JPH02122072U - - Google Patents
Info
- Publication number
- JPH02122072U JPH02122072U JP3076589U JP3076589U JPH02122072U JP H02122072 U JPH02122072 U JP H02122072U JP 3076589 U JP3076589 U JP 3076589U JP 3076589 U JP3076589 U JP 3076589U JP H02122072 U JPH02122072 U JP H02122072U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- growth apparatus
- thermocouple
- holding jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 239000002994 raw material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図は従来装置を示す断面図である。 １……反応室、２……加熱炉、３，４……成長
室、５，６……原料ソース、７，８……原料ガス
導入管、９……基板保持治具、９ａ……熱電対挿
入用穴、１０……基板、１１……モータ、１２…
…熱電対、１３……比較回路。
図は従来装置を示す断面図である。 １……反応室、２……加熱炉、３，４……成長
室、５，６……原料ソース、７，８……原料ガス
導入管、９……基板保持治具、９ａ……熱電対挿
入用穴、１０……基板、１１……モータ、１２…
…熱電対、１３……比較回路。
Claims (1)
- 複数の成長室を有する気相成長装置において、
基板保持治具に、基板温度を測定する熱電対を装
備したことを特徴とする気相成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3076589U JPH02122072U (ja) | 1989-03-17 | 1989-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3076589U JPH02122072U (ja) | 1989-03-17 | 1989-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122072U true JPH02122072U (ja) | 1990-10-04 |
Family
ID=31256119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3076589U Pending JPH02122072U (ja) | 1989-03-17 | 1989-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122072U (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS582294A (ja) * | 1981-06-29 | 1983-01-07 | Fujitsu Ltd | 気相成長方法 |
-
1989
- 1989-03-17 JP JP3076589U patent/JPH02122072U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS582294A (ja) * | 1981-06-29 | 1983-01-07 | Fujitsu Ltd | 気相成長方法 |