JPH03258381A - Ultrasonic cleaning machine - Google Patents
Ultrasonic cleaning machineInfo
- Publication number
- JPH03258381A JPH03258381A JP5354090A JP5354090A JPH03258381A JP H03258381 A JPH03258381 A JP H03258381A JP 5354090 A JP5354090 A JP 5354090A JP 5354090 A JP5354090 A JP 5354090A JP H03258381 A JPH03258381 A JP H03258381A
- Authority
- JP
- Japan
- Prior art keywords
- medium
- ultrasonic
- cleaning
- cleaned
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004506 ultrasonic cleaning Methods 0.000 title claims abstract description 14
- 238000004140 cleaning Methods 0.000 claims abstract description 28
- 238000007599 discharging Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000005484 gravity Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
この発明は超音波洗浄機、詳しくは洗浄槽を必要としな
い超音波洗浄機に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an ultrasonic cleaning machine, and more particularly to an ultrasonic cleaning machine that does not require a cleaning tank.
(従来の技術)
媒質を介して被洗浄物に超音波を印加し、被洗浄物表面
に付着しているパーティクル(汚物)を剥離させる超音
波洗浄機は、精密部分の製造過程などにおいて広く使用
されている。そして、この従来の超音波洗浄機は媒質を
洗浄槽に溜め、これに超音波を印加する方式をとってい
た。(Prior technology) Ultrasonic cleaning machines apply ultrasonic waves to the object to be cleaned through a medium to remove particles (dirt) attached to the surface of the object to be cleaned, and are widely used in the manufacturing process of precision parts. has been done. This conventional ultrasonic cleaning machine uses a method in which a medium is stored in a cleaning tank and ultrasonic waves are applied to the medium.
(解決すべき課B)
しかしながら、この従来の超音波洗浄機においては、媒
質を溜める洗浄槽の形状、容量や媒質の密度(比重)等
により超音波性能が左右され、その設計や調整が極めて
むずかしかった。又、洗浄槽には媒質を満さなければな
らない為、媒質の使用量が多くなることは避けられず、
−旦剥離したパーティクルの再付着の問題もあった。こ
の発明は超音波洗浄機の上記欠点を除去することを目的
とするものであり、洗浄槽を必要とせずに超音波洗浄を
行うことができ、パーティクルの再付着の心配もない新
規な超音波洗浄機を提供せんとするものである。(Problem to be solved B) However, in this conventional ultrasonic cleaning machine, the ultrasonic performance is affected by the shape and capacity of the cleaning tank that stores the medium, the density (specific gravity) of the medium, etc., and its design and adjustment are extremely difficult. It was difficult. Also, since the cleaning tank must be filled with medium, it is inevitable that the amount of medium used will increase.
- There was also the problem of re-adhesion of particles that had been peeled off. The purpose of this invention is to eliminate the above-mentioned drawbacks of ultrasonic cleaning machines, and it is possible to perform ultrasonic cleaning without the need for a cleaning tank, and there is no need to worry about particles re-adhering. The aim is to provide washing machines.
(課題を解決する為の手段)
この発明は、被洗浄物の洗浄面とわずかな空隙を保って
位置せしめられた超音波振動体と、前記超音波振動体の
近傍に配置せしめられた媒質供給管とからなり、前記媒
質供給管から媒質を放出し、超音波振動体の振動面と被
洗浄物の洗浄面との間に媒質の層を形成せしめ、この層
を介して被洗浄物に超音波振動を印加せしめる様にして
超音波洗浄機を構成することにより上記課題を解決せん
とするものである。(Means for Solving the Problems) The present invention includes an ultrasonic vibrating body positioned with a slight gap between the cleaning surface of an object to be cleaned, and a medium supply disposed near the ultrasonic vibrating body. The medium is discharged from the medium supply pipe to form a layer of the medium between the vibration surface of the ultrasonic vibrator and the cleaning surface of the object to be cleaned, and the ultrasonic wave is applied to the object to be cleaned through this layer. The above-mentioned problem is attempted to be solved by configuring an ultrasonic cleaner to apply sonic vibrations.
(作用)
媒質供給管から水、溶剤等の媒質が放出されると、該媒
質は被洗浄物の洗浄面と超音波振動体の振動面との間に
層を形成する。そして、この層を介して超音波振動体の
超音波振動が被洗浄物に印加され、超音波による洗浄が
行われる。媒質供給管は超音波振動体の移動に追従して
移動する様になっており、超音波振動体と洗浄面との間
には常に媒質の層が形成されている。従って、超音波振
動体を移動させながら連続的に洗浄作業を行うことが可
能である。又、洗浄面に対する超音波振動気泡抜きの問
題等を解消することができる。(Function) When a medium such as water or a solvent is discharged from the medium supply pipe, the medium forms a layer between the cleaning surface of the object to be cleaned and the vibration surface of the ultrasonic vibrator. Then, ultrasonic vibrations from the ultrasonic vibrator are applied to the object to be cleaned through this layer, and ultrasonic cleaning is performed. The medium supply pipe is configured to move following the movement of the ultrasonic vibrator, and a layer of medium is always formed between the ultrasonic vibrator and the cleaning surface. Therefore, it is possible to perform cleaning work continuously while moving the ultrasonic vibrator. Further, the problem of removing air bubbles from ultrasonic vibrations on the cleaning surface can be solved.
(実施例)
第1図はこの発明に係る超音波洗浄機の一実施例の断面
図である。図中1は板状をした超音波振動体であり、そ
の下面は振動面2となっている。(Embodiment) FIG. 1 is a sectional view of an embodiment of an ultrasonic cleaning machine according to the present invention. In the figure, reference numeral 1 denotes a plate-shaped ultrasonic vibrator, the lower surface of which serves as a vibrating surface 2.
又、3は媒質供給管でありこの媒質供給管3にはノズル
4が設けられており、振動面2に向って媒質5を噴出し
、振動面2と被洗浄物6の洗浄面7との間に媒質の層5
を形成する様になっている。Reference numeral 3 denotes a medium supply pipe, and this medium supply pipe 3 is provided with a nozzle 4, which spouts a medium 5 toward the vibrating surface 2, thereby causing a collision between the vibrating surface 2 and the cleaning surface 7 of the object 6 to be cleaned. A layer of medium between 5
It seems to form.
媒質5としては、市水、純水、アルコール、溶剤等を用
いることができる。As the medium 5, city water, pure water, alcohol, solvent, etc. can be used.
なお、図中8は洗浄面7に付着しているパーティクルを
表わす。振動面2より洗浄面7に印加する超音波振動の
周波数は洗浄すべきパーティクルの種類によって相違す
るが、大官28 Hz乃至6.8MHz程度である。又
、振動面2は同図に示す通り、洗浄面7に対し、所定の
角度θを持たせておしたパーティクルの停滞の防止、洗
浄むらの解消、の防止、洗浄むらの解消、超音波により
発生する気泡の除去等を図っている。この角度θは0度
乃至数10度の間で各種条件及び用途により決定される
。なお、図中9は媒質の流失止めの為振動面2の端縁に
設けたスカートである。Note that 8 in the figure represents particles attached to the cleaning surface 7. The frequency of the ultrasonic vibration applied from the vibrating surface 2 to the cleaning surface 7 varies depending on the type of particles to be cleaned, but is approximately 28 Hz to 6.8 MHz. In addition, as shown in the figure, the vibration surface 2 is set at a predetermined angle θ with respect to the cleaning surface 7 to prevent particle stagnation, eliminate uneven cleaning, eliminate uneven cleaning, and use ultrasonic waves. Efforts are being made to remove the air bubbles that occur. This angle θ is determined between 0 degrees and several tens of degrees depending on various conditions and uses. Note that 9 in the figure is a skirt provided at the edge of the vibrating surface 2 to prevent the medium from flowing out.
この実施例においては媒質供給管3のノズル4は一つで
あるが、第2図及び第3図に示す実施例の様に複数のノ
ズル4を設けても良く、この場合には広い面積の洗浄を
効率よく行うことができる。In this embodiment, the medium supply pipe 3 has one nozzle 4, but a plurality of nozzles 4 may be provided as in the embodiment shown in FIGS. 2 and 3. In this case, a large area Cleaning can be performed efficiently.
又、第4図及び第5図に示す実施例の様に小面積の振動
面2′を用いれば小面積の部分的な精密洗浄も可能とな
る。Furthermore, if a vibrating surface 2' with a small area is used as in the embodiment shown in FIGS. 4 and 5, precision cleaning of a small area is also possible.
(発明の効果)
この発明は上記の通りの構成を有するものであり、洗浄
槽を必要としない為、洗浄槽の形状、容量、媒質の密度
(比重)等により印加する超音波の性能が左右されるこ
となく、常に安定した超音波洗浄が可能となる。又、使
用する媒質の量も著しく少くてすみ、経済的である。更
に、超音波振動体の振動面と被洗浄物の洗浄面との間の
距離が短く超音波出力が小さくてすむ。(Effects of the Invention) This invention has the above configuration and does not require a cleaning tank, so the performance of the applied ultrasonic waves depends on the shape and capacity of the cleaning tank, the density (specific gravity) of the medium, etc. This enables stable ultrasonic cleaning at all times. In addition, the amount of medium used is extremely small, making it economical. Furthermore, the distance between the vibrating surface of the ultrasonic vibrator and the cleaning surface of the object to be cleaned is short, so that the ultrasonic output can be small.
又、媒質は媒質供給管よりたえず流出しているので、−
旦剥離したパーティクルが被洗浄物に再付着することも
ない。等のすぐれた効果を有し、極めて実用的なもので
ある。Also, since the medium is constantly flowing out from the medium supply pipe, -
Particles that have been peeled off will not re-adhere to the object to be cleaned. It has excellent effects such as, and is extremely practical.
第1図はこの発明に係る超音波洗浄機の一実施例の断面
図、第2図は他の実施例の斜視図、第3図はその断面図
である。又、第4図及び第5図は更に他の実施例の斜視
図である。
1・・・超音波振動体、2・・・振動面、3・・・媒質
供給管、4・・・ノズル、5・・・媒質、6・・・被洗
浄物、7・・・洗浄面、8・・・パーティクル、9・・
・スカート。
第3図
第4図
第5図FIG. 1 is a sectional view of one embodiment of an ultrasonic cleaner according to the present invention, FIG. 2 is a perspective view of another embodiment, and FIG. 3 is a sectional view thereof. Moreover, FIGS. 4 and 5 are perspective views of still other embodiments. DESCRIPTION OF SYMBOLS 1... Ultrasonic vibrator, 2... Vibration surface, 3... Medium supply pipe, 4... Nozzle, 5... Medium, 6... Object to be cleaned, 7... Cleaning surface , 8... particles, 9...
·skirt. Figure 3 Figure 4 Figure 5
Claims (1)
れた超音波振動体と、前記超音波振動体の近傍に配置せ
しめられた媒質供給管とからなり、前記媒質供給管から
媒質を放出し、超音波振動体の振動面と被洗浄物の洗浄
面との間に媒質の層を形成せしめ、この層を介して被洗
浄物に超音波振動を印加せしめる様にしたことを特徴と
する超音波洗浄機。It consists of an ultrasonic vibrator positioned with a slight gap from the cleaning surface of the object to be cleaned, and a medium supply pipe placed near the ultrasonic vibrator, and a medium is discharged from the medium supply pipe. A layer of a medium is formed between the vibrating surface of the ultrasonic vibrating body and the cleaning surface of the object to be cleaned, and ultrasonic vibrations are applied to the object to be cleaned through this layer. Ultrasonic cleaning machine.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5354090A JPH03258381A (en) | 1990-03-07 | 1990-03-07 | Ultrasonic cleaning machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5354090A JPH03258381A (en) | 1990-03-07 | 1990-03-07 | Ultrasonic cleaning machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03258381A true JPH03258381A (en) | 1991-11-18 |
Family
ID=12945637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5354090A Pending JPH03258381A (en) | 1990-03-07 | 1990-03-07 | Ultrasonic cleaning machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03258381A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7334588B2 (en) | 2000-06-26 | 2008-02-26 | Applied Materials, Inc. | Method and apparatus for wafer cleaning |
US7451774B2 (en) | 2000-06-26 | 2008-11-18 | Applied Materials, Inc. | Method and apparatus for wafer cleaning |
KR20190113878A (en) | 2017-10-25 | 2019-10-08 | 가부시끼가이샤가이죠 | Ultrasonic Cleaning Device and Ultrasonic Cleaning System |
-
1990
- 1990-03-07 JP JP5354090A patent/JPH03258381A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7334588B2 (en) | 2000-06-26 | 2008-02-26 | Applied Materials, Inc. | Method and apparatus for wafer cleaning |
US7451774B2 (en) | 2000-06-26 | 2008-11-18 | Applied Materials, Inc. | Method and apparatus for wafer cleaning |
US7819985B2 (en) | 2000-06-26 | 2010-10-26 | Applied Materials, Inc. | Method and apparatus for wafer cleaning |
US7836901B2 (en) | 2000-06-26 | 2010-11-23 | Applied Materials, Inc. | Method and apparatus for wafer cleaning |
KR20190113878A (en) | 2017-10-25 | 2019-10-08 | 가부시끼가이샤가이죠 | Ultrasonic Cleaning Device and Ultrasonic Cleaning System |
US11618060B2 (en) | 2017-10-25 | 2023-04-04 | Kaijo Corporation | Ultrasonic cleaning apparatus and ultrasonic cleaning system |
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