm,0.4mm,1.0mm等に設定でき、電
極幅も、0.1mm,0.2mm,0.3mm等に設定
できる。本実施の形態では、電極ピッチを0.4mm、
電極幅を0.1mmに設定した固定子を例にとる。
The strip electrode 12 can be made of any conductive material such as gold or copper, and can be formed on the substrate 11 by a known technique such as printing or etching. The strip-shaped electrode 12 is divided and connected into three phases.
Phase, called the C phase, the strip-shaped electrode connected to the A phase is 12A,
The strip electrodes connected to the B phase are indicated as 12B, and the strip electrodes connected to the C phase are indicated as 12C. The width and electrode pitch of the strip electrode 12 can be freely set. For example, the electrode pitch can be set to 0.2 mm, 0.4 mm, 1.0 mm, and the like, and the electrode width can be set to 0.1 mm, 0.2 mm, 0.3 mm, and the like. In the present embodiment, the electrode pitch is 0.4 mm,
Take a stator with an electrode width of 0.1 mm as an example.

【0013】前記絶縁層13は、帯状電極12の各層間
絶縁、防湿、消費電流低減を主目的に、フッ素系塗料や
シリコン系塗料を用いて、帯状電極12が露出しないよ
うに基材11の帯状電極12形成面をコーティングす
る。絶縁層13の厚さは任意だが、過度に厚くすると搬
送力が弱まり、逆に薄すぎると気中放電が発生する。本
実施の形態では、約80μmの厚さでコーティングし
た。
The insulating layer 13 is made of a fluorine-based paint or a silicon-based paint to prevent the strip-shaped electrode 12 from being exposed, mainly for the purpose of interlayer insulation of the strip-shaped electrode 12, moisture proofing, and reduction of current consumption. The surface on which the strip electrode 12 is formed is coated. The thickness of the insulating layer 13 is arbitrary, but if the thickness is excessively large, the conveying force is weakened. If the thickness is too small, air discharge occurs. In the present embodiment, coating was performed at a thickness of about 80 μm.

【0014】なお、図1では絶縁層13を基材1の帯状
電極12形成面にのみ設けているが、基材11全面を覆
うように絶縁層13を設けてもよい。移動子2の基材
は、例えば、PET,ポリイミド(PI)、ポリカーボ
ネイト、ポリアミド、ガラス繊維等があげられる。本実
施の形態では、厚さ25μmのPETで、媒体3を載せ
る面の表面抵抗を1011〜1015〔Ω/□〕に調整した
ものを用いた。表面抵抗の調整方法は、帯電防止効果の
弱い帯電防止剤を塗布する方法等が利用できる。この他
にも、固定子と同様に、内部に電極を有するフレキシブ
ルプリント基板を移動子2として用いることもできる。
In FIG. 1, the insulating layer 13 is provided only on the surface of the substrate 1 on which the strip electrodes 12 are formed. However, the insulating layer 13 may be provided so as to cover the entire surface of the substrate 11. The base of the mover 2 is, for example, PET, polyimide (PI), polycarbonate, polyamide, glass fiber, or the like. In this embodiment, a 25 μm-thick PET whose surface resistance on the surface on which the medium 3 is placed is adjusted to 10 11 to 10 15 [Ω / □] is used. As a method of adjusting the surface resistance, a method of applying an antistatic agent having a weak antistatic effect or the like can be used. In addition to this, similarly to the stator, a flexible printed circuit board having electrodes therein can be used as the moving element 2.

【0015】電源5は、帯状電極12に印加する電圧の
電圧源であり、正電圧と負電圧を駆動回路6に供給す
る。駆動回路6は、帯状電極12のA相、B相、C相の
各相に、それぞれ正電圧、負電圧、0〔V〕(接地電
位)を自由に切り換えて印加できるようになっており、
制御回路7からの制御信号によって、各相に印加する電
圧極性を変化させる。また、駆動回路6は、制御回路7
からの信号によって、印加する電圧値を変更することも
できる。
The power supply 5 is a voltage source for applying a voltage to the strip electrode 12, and supplies a positive voltage and a negative voltage to the drive circuit 6. The drive circuit 6 can freely switch positive and negative voltages and 0 [V] (ground potential) to each of the A-phase, B-phase and C-phase of the strip-shaped electrode 12, respectively.
The polarity of the voltage applied to each phase is changed by a control signal from the control circuit 7. The drive circuit 6 includes a control circuit 7
The voltage value to be applied can be changed according to the signal from.

【0016】以降、本実施の形態では、各相に印加する
電圧極性を、〔A相極性,B相極性,C相極性〕として
表すことにする。また、正極性はP,負極性はN,接地
電位はGと表す。例えば、A相に正極性、B相に負極
性、C相に負極性の電圧を印加する場合は、〔P,N,
N〕という表示になる。以下に、動作を説明する。
Hereinafter, in the present embodiment, the voltage polarity applied to each phase is represented as [A-phase polarity, B-phase polarity, C-phase polarity]. The positive polarity is represented by P, the negative polarity by N, and the ground potential by G. For example, when applying a positive polarity voltage to the A phase, a negative polarity voltage to the B phase, and a negative polarity voltage to the C phase, [P, N,
N]. The operation will be described below.

【0017】静電気力を利用した媒体搬送装置は、移動
子2内の電荷をあらかじめ決まったパターンに分極さ
せ、その分極電荷の極性と、帯状電極12に印加する電
圧の極性との反発、吸引作用を利用する。ここでは、搬
送する移動子2内の電荷をあらかじめ分極させる初期分
極工程が必要である。初期分極工程時に帯状電極12に
印加する電圧のパターンを初期分極パターンと呼び、搬
送時に帯状電極12に印加する電圧パターンを搬送パタ
ーンと呼ぶ。
The medium transport device utilizing the electrostatic force polarizes the electric charge in the moving element 2 into a predetermined pattern, and repulses and attracts the polarity of the polarized electric charge and the polarity of the voltage applied to the strip electrode 12. Use Here, an initial polarization step of pre-polarizing the charges in the moving element 2 to be transported is required. The pattern of the voltage applied to the strip electrode 12 during the initial polarization step is called an initial polarization pattern, and the voltage pattern applied to the strip electrode 12 during transport is called a transport pattern.

【0018】図2は本実施の形態における移動子の移動
原理を示す説明図である。媒体3の乗った移動子2が搬
送開始位置に到達すると、制御回路7の制御により、駆
動回路6から初期分極パターンとして、例えば〔N,
P,P〕が帯状電極12の各相に印加される。帯状電極
12の各相に〔N,P,P〕を印加すると、電極内に充
電された電荷の影響によって、図2(1)に示すよう
に、電極と相対する移動子部分に電極極性と逆極性の電
荷が蓄積する。移動子2に初期分極パターンで十分な電
荷が蓄積したところで、図2(2)に示すように、帯状
電極12に印加する電圧を搬送パターンの第1段階パタ
ーンである〔P,N,G〕に切り換えると、各相の帯状
電極12に印加された電圧の極性と、移動子2内で分極
した電荷の極性との間で、同極性同志は反発し、逆極性
同志は吸引する。この固定子1側の帯状電極12の電荷
と移動子2内の電荷との反発,吸引作用によって、矢印
で示す方向に移動子2とその上に乗せた媒体3が移動を
始める。
FIG. 2 is an explanatory view showing the principle of movement of the moving element in the present embodiment. When the moving element 2 on which the medium 3 has arrived reaches the transport start position, under the control of the control circuit 7, the driving circuit 6 outputs an initial polarization pattern, for example, [N,
P, P] is applied to each phase of the strip electrode 12. When [N, P, P] is applied to each phase of the strip electrode 12, due to the influence of the electric charge charged in the electrode, as shown in FIG. Charges of opposite polarity accumulate. When sufficient charges are accumulated in the initial polarization pattern in the movable element 2, as shown in FIG. 2 (2), the voltage applied to the strip electrode 12 is the first stage pattern of the transport pattern [P, N, G]. , The same polarity repels and the opposite polarity attracts between the polarity of the voltage applied to the strip electrode 12 of each phase and the polarity of the electric charge polarized in the moving element 2. Due to the repulsion and attraction of the electric charges in the strip-shaped electrode 12 on the stator 1 side and the electric charges in the movable element 2, the movable element 2 and the medium 3 placed thereon start moving in the direction shown by the arrow.

【0019】そして、移動子2が帯状電極12の1ピッ
チ分移動すると、搬送方向の力が弱まって下方向への吸
引力が大きくなり、同時に移動子2と固定子1との摩擦
力が著しく上昇するため、移動子2は停止する。次に、
図2(3)に示すように、帯状電極12に印加する電圧
を搬送パターンの第2段階パターンである〔G,P,
N〕に切り換えると、上記と同様な作用により、移動子
2は矢印方向に電極1ピッチ分移動して停止する。更
に、図示しないが帯状電極12に印加する電圧を搬送パ
ターンの第3段階パターンである〔N,G,P〕に切り
換えると、上記と同様な作用により、移動子2は矢印方
向に電極1ピッチ分移動して停止する。この後も搬送パ
ターンの第1段階から第3段階パターンを順次繰り返し
て印加することにより、移動子2は帯状電極12の1ピ
ッチずつ、図2の矢印で示す方向に移動する。この3段
階ある搬送パターンの切り換え周波数を駆動周波数と呼
ぶことにすると、この駆動周波数を変化させることによ
って、移動子2の移動速度を制御することができ、駆動
周波数を上げると移動子2の移動速度が向上する。
When the moving element 2 moves by one pitch of the band-shaped electrode 12, the force in the conveying direction is weakened and the downward suction force is increased, and at the same time, the frictional force between the moving element 2 and the stator 1 is significantly increased. The mover 2 stops to move up. next,
As shown in FIG. 2C, the voltage applied to the strip electrode 12 is the second stage pattern of the transport pattern [G, P,
N], the moving element 2 is moved by one pitch of the electrode in the direction of the arrow and stopped by the same operation as described above. Further, although not shown, when the voltage applied to the strip-shaped electrode 12 is switched to the third stage pattern [N, G, P] of the transport pattern, the moving element 2 moves the electrode 1 pitch in the direction of the arrow by the same operation as described above. Move a minute and stop. Thereafter, the moving element 2 moves in the direction indicated by the arrow in FIG. 2 by one pitch of the strip electrode 12 by sequentially and repeatedly applying the first to third steps of the transport pattern. If the switching frequency of the three stages of the transport pattern is called a driving frequency, the moving speed of the movable element 2 can be controlled by changing the driving frequency. Speed is improved.

【0020】上述したように、基材11をフッ素系樹脂
材料で構成し、絶縁層13をフッ素系樹脂材料もしくは
シリコン系樹脂材料で構成した本実施の形態の固定子1
と、従来のように一般的なガラスエポキシ基材にレジス
トコーティングを行った固定子とを、通常雰囲気中での
搬送特性に関する経時変化を計測した。ここで、電極ピ
ッチ等の変数は同一とした。
As described above, the stator 1 according to the present embodiment in which the base material 11 is made of a fluorine-based resin material and the insulating layer 13 is made of a fluorine-based resin material or a silicon-based resin material.
The time-dependent change in the transport characteristics of a conventional and a stator in which a general glass epoxy base material was coated with a resist as in the past was measured in a normal atmosphere. Here, variables such as the electrode pitch were the same.

【0021】特性評価の指標は到達率とする。到達率と
は、実際の移動距離を、本来移動すべき距離で除して割
合表示したものである。指令通りの距離を移動子が移動
した場合は、到達率100%となる。逆に、移動子が全
く動作しなかった場合は到達率0%となる。上述した両
固定子を40℃90%の高湿度環境下に2日間放置した
後の到達率を計測すると、従来の固定子では全く動作し
なくなったのに対し、本実施の形態の固定子1では、9
9〜100%の到達率が得られ、搬送特性の経時変化が
著しく改善された。
The index of the characteristic evaluation is the arrival rate. The arrival rate is obtained by dividing an actual moving distance by a distance to be originally moved and displaying the ratio. When the moving element moves the distance as instructed, the arrival rate is 100%. Conversely, when the moving element does not operate at all, the arrival rate is 0%. When the above-mentioned stators were left standing for two days in a high-humidity environment of 40 ° C. and 90%, the arrival rate was measured. Then, 9
The arrival rate of 9 to 100% was obtained, and the change with time of the transport characteristics was remarkably improved.

【0022】次に、高湿度環境下における搬送特性を評
価した。その結果、従来の固定子では絶対水分量が0.
015〜0.020(25℃の相対湿度で75〜98%
に相当)に達した時点で、到達率が0〜20%となった
のに対し、本実施の形態の固定子1では、絶対水分量が
0.053(約45℃80%に相当)の条件下でも、到
達率は98〜100%が得られた。
Next, the transport characteristics in a high humidity environment were evaluated. As a result, the conventional stator has an absolute water content of 0.
015-0.020 (75-98% at 25 ° C. relative humidity)
At the time when the water content reaches 0% to 20%, whereas the stator 1 of the present embodiment has an absolute water content of 0.053 (corresponding to about 45 ° C. and 80%). Even under the conditions, a reaching rate of 98 to 100% was obtained.

【0023】静電気力を利用した媒体搬送装置では、水
分の影響を受けやすいが、本実施の形態のように、吸湿
性が低く、撥水性の高い樹脂材料で固定子1を構成する
ことにより、搬送特性の経時変化が非常に少なく、環境
湿度の影響を受けにくい媒体搬送装置が得られる。ま
た、固定子1上の帯状電極12は、隣合う電極間でコン
デンサを形成しているため、印加電圧パターンを切り換
える度に、瞬間的な大電流が流れる。ただし、この大電
流が流れる時間は非常に短く、定常的には電極間の抵抗
値が極めて高いため、ほとんど電流を消費しない。よっ
て、静電気力を利用した媒体搬送装置は、印加電圧パタ
ーンが変化した場合に限って電流を消費すると言えるた
め、印加電圧パターンの切り換えが頻繁に行われる程、
消費電力が大きくなる。印加電圧パターンの切り換え速
度は駆動周波数ω[Hz]として表せる。また、消費電
流は固定子1のインピーダンスZによって左右される。
インピーダンスZは周波数ωの関数であり、「電気抵
抗」と類似した使い方をされる。オームの法則I=V/
Z(ω)により、印加電圧Vが一定の場合、消費電流I
はインピーダンスZ(ω)に逆比例する。この電流は固
定子1上で電位差があって隣合う帯状電極12間に流れ
る。図3は隣合う帯状電極12Aと12Bを例に取った
コンデンサモデルを示す説明図で、電極間の抵抗値Rが
著しく大きい場合、隣合う帯状電極12Aと12Bを例
に取って電気回路モデル近似すると図3に示すようにな
る。
The medium transporting device utilizing electrostatic force is easily affected by moisture. However, by forming the stator 1 from a resin material having low hygroscopicity and high water repellency as in the present embodiment, It is possible to obtain a medium transfer device in which the change in transfer characteristics with time is very small and is less affected by environmental humidity. Further, since the strip-shaped electrode 12 on the stator 1 forms a capacitor between adjacent electrodes, a large instantaneous current flows every time the applied voltage pattern is switched. However, the time during which the large current flows is extremely short, and the resistance between the electrodes is extremely high constantly, so that almost no current is consumed. Therefore, it can be said that the medium conveyance device using the electrostatic force consumes the current only when the applied voltage pattern changes, so that the more frequently the applied voltage pattern is switched,
Power consumption increases. The switching speed of the applied voltage pattern can be expressed as a drive frequency ω [Hz]. Further, the current consumption depends on the impedance Z of the stator 1.
The impedance Z is a function of the frequency ω and is used in a manner similar to “electrical resistance”. Ohm's law I = V /
When the applied voltage V is constant due to Z (ω), the current consumption I
Is inversely proportional to the impedance Z (ω). This current flows between adjacent strip-shaped electrodes 12 due to a potential difference on the stator 1. FIG. 3 is an explanatory view showing a capacitor model taking adjacent strip electrodes 12A and 12B as an example. When the resistance value R between the electrodes is extremely large, an electric circuit model approximation is taken taking neighboring strip electrodes 12A and 12B as an example. Then, the result is as shown in FIG.

【0024】コンデンサ容量Cは、電極面積S、電極間
距離d、固定子比誘電率ε、真空の誘電率ε0 を用いて
以下の(1)式で表される。
The capacitance C of the capacitor is expressed by the following equation (1) using the electrode area S, the inter-electrode distance d, the relative permittivity of the stator ε, and the permittivity of vacuum ε 0 .

【0025】[0025]

【数1】C=ε0 εS/d・・・(1) また、インピーダンスZ(ω)は以下の(2)式で表さ
れる。
C = ε 0 εS / d (1) The impedance Z (ω) is expressed by the following equation (2).

【0026】[0026]

【数2】Z(ω)=1/Cω・・・(2) 駆動周波数ωが大きくなるにしたがい、インピーダンス
Z(ω)は低下するため、高周波駆動時には、より多く
の電流を消費する。しかし、コンデンサ容量Cが小さい
程、インピーダンスZは増加するため、上述したオーム
の法則より、消費電流Iが減少する。コンデンサ容量C
は固定子の比誘電率に比例するので、誘電率の小さい材
料を用いて固定子を構成した方が消費電流が低下する。
従来の固定子では、基材に用いたガラスエポキシも絶縁
層に用いたソルダーレジスタも、誘電率は4〜7程度の
範囲が一般的である。これに対して、本実施の形態によ
る固定子1の場合、基材に用いたフッ素樹脂も絶縁層に
用いたフッ素樹脂やシリコン樹脂も、誘電率は2〜4程
度の範囲である。これにより、本実施の形態の固定子1
は、従来の固定子に比べて消費電流も低減することがで
きる。
## EQU2 ## Z (ω) = 1 / Cω (2) The impedance Z (ω) decreases as the driving frequency ω increases, so that more current is consumed during high-frequency driving. However, since the impedance Z increases as the capacitor capacitance C decreases, the current consumption I decreases according to Ohm's law described above. Capacitor capacity C
Is proportional to the relative dielectric constant of the stator, so that the current consumption is reduced when the stator is formed using a material having a small dielectric constant.
In the conventional stator, the dielectric constant of the glass epoxy used for the base material and the solder register used for the insulating layer is generally in the range of about 4 to 7. On the other hand, in the case of the stator 1 according to the present embodiment, the dielectric constant of the fluororesin used for the base material and the fluororesin or silicon resin used for the insulating layer is in the range of about 2 to 4. Thereby, the stator 1 of the present embodiment
Can reduce current consumption as compared with the conventional stator.

【0027】以上説明した実施の形態の媒体搬送装置に
よれば、固定子1の基材11にフッ素樹脂材料を用い、
その表面をフッ素樹脂またはシリコン樹脂でコーティン
グすることによって、搬送特性の経時変化が極めて小さ
く、かつ、高湿度環境下においても搬送安定性が著しく
向上する。そして、本実施の形態の固定子1は、公知の
電子回路基板作成技術を用いて容易に作成でき、特殊な
装置や特殊な技術は必要ないため、技術開発によるコス
ト上昇は全くない。
According to the medium transport device of the embodiment described above, the base material 11 of the stator 1 is made of a fluororesin material,
By coating the surface with a fluorine resin or a silicon resin, the change over time in the transport characteristics is extremely small, and the transport stability is significantly improved even in a high humidity environment. The stator 1 of the present embodiment can be easily manufactured by using a known electronic circuit board manufacturing technology, and requires no special device or special technology, so that there is no increase in cost due to technical development.

【0028】このため、従来のように、特殊なスペーサ
を、高度に制御された重量比率で、高い精度で樹脂内に
分散させ、それを高い均一性を持って固定子にコーティ
ングする必要がなく、また、送風空気圧制御や送風流量
制御といった、複雑な制御ユニットも必要なく、さら
に、位置検出センサや流量センサ等の多数の検出装置も
必要ない。よって、本実施の形態の媒体搬送装置は、搬
送路の長短によらず、コストの上昇は極めて小さく、商
品競争力に影響することは全くない。
For this reason, it is not necessary to disperse a special spacer in a resin at a highly controlled weight ratio and with high precision as in the conventional case, and to coat it on the stator with high uniformity. Also, there is no need for a complicated control unit such as air pressure control or air flow control, and further, a large number of detection devices such as a position detection sensor and a flow sensor are not required. Therefore, the medium conveyance device of the present embodiment has a very small increase in cost regardless of the length of the conveyance path, and does not affect the product competitiveness at all.

【0029】加えて、フッ素樹脂やシリコン樹脂は吸湿
量が極めて低く、防湿特性に優れているため、固定子1
の吸湿による搬送特性への影響を大幅に遅延することが
できる。更に、フッ素樹脂やシリコン樹脂のように誘電
率の低い材料を用いて固定子1を構成することにより、
高周波駆動時における必要電流が減少するため、駆動時
の消費電力が低下する。消費電力の低下によって、使用
する高圧電源の容量を低下させることができ、装置の小
型化が可能となるばかりか、装置コストも低下する。ま
た、同一の消費電力にした場合は、本実施の形態の固定
子1を用いた方が、より高い周波数での駆動が可能とな
る。駆動周波数は搬送速度に比例するので、最高駆動周
波数の上昇によって、最高搬送速度の向上が図れる。
In addition, fluororesins and silicone resins have extremely low moisture absorption and are excellent in moisture-proof properties.
The effect on the transport characteristics due to moisture absorption can be greatly delayed. Further, by configuring the stator 1 using a material having a low dielectric constant such as a fluororesin or a silicon resin,
Since the required current during high-frequency driving is reduced, power consumption during driving is reduced. Due to the reduction in power consumption, the capacity of the high-voltage power supply to be used can be reduced, so that not only the size of the device can be reduced, but also the cost of the device. When the power consumption is the same, the use of the stator 1 of the present embodiment enables driving at a higher frequency. Since the drive frequency is proportional to the transport speed, the maximum transport speed can be improved by increasing the maximum drive frequency.

【0030】なお、本実施の形態では、基板状の直線搬
送装置を例に取って説明したが、フッ素樹脂やシリコン
樹脂は柔軟性が高いため、固定子1をフレキシブル基板
で製作することも可能なので、湾曲部を有する曲線搬送
路を構成することもできる。また、本実施の形態では所
定の抵抗値を持つ移動子2を用いることとしたが、搬送
される媒体3の抵抗値が十分高いものであれば、移動子
を用いず、固定子1上に直接媒体3を乗せて搬送するこ
とも可能である。
In the present embodiment, a substrate-like linear transfer device has been described as an example. However, since the fluororesin and the silicon resin have high flexibility, the stator 1 can be manufactured from a flexible substrate. Therefore, a curved conveyance path having a curved portion can be configured. Further, in the present embodiment, the moving element 2 having a predetermined resistance value is used, but if the resistance value of the medium 3 to be conveyed is sufficiently high, the moving element is not used, and It is also possible to carry the medium 3 directly.

【0031】さらに、移動子2として、固定子1と同様
に内部に電極を有し、この電圧に電圧を印加することに
よって、初期分極状態を作りだす構造であってもよい。
また、絶縁層13は基材11の帯状電極12形成面側だ
けでなく、基材11の全面を覆うように設けてもよく、
この場合、より高い防湿効果が得られる。
Further, the moving element 2 may have a structure in which an electrode is provided inside similarly to the stator 1 and an initial polarization state is created by applying a voltage to this voltage.
Further, the insulating layer 13 may be provided so as to cover not only the side of the base 11 on which the strip-shaped electrode 12 is formed, but also the entire surface of the base 11.
In this case, a higher moisture-proof effect can be obtained.

【0032】[0032]

【発明の効果】以上説明したように、本発明は、静電気
力を利用した媒体搬送装置において、固定子の基材にフ
ッ素樹脂材料を用い、この基材の少なくとも帯状電極形
成面にフッ素樹脂またはシリコン樹脂でコーティングし
た絶縁層を設けることによって、搬送特性の経時変化が
極めて小さく、かつ、高湿度環境下においても高い搬送
安定性をえることができる。
As described above, according to the present invention, in a medium transporting apparatus utilizing electrostatic force, a fluororesin material is used for a base of a stator, and a fluororesin or By providing the insulating layer coated with the silicone resin, a change with time in the transport characteristics is extremely small, and high transport stability can be obtained even in a high humidity environment.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の媒体搬送装置の実施の形態の一例を示
す構成図
FIG. 1 is a configuration diagram illustrating an example of an embodiment of a medium conveyance device according to the present invention.

【図2】移動子の移動原理を示す説明図FIG. 2 is an explanatory view showing a moving principle of a moving element.

【図3】コンデンサモデルを示す説明図FIG. 3 is an explanatory diagram showing a capacitor model.

【符号の説明】[Explanation of symbols]

1 固定子 2 移動子 12 帯状電極 13 絶縁層 DESCRIPTION OF SYMBOLS 1 Stator 2 Moving element 12 Strip electrode 13 Insulating layer

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 絶縁体の基材に複数の帯状電極を平行に
並べて配列し、この帯状電極を覆う絶縁層を設けた固定
子に移動子を乗せ、前記帯状電極への印加電圧極性を決
められたパターンで切り換えることにより、前記固定子
と移動子との間に発生する静電気力を利用して、該移動
子を搬送する媒体搬送装置において、 前記基材をフッ素系樹脂材料で構成するとともに、絶縁
層をフッ素系樹脂材料で構成し、前記絶縁層は、前記帯
状電極が露出しないよう少なくとも基材の帯状電極形成
面を覆うことを特徴とする媒体搬送装置。
1. A plurality of strip-shaped electrodes are arranged in parallel on an insulating base material, a moving element is mounted on a stator provided with an insulating layer covering the strip-shaped electrodes, and a voltage polarity applied to the strip-shaped electrodes is determined. By switching in a given pattern, utilizing a static force generated between the stator and the movable element, in a medium transport apparatus that transports the movable element, the base material is made of a fluororesin material, A medium transport device, wherein the insulating layer is made of a fluorine-based resin material, and the insulating layer covers at least a surface of the base material on which the strip-shaped electrode is formed so that the strip-shaped electrode is not exposed.
【請求項2】 請求項1記載の媒体搬送装置において、 前記絶縁層を、シリコン系樹脂材料で構成したことを特
徴とする媒体搬送装置。
2. The medium transport device according to claim 1, wherein the insulating layer is made of a silicon-based resin material.
【請求項3】 請求項1記載の媒体搬送装置において、 前記基材および絶縁層を構成するフッ素系樹脂材料は、
比誘電率4以下の材料であることを特徴とする媒体搬送
装置。
3. The medium transport device according to claim 1, wherein the fluororesin material forming the base material and the insulating layer comprises:
A medium transport device comprising a material having a relative dielectric constant of 4 or less.
【請求項4】 請求項2記載の媒体搬送装置において、 前記基材を構成するフッ素系樹脂材料および絶縁層を構
成するシリコン系樹脂材料は、比誘電率4以下の材料で
あることを特徴とする媒体搬送装置。
4. The medium transporting device according to claim 2, wherein the fluorine-based resin material forming the base material and the silicon-based resin material forming the insulating layer are materials having a relative dielectric constant of 4 or less. Media transport device.
【請求項5】 請求項1または2記載の媒体搬送装置に
おいて、 基材を構成するフッ素系樹脂材料中にガラス繊維を混入
させることを特徴とする媒体搬送装置。
5. The medium transporting device according to claim 1, wherein glass fibers are mixed into the fluorine-based resin material forming the base material.
【請求項6】 請求項1または2記載の媒体搬送装置に
おいて、 前記移動子として、搬送対象の媒体を使うこととし、固
定子と媒体との間に発生する静電気力を利用して、媒体
を直接搬送することを特徴とする媒体搬送装置。
6. The medium transport device according to claim 1, wherein a medium to be transported is used as the movable element, and the medium is transported by utilizing an electrostatic force generated between the stator and the medium. A medium transport device characterized by direct transport.
JP7374897A 1997-03-26 1997-03-26 Medium carrying device Pending JPH10271850A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7374897A JPH10271850A (en) 1997-03-26 1997-03-26 Medium carrying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7374897A JPH10271850A (en) 1997-03-26 1997-03-26 Medium carrying device

Publications (1)

Publication Number Publication Date
JPH10271850A true JPH10271850A (en) 1998-10-09

Family

ID=13527192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7374897A Pending JPH10271850A (en) 1997-03-26 1997-03-26 Medium carrying device

Country Status (1)

Country Link
JP (1) JPH10271850A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011177008A (en) * 2010-01-28 2011-09-08 Murata Mfg Co Ltd Gas conveying device
US8384267B2 (en) * 2007-09-26 2013-02-26 Sanyo Electric Co., Ltd. Electrostatic generator comprising an electret film
WO2015008559A1 (en) * 2013-07-19 2015-01-22 株式会社村田製作所 Airflow generator
JP2015061509A (en) * 2013-09-19 2015-03-30 パロ・アルト・リサーチ・センター・インコーポレーテッドPalo Alto Research Center Incorporated Method for reduction of stiction while manipulating micro objects on surface
JP2015142901A (en) * 2013-09-19 2015-08-06 パロ・アルト・リサーチ・センター・インコーポレーテッドPalo Alto Research Center Incorporated Direct electrostatic assembly with capacitively coupled electrodes

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8384267B2 (en) * 2007-09-26 2013-02-26 Sanyo Electric Co., Ltd. Electrostatic generator comprising an electret film
JP2011177008A (en) * 2010-01-28 2011-09-08 Murata Mfg Co Ltd Gas conveying device
WO2015008559A1 (en) * 2013-07-19 2015-01-22 株式会社村田製作所 Airflow generator
JP5874863B2 (en) * 2013-07-19 2016-03-02 株式会社村田製作所 Airflow generator
JP2015061509A (en) * 2013-09-19 2015-03-30 パロ・アルト・リサーチ・センター・インコーポレーテッドPalo Alto Research Center Incorporated Method for reduction of stiction while manipulating micro objects on surface
JP2015142901A (en) * 2013-09-19 2015-08-06 パロ・アルト・リサーチ・センター・インコーポレーテッドPalo Alto Research Center Incorporated Direct electrostatic assembly with capacitively coupled electrodes

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