JPH032700A - Device for electron beam irradiation - Google Patents

Abstract

PURPOSE:To enable attaching of a metal foil to a lower surface of a window frame without generating wrinkles of the metal foil even if there is some slackness at setting of the metal foil by forming a hollow part on a surface of the window frame, to which the metal foil is attached. CONSTITUTION:Numerous rectangular hollow parts 2 are formed on a window frame 1 and not-steeply shaped hollow parts 6, arc shaped hollow parts, for example, are formed on a lower surface 5 of a opening 2. Accordingly, when a metal foil is attached to the window frame 1 and an electric beam generating part 10 is vaccumized, the metal foil is sucked to and along the hollow parts of the window frame 1 along with depressurization of an inside of the electric beam generating part 10. In this situation, even if there is a slackness on the metal foil at setting it, a vaccumization of the inside of the electric beam generating part 10 can eliminate the slackness by forming the hollow parts 6 arckedly so as to have a length l along their contacting surfaces, which is calculated from a predetermined equation based on an amount of th slackness generated from a conventional and ordinary setting work of a metal foil, and, consequently, there is no possibility of wrinkle generation on the metal foil.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to an electron beam irradiation device that irradiates a workpiece with a curtain-shaped electron beam.

[Conventional technology]

FIG. 6 is a schematic perspective view of an electron beam irradiation device, FIG. 7 is a schematic partial perspective view of a window frame of a conventional electron beam irradiation device, and FIG. 8 is a schematic sectional view of a window of a conventional electron beam irradiation device. be. In FIGS. 6 to 8, 10 is an electron beam generating section, 20 is an irradiation chamber,
30 is a window section.

The electron beam generator 10 includes, for example, a linear cathode 11 that emits an electron beam, a shield electrode 12, and a grid 13 that controls the emitted electron beam. Further, the inside of the electron beam generating section 10 is kept in a vacuum by a diffusion pump (not shown) or the like.

The irradiation chamber 20 includes a transport port 21 for carrying in the object to be processed A, an outlet 22 for carrying out the object to be processed A, and an irradiation section 23 for irradiating the proboscis A to be processed with an electron beam. Furthermore, when curing a resin paint, for example, oxygen in the air inhibits curing, so the interior of the irradiation chamber 20 is replaced with an inert atmosphere, such as nitrogen gas.

The window portion 30 includes a thin metal foil 31, a window frame 32, and a holding plate 3.
3. A large number of rectangular openings 35 having the same shape are formed in the window frame 32 by the crosspieces 34. Furthermore, a hole 437 for fitting the O-ring 36 is formed on the peripheral edge of the lower surface of the window frame 32. The lower surface of the window frame 32 is formed into a flat shape, and a metal foil 31 is attached to the lower part with a presser holder 33, as shown in FIG. The metal foil 31 is for partitioning the vacuum atmosphere in the electron beam generating unit 10 that generates the electron beam from the irradiation atmosphere (for example, nitrogen gas) in the irradiation chamber 20 that irradiates the object A with the electron beam. However, the electron beam passes through the metal foil 31.

Note that the arrow X indicates the passing direction of the object A passing through the lower part of the window portion 30, and the arrow EB indicates the irradiation direction of the electron beam.

With the above configuration, when irradiating an object to be processed with an electron beam, the inside of the electron beam generating section 10 is brought into a vacuum state in advance. 3
Attach to 2. By the way, in order to attach the metal foil 31 to the window frame 32, first manually fit the rubber OIJ song 6 into the groove 37 of the window frame 32, and then attach the metal foil 31 to the window frame 32.
Press it against the lower surface of the plate 33 from below and attach it with screws or the like. In this way, in the conventional electron beam irradiation device, the metal foil 31 is attached to the window frame 32 via the O-ring 36.
Attach to.

[Problem to be solved by the invention]

However, in the conventional electron beam irradiation device, the metal '431 attached to the lower surface of the window frame 32 is in the form of a thin film, and is likely to loosen when attached to the window frame 32. Also window frame 3
When the inside of the electron beam generating section 10 is evacuated in a state where the metal foil 31 attached to the metal foil 31 is loosened, wrinkles 39 are generated in the metal foil 31 as shown in FIG. This adversely affects the service life of the foil 31. Therefore, in the conventional electron beam irradiation device, the metal foil 31 must be attached to the window frame 32 in a tightly stretched state to prevent wrinkles 39 from forming on the metal foil 31. It was not easy and had the disadvantage of poor work efficiency.

Further, in order to attach the metal foil 31 to the lower surface of the window frame 32 without causing any slack, the metal foil 31 needs to be attached in a sufficiently stretched state. However, the window frame 32 and the presser plate 3
The conventional Q IJ song 6 used to provide airtightness when attaching the metal foil 31 with the 10th
As shown in the figure, the cross section is formed into a circular shape. Even if such a conventional O-ring 36 is fitted into the groove 37 shown in FIG. It is not easy to attach it to the frame 32, and the work efficiency is poor.

The present invention has been made based on the above circumstances, and it is possible to easily attach a metal foil to the lower surface of the window frame to partition the vacuum atmosphere in the electron beam generating section and the irradiation atmosphere in the irradiation chamber, thereby improving work efficiency. It is an object of the present invention to provide an electron beam irradiation device that can improve the performance.

[Means to solve the problem]

A first invention for achieving the above object includes a foil that partitions a vacuum atmosphere in an electron beam generating section and an irradiation atmosphere in an irradiation chamber for irradiating an object to be processed with an electron beam, and a large number of openings. 810; a window frame having a groove formed in the peripheral edge of the surface to which the cylinder is attached; and an O-ring fitted into the groove of the window frame;
An electron beam irradiation device having a window portion including a presser plate for attaching the tube to the window frame via a ring, wherein a concave recess is formed on a surface of the window frame to which the tube is attached. be.

A second invention for achieving the above object includes a foil that partitions a vacuum atmosphere in an electron beam generating section and an irradiation atmosphere in an irradiation chamber for irradiating an object to be processed with an electron beam, and a large number of openings. A window frame having a groove formed in the peripheral edge of the surface to which the cylinder is attached, an O-ring fitted into the groove of the window frame, and the foil being attached to the window frame via the O-ring. In the electron beam irradiation device having a window portion including a holding plate, the cross-sectional shape of the O-ring is formed into a substantially gourd shape.

[Effect]

In the first invention, with the above-described configuration, a concave recess is formed on the surface of the window frame to which the foil is attached, so that when the inside of the electron beam generating section is evacuated, the foil attached to the window frame is removed. is attracted to the window frame, and any slack that occurs in the foil when it is attached is absorbed by the recesses in the window frame.

Therefore, even if the inside of the electron beam generating section is evacuated after the foil is attached to the window frame, the foil will not wrinkle and will be uniformly stretched along the window frame.

The second invention has the above configuration, and the O-ring has a cross section of 1 l.
Since it is formed in a KW shape and at least one bulge can be completely fitted into the groove, the O-ring can be reliably held in the groove of the window frame.

〔Example〕

An embodiment of the first invention will be described below with reference to FIGS. 1 to 3. Fig. 1 is a schematic cross-sectional view showing the structure of a window frame of an electron beam irradiation device according to an embodiment of the present invention, Fig. 2 is a schematic cross-sectional view of the window portion showing the state in which the metal foil is attached, and Fig. 3 is a diagram for explaining the structure of a window frame. In this embodiment and the embodiment of the second invention, the electron beam generating section 10, the irradiation chamber 20, the window section 30, and the metal foil 3I are the same as those in the conventional electron beam irradiation apparatus, so the same reference numerals are given to them. Therefore, detailed explanation thereof will be omitted.

In FIGS. 1 and 2, 1 is a window frame, and the window frame 1 has a number of rectangular openings 2 formed therein, and a groove 4 into which an O-ring 3 is fitted is formed at the periphery of the lower surface of the window frame 1. has been done. As shown in the figure, the lower surface 5 of the opening 2 has a gently concave shape, for example, an arcuate concave part 6 formed therein. Note that the edge 6a of the recess 6 is desirably formed into a curved shape to prevent damage to the metal foil 31.

According to the above configuration, the arc-shaped recess 6 is provided on the lower surface of the window frame 1.
is formed, so when the metal foil 31 is attached to the window frame 1 and the electron beam generating section 10 is evacuated, the electron beam generating section 10
As the internal pressure decreases, the metal foil 31 is drawn along the recess 6 of the window frame 1, as shown in FIG.

By the way, when comparing the window frame 1 of this embodiment in which the recessed portion 6 is formed with the conventional window frame 32 having a flat cross-sectional shape, the increase Δl in the creepage length of the lower surface of the window frame 1 of this embodiment is as follows. , As shown in FIG. 3, the center of the recess 6 is set as A, both ends of the four parts 6 are set as B, and the midpoint between both ends of C1 and C is set as 0, and the distance ji is
If the distance between ilOA is a and the distance between 80 is b, then a is a very small value (a<<1)) relative to b, so the recess 6
The creepage length l can be approximated by the sum of straight line AB and straight line AC. That is, (AB)” = (AO)” +
(BO)"(AB)=(AC), so it can be expressed as ff=2 (AB).

Therefore, g = 2 (AB) = 2 b (a"/b" + 1/4)"", and the increase in creepage length Δl is Δ7! =2 (AB)-(BC) =b (2(a"/b" +1/4) "'
-1).

Therefore, by forming the recess 6 in advance in an arc shape having the creepage length β determined by the above calculation formula based on the slack that occurs in the conventional normal thinning work of the metal foil 31,
Even if the metal foil 31 is loosened when attached, the electron beam generating part 1
When the inside of the tube is evacuated, the slack can be absorbed by the recess 6.

Therefore, the metal foil 31 is free from wrinkles.
1 can be attached to the lower surface of the window frame 1.

The metal foil 31 is made of, for example, titanium foil, so it is possible to stretch the material to some extent. Therefore, even if the metal foil 31 is attached without loosening, the metal N31
No cracks will occur.

According to the above-described embodiment, even if some slack occurs when attaching the metal foil 31, the slack can be absorbed by the recess 6, making it easier to attach the metal foil 31.
It is possible to improve work efficiency.

In the above embodiment, the recess 6 on the lower surface of the window frame 1 is formed to have an arcuate cross-sectional shape, but the recess 6 may have any other shape as long as it has a gentle concave shape. It's okay.

Further, in the above embodiment, a case has been described in which the recess 6 is formed on the entire lower surface of the opening 2 of the window frame 1, but the recess 6 is not limited to this, and is a part of the lower surface of the opening 2. The window frame 1 may have a concave shape, or the entire lower surface of the window frame 1 may have a concave shape.

FIG. 4 is a schematic sectional view of an O-ring fitted into a window frame of an electron beam irradiation device which is an embodiment of the second invention, and FIG.
FIG. 3 is a schematic cross-sectional view of a groove into which a ring is fitted. In Figures 4 and 5, 8 is a rubber 0 whose cross section is shaped like a gourd.
The ring 9 is a groove into which the O-ring 8 is inserted. In this embodiment, detailed explanations of components having the same functions as those in the first embodiment described above will be omitted.

According to this embodiment, since the O-ring 8 has a gourd-shaped cross section, at least the lower bulge 8a of the O-ring 8 can be completely held within the groove 9. This prevents the O-ring 8 from jumping out of the groove 9 during the work of attaching the metal foil 31, thereby improving work efficiency.

Although this embodiment has been described with reference to the O-ring that fits into the groove 9 of the window frame 1, the O-ring is not limited to this, and may be used in any location that requires airtightness. It may be used anywhere, and may be used in general closed containers such as pressure vessels and vacuum vessels.

〔Effect of the invention〕

As explained above, according to the first invention, by forming the concave recess on the lower surface of the window frame, the inside of the electron beam generating part can be evacuated even if some slack occurs when the metal foil is attached. Since the slack in the foil is drawn to the recessed portion, the metal foil can be attached to the lower surface of the window frame without causing wrinkles in the metal foil. Therefore, it is possible to provide an electron beam irradiation device in which the metal foil can be easily attached and work efficiency can be improved.

Further, according to the second invention, by forming the cross-sectional shape of the O-ring into a gourd shape, the O-ring is reliably held in the groove, the metal foil can be easily attached, and work efficiency is improved. It is possible to provide an electron beam irradiation device that can perform

[Brief explanation of drawings]

FIG. 1 is a schematic sectional view showing the structure of a window frame of an electron beam irradiation device that is an embodiment of the present invention, and FIG. 2 is a schematic sectional view of the window part.
FIG. 3 is an explanatory diagram of the window frame structure, FIG. 4 is a schematic cross-sectional view of an O-ring that fits into the groove of the window frame of an electron beam irradiation device according to an embodiment of the second invention, and FIG. 6 is a schematic perspective view of an electron beam irradiation device; FIG. 7 is a schematic partial perspective view of a window frame of a conventional electron beam irradiation device;
FIG. 8 is a schematic cross-sectional view of the window of a conventional electron beam irradiation device, FIG. 9 is a view showing a state in which metal foil is attached to the window frame, FIG. 10 is a cross-sectional view of a conventional O-ring, The figure is a sectional view of a groove formed in a conventional window frame. 713. Presser plate, 8.・・0 ring, 9・・groove, lO・
...Electron beam generating section, 20... Irradiation chamber, 30... Window section, 31... Metal foil. Applicant Iwasaki Electric Co., Ltd. 1...Window frame, 2...Opening, 3...0 ring, 4
...Groove, 5...Bottom surface, 6...Recess, Fig. 1 Fig. 2

Claims (2)

[Claims] (1) A foil that partitions the vacuum atmosphere in the electron beam generating section and the irradiation atmosphere in the irradiation chamber where the electron beam is irradiated onto the workpiece, and a peripheral edge of the surface where a large number of openings are formed and the foil is attached. A window frame with a groove formed therein, and an O fitted into the groove of the window frame.
In an electron beam irradiation device having a window portion including a ring and a presser plate for attaching the foil to the window frame via the O-ring, a concave recess is provided on a surface of the window frame to which the foil is attached. An electron beam irradiation device characterized by forming: (2) A foil that partitions the vacuum atmosphere inside the electron beam generating section and the irradiation atmosphere inside the irradiation chamber where the electron beam is irradiated onto the workpiece, and a peripheral edge of the surface on which a large number of openings are formed and the foil is attached. A window frame with a groove formed therein, and an O fitted into the groove of the window frame.
An electron beam irradiation device having a window portion including a ring and a holding plate for attaching the foil to the window frame via the O-ring, characterized in that the cross-sectional shape of the O-ring is formed into a substantially gourd shape. Electron beam irradiation equipment.