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JPH01257202A - Displacement detection - Google Patents

Displacement detection

Info

Publication number
JPH01257202A
JPH01257202A JP8621188A JP8621188A JPH01257202A JP H01257202 A JPH01257202 A JP H01257202A JP 8621188 A JP8621188 A JP 8621188A JP 8621188 A JP8621188 A JP 8621188A JP H01257202 A JPH01257202 A JP H01257202A
Authority
JP
Japan
Prior art keywords
displacement
magnetic
magnetic field
detected
change pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8621188A
Other languages
Japanese (ja)
Inventor
Shinji Kato
真司 加藤
Kimihiro Takase
高瀬 公宥
Muneya Takagi
高木 宗谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP8621188A priority Critical patent/JPH01257202A/en
Publication of JPH01257202A publication Critical patent/JPH01257202A/en
Pending legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To determine a displacement of an object desired to detect a displacement, by bringing a magnetic detection means close or into contact with a magnetic material on the object being detected to detect a magnetic field change pattern formed on the magnetic material. CONSTITUTION:A magnetic reading unit 14a of a detector 14 for detecting a displacement of work 11 is brought close or into contact with the surface 12a of a magnetic material 12 on the work 11 to detect a magnetic change pattern of the surface 12a with Hall elements of the unit 14a. The magnetic change pattern detected is picked up as electrical signal with a signal processing/output device 4c while being converted into digital from analog and a displacement of the work 11 is detected as a change pattern of a magnetic flux density. Then, a waveform processing is performed thereby enabling determination of the displacement of the work 11 at a high accuracy.

Description

【発明の詳細な説明】 産業上の利用分野 この発明は、ワーク等の位置や変位を高V4度に検出す
る方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to a method for detecting the position or displacement of a workpiece or the like at a high V4 degree.

従来の技術 車輪速度センサやクランク角センサなど自動車の走行状
態のうち機械的変位量を磁気的に検出する方法として、
例えば、従来の車輪速度センサにおいては、第5図に示
すように車輪と一体に回転するハブロータ1の外周に形
成された凹凸歯2を、コイル3とコア4と永久磁石5と
を備えたピックアップコイル6で検出する方法が一般的
に行なわれている。
Conventional technology Wheel speed sensors, crank angle sensors, and other methods of magnetically detecting mechanical displacement in the driving state of a vehicle,
For example, in a conventional wheel speed sensor, as shown in FIG. A method of detection using a coil 6 is generally used.

発明が解決しようとする課題 しかし、前記した従来の車輪速度センサの場合には、セ
ンサで検出を行なうハブロータを別体に取付けるため、
取付はスペースが必要となるとともに、ピックアップコ
イルで磁束密度の動的変化から位置検出を行なうため、
低速時には磁束の変化が小さいため位置検出が困難とな
り、また停止時には磁束が変化しないため位置検出が不
可能であった。また、ハブロータの外周に形成された凹
凸歯の間隔が3〜10闇程度と大きいため、検出の分解
能が低いという問題点があった。
Problems to be Solved by the Invention However, in the case of the conventional wheel speed sensor described above, since the hub rotor that is detected by the sensor is attached separately,
Installation requires space, and the position is detected from dynamic changes in magnetic flux density using a pickup coil.
At low speeds, the change in magnetic flux is small, making it difficult to detect the position, and when stopped, the magnetic flux does not change, making position detection impossible. Furthermore, since the spacing between the uneven teeth formed on the outer periphery of the hub rotor is as large as about 3 to 10 mm, there is a problem in that the detection resolution is low.

この光明は上記した技術的背景の下になされたもので、
検出誤差が少なく、低速時および停止時の位置検出も容
易な変位検出方法の提供を目的としている。
This enlightenment was made against the above-mentioned technical background.
The object of the present invention is to provide a displacement detection method that has little detection error and can easily detect positions at low speeds and when stopped.

課題を解決するための手段 上記課題を解決するための手段としてこの光明の変位検
出方法は、磁界強度が周囲と異なる微小面積の複数のス
ポットをほぼ直線状に並べてなる複数の列を、変位検出
対象物の変位方向に対して交差する方向に並列に配列す
るとともに、各列における前記スポットの配列パターン
を異ならせることにより、変位検出対象物上に磁界変化
パターン群を予め形成しておき、ホール素子列、磁気抵
抗素子列あるいはピックアップコイル等の磁気検出手段
によって、前記変位検出対象物上に形成された磁界変化
パターンの検出を行い、検出した磁界変化パターンを電
気信号に変換して変位検出対象物の変位を求めることを
特徴としている。
Means to Solve the Problem As a means to solve the above problem, Komei's displacement detection method detects the displacement of a plurality of rows in which a plurality of spots each having a small area with a different magnetic field strength than the surrounding area are arranged in a nearly straight line. By arranging the spots in parallel in a direction crossing the displacement direction of the object and by making the arrangement pattern of the spots different in each row, a group of magnetic field change patterns is formed in advance on the displacement detection object, and the holes are A magnetic field change pattern formed on the displacement detection object is detected by a magnetic detection means such as an element array, a magnetoresistive element array, or a pickup coil, and the detected magnetic field change pattern is converted into an electric signal to detect the displacement detection object. It is characterized by finding the displacement of an object.

作   用 上記の方法によれば、移動中または停止中の変位検出対
象物上の磁性体材料に、ホール素子列。
Effect According to the above method, a Hall element array is attached to the magnetic material on the object whose displacement is to be detected while it is moving or stopped.

磁気抵抗素子列あるいはピックアップコイル等の磁気検
出手段を接近または接触させ、磁性体材料に形成された
磁界変化パターンの検出を行ない、検出した磁界変化パ
ターンを磁界の強弱により電気信号に変換して変位検出
対象物の変位置を求める。
A magnetic detection means such as a magnetoresistive element array or a pickup coil is brought close to or in contact with each other to detect the magnetic field change pattern formed in the magnetic material, and the detected magnetic field change pattern is converted into an electric signal depending on the strength of the magnetic field and displacement is detected. Find the displacement position of the object to be detected.

実施例 以下、この発明の方法の実施例を第1図ないし第4図に
基づいて説明する。
EXAMPLE Hereinafter, an example of the method of the present invention will be explained based on FIGS. 1 to 4.

第1図ないし第3図は第1実施例を示すもので、平板状
で鋼製のワーク11の上面には、Fe−A I −N 
1−Co系合金等の磁性体材料12が、例えばCO2レ
ーザ光にて肉盛り溶接しかつその表面12aを平滑な平
面に研削加工しである。
1 to 3 show a first embodiment, in which the upper surface of a flat steel workpiece 11 is made of Fe-A I-N.
A magnetic material 12 such as a 1-Co alloy is overlay-welded using, for example, a CO2 laser beam, and its surface 12a is ground into a smooth plane.

そして、前記磁性体材料12は表面磁界が均一となるよ
うに磁性体材料12全体を磁化した後、その表面12a
に集光させたCO2レーザ光あるいはYAGレーザ光等
を照射し、照射したその部分をギュリー温度以上に加熱
することにより局部的に消磁して、周囲(第1図におい
て斜線を付した部分)と異なる磁界強度に処理した微小
面積の消磁部分13が形成されており、前記磁性体材料
12の表面12aには、同様にして周囲と異なる磁界強
度に形成された微小面積の消磁部分13が、ワーク11
の移動方向(第1図において矢印方向)に対して直角方
向に並び、しかも、それぞれ異なる配列パターンで複数
列に形成されている。
Then, after magnetizing the entire magnetic material 12 so that the surface magnetic field becomes uniform, the surface 12a of the magnetic material 12 is magnetized.
By irradiating the irradiated area with CO2 laser light or YAG laser light, etc. focused on the area, the irradiated area is locally demagnetized by heating it above the Gurie temperature, and the surrounding area (the shaded area in Figure 1) is A demagnetized portion 13 of a minute area treated to have a different magnetic field strength is formed on the surface 12a of the magnetic material 12, and a demagnetized portion 13 of a minute area treated to have a different magnetic field strength from the surrounding area is formed on the surface 12a of the magnetic material 12. 11
They are arranged in a direction perpendicular to the direction of movement (the direction of the arrow in FIG. 1), and are formed in a plurality of rows with different arrangement patterns.

一方、この変位検出方法においてワーク11の変位検出
を行なう検出器14は、5@のホール素子を一列に並べ
た磁気読取りユニット14aと、この磁気読取りユニッ
ト14aの前記各ホール素子からのリード線14bを接
続した信号処理・出力装@14Cとを備えており、前記
磁気読取りユニット14aは、ワーク11の移動方向の
変位を、サンプリングを除いた残り4ビツトの分解能で
読取るようになっている。
On the other hand, the detector 14 that detects the displacement of the workpiece 11 in this displacement detection method includes a magnetic reading unit 14a in which 5@ Hall elements are arranged in a row, and a lead wire 14b from each Hall element of the magnetic reading unit 14a. The magnetic reading unit 14a is configured to read the displacement of the workpiece 11 in the moving direction with a resolution of 4 bits remaining after sampling.

そして、ワーク11の変位検出を行なう場合には、検出
器14の磁気読取りユニット14aを、ワーク11上の
磁性体材料12の表面12aに接近または接触させて、
磁気読取りユニット14aの各ホール素子によって、前
記表面12aに形成された磁界変化パターンを検出させ
る。
When detecting the displacement of the workpiece 11, the magnetic reading unit 14a of the detector 14 is brought close to or in contact with the surface 12a of the magnetic material 12 on the workpiece 11,
The magnetic field change pattern formed on the surface 12a is detected by each Hall element of the magnetic reading unit 14a.

検出された磁界変化パターンは、信号処理・出力装置1
4cにより電気信号として取り出されるとともにA/D
変換されて、例えば、前記微小面積の消磁部分13の部
分を信号レベル1に、また消磁されていないその他の部
分を信号レベルO(または逆に消磁部分13を信号レベ
ル0とし、その他の部分を信号レベル1)として、第2
図に示すように、ワーク11の変位を磁束密度の変化パ
ターンとして検出するとともに、第3図に示づように波
形処理して、前記ワーク11の変位置を高精度に求める
ことができる。
The detected magnetic field change pattern is processed by the signal processing/output device 1.
4c as an electrical signal and A/D
For example, the demagnetized portion 13 of the minute area is converted to a signal level of 1, and the other portions that are not demagnetized are converted to a signal level of O (or conversely, the demagnetized portion 13 is set to a signal level of 0, and the other portions are converted to a signal level of 0. As the signal level 1), the second
As shown in the figure, the displacement of the workpiece 11 is detected as a change pattern of magnetic flux density, and the waveform processing is performed as shown in FIG. 3, so that the displacement position of the workpiece 11 can be determined with high precision.

したがって、この第1実施例の変位検出方法においては
、磁気検出手段として複数のホール素子を直線状に配列
した磁気読取りユニット14aを備えているので、移動
中のワーク11の他に、低速時あるいは停止中において
も変位を検出することができる。
Therefore, in the displacement detection method of the first embodiment, since the magnetic reading unit 14a in which a plurality of Hall elements are linearly arranged is provided as the magnetic detection means, it is possible to detect the Displacement can be detected even when stopped.

また、この実施例においては、磁性体材料12をレーザ
ー光を用いて肉盛り形成したが、板状の磁性体材料を溶
接、接着または蒸着等により設けることもできる。
Further, in this embodiment, the magnetic material 12 was built up using a laser beam, but a plate-shaped magnetic material may also be provided by welding, adhesion, vapor deposition, or the like.

また、第4図は第2実施例を示すもので、前記第1実施
例で使用した検出器14を使用して行なう方法である。
FIG. 4 shows a second embodiment, which is a method using the detector 14 used in the first embodiment.

平板状で5[のワーク21の上面には、Fe−Al−H
l−Co系合金等の磁性体材料22がCO2レーザ光に
て肉盛り溶接し、その表面22aは研削加工して平滑に
仕上げられている。
On the top surface of the flat workpiece 21, Fe-Al-H
A magnetic material 22 such as an l-Co alloy is overlay-welded using a CO2 laser beam, and its surface 22a is polished to a smooth finish.

そして、前記磁性体材料22は、その表面22aに磁化
用電磁コイル等を接近させて局部的に磁界を与えられる
と同時に、表面22aに集光させたCO2レーザ光ある
いはYAGレーザ光等を、前記磁界を与えられた部分に
照射し、磁界が与えられているその部分を磁気変態点近
くまで、あるいはそれ以上高温に加熱する。磁界が与え
られた部分が磁気変態点近くまで、あるいはそれ以上高
温に加熱されると、磁性体材料22中の磁区は、熱振動
により方向を変え易くなる結果、レーザ光照射によって
加熱された部分のみが局部的に磁化されて、周囲と異な
る磁界強度で微小面積の磁化部分23が形成される。そ
して、前記磁性体材料22の表面22aには、同様にし
て周囲と異なる11界強度に形成された微小面積の磁化
部分23が、ワーク21の移動方向(第2図において矢
印方向)に対して直角方向に並ぶとともに、前記第1実
施例のにおける磁性体材料12の表面12aに形成され
た消石部分13と同様の配列パターンで複数列に形成さ
れている。そして、第1実施例の場合と同様に、検出器
14の磁気読取りユニット14aを、ワーク21上の磁
性体材料22の表面22aに接近または接触させて、磁
気読取りユニット14aの各ホール素子が前記表面22
aに形成された磁界変化パターンを検出し、信号処理・
出力装置14cにより電気信号として取り出されるとと
もにA/D変換されて、例えば、前記微小面積の磁化部
分23の部分を信号レベル1に、また磁化されていない
その他の部分を@号しベルO(または逆に磁化部分23
を信号レベルOとし、その他の部分を信号レベル1)と
して検出するようにすれば、第1実施例の場合と同様に
、移動中および低速時、停止時におけるワーク21の変
位を高精度に検出することができる。
Then, the magnetic material 22 is locally applied with a magnetic field by bringing a magnetizing electromagnetic coil or the like close to its surface 22a, and at the same time, the CO2 laser beam, YAG laser beam, etc. focused on the surface 22a is applied to the magnetic material 22. A magnetic field is applied to a given area and the area is heated to a high temperature close to or even higher than the magnetic transformation point. When the part to which the magnetic field is applied is heated to a high temperature close to the magnetic transformation point or higher, the magnetic domains in the magnetic material 22 tend to change direction due to thermal vibration, and as a result, the part heated by the laser beam irradiation Only the magnetic field is locally magnetized, and a magnetized portion 23 with a minute area is formed with a magnetic field strength different from that of the surrounding area. Then, on the surface 22a of the magnetic material 22, a magnetized portion 23 of a minute area, which is similarly formed to have a field strength of 11 different from the surrounding area, is formed in the direction of movement of the workpiece 21 (in the direction of the arrow in FIG. 2). They are arranged in a plurality of rows in the same arrangement pattern as the stone eraser portions 13 formed on the surface 12a of the magnetic material 12 in the first embodiment. Then, as in the case of the first embodiment, the magnetic reading unit 14a of the detector 14 is brought close to or in contact with the surface 22a of the magnetic material 22 on the workpiece 21, and each Hall element of the magnetic reading unit 14a is surface 22
Detects the magnetic field change pattern formed in a, and performs signal processing and
The output device 14c outputs an electrical signal and A/D converts it, so that, for example, the small-area magnetized portion 23 is set to signal level 1, and the other non-magnetized portions are set to signal level 1 and signaled by a bell O (or On the contrary, the magnetized part 23
If the signal level is O and the other parts are detected as signal level 1), the displacement of the workpiece 21 during movement, at low speed, and at rest can be detected with high accuracy, as in the case of the first embodiment. can do.

なお、前記吊実施例においては、平板状のワーク11.
21の変位検出を行なう場合について説明したが、クラ
ンク軸の表面に磁性体材料を肉盛り形成するとともに磁
界変化パターンを形成すれば、クランク角の変位検出を
同様にして行うことができる。
In addition, in the above-mentioned hanging embodiment, the flat workpiece 11.
Although the case where the displacement detection of 21 is performed has been described, if a magnetic material is built up on the surface of the crankshaft and a magnetic field change pattern is formed, the displacement of the crank angle can be detected in the same way.

また、ワーク等の表面に磁界変化パターンを形成する他
の方法としては、例えば、磁気フィルム片や磁性体ゴム
片等を異なる配列パターンに貼着して形成する方法等も
ある。
Further, as another method for forming a magnetic field change pattern on the surface of a workpiece, etc., there is a method in which, for example, magnetic film pieces, magnetic rubber pieces, etc. are adhered in different arrangement patterns.

発明の詳細 な説明したようにこの発明の変位検出方法は、磁界強度
が周囲と異なる微小面積の複数のスポットをほぼ直線状
に並べてなる複数の列を、変位検出対染物の変位方向に
対して交差する方向に並列に配列するとともに、各列に
おける前記スポットの配列パターンを異ならせることに
より、変位検出対象物上に磁界変化パターン群を予め形
成しておき、ホール素子列、磁気抵抗素子列あるいはピ
ックアップコイル等の磁気検出手段によって、前記変位
検出対象物上に形成された磁界変化パターンの検出を行
い、検出した磁界変化パターンを電気信号に変換して変
位検出対象物の変位を求めるので、変位検出対象物の変
位を直接検出することができるため、検出器側の歯車噛
合部等の機械的伝達部を無くすことにより、バックラッ
シュ等に起因する計測誤差を減少させて、高精度の変位
検出が可能となる。また、磁気検出手段としてホール素
子あるいは磁気抵抗素子を用いれば、低速時および停止
時の変位検出対象物の変位を検出することができる等の
効果を有する。
As described in detail, the displacement detection method of the present invention detects a plurality of rows in which a plurality of spots each having a small area having a magnetic field strength different from the surrounding area are arranged in a substantially straight line, with respect to the direction of displacement of the dye to be detected. By arranging the spots in parallel in intersecting directions and making the arrangement pattern of the spots different in each row, a group of magnetic field change patterns is formed in advance on the object to be detected for displacement. The magnetic field change pattern formed on the displacement detection object is detected by a magnetic detection means such as a pickup coil, and the detected magnetic field change pattern is converted into an electric signal to determine the displacement of the displacement detection object. Since the displacement of the object to be detected can be directly detected, by eliminating mechanical transmission parts such as gear meshing parts on the detector side, measurement errors caused by backlash etc. can be reduced, allowing for highly accurate displacement detection. becomes possible. Further, if a Hall element or a magnetoresistive element is used as the magnetic detection means, it is possible to detect the displacement of the displacement detection object at low speed and at a stop.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図ないし第3伽は、本光明の方法の第1実施例を示
すもので、第1図は変位検出を行なっている状態を示す
斜視図、第2図は磁束密度の変化債を電気信号に変換し
て出力したグラフ、第3図は第2図に現される磁束密度
の変化量を波形処理したグラフ、第4図は第2実施例の
変位検出を行なっている状態を示す斜視図、第5図は従
来例を示す説明図である。 11.21・・・ワーク、 12.22・・・磁性体材
料、 12a、22a・・・表面、 13・・・消磁部
分、14・・・検出器、 14a・・・磁気読取りユニ
ット、23・・・磁化部分1゜ 出願人  トヨタ自動車株式会社 代理人  弁理士  豊 1)武久 (ほか1名) 第1区 4c 14c   第4図 第2図 第3図 衰づ1 第5図
Figures 1 to 3 show the first embodiment of the method of this Komei. Figure 1 is a perspective view showing a state in which displacement is being detected, and Figure 2 is a perspective view showing a state in which displacement is being detected. A graph converted into a signal and output, Fig. 3 is a graph obtained by waveform processing of the amount of change in magnetic flux density shown in Fig. 2, and Fig. 4 is a perspective view showing the state in which displacement detection is performed in the second embodiment. FIG. 5 is an explanatory diagram showing a conventional example. 11.21... Workpiece, 12.22... Magnetic material, 12a, 22a... Surface, 13... Demagnetizing portion, 14... Detector, 14a... Magnetic reading unit, 23... ... Magnetized portion 1゜ Applicant Toyota Motor Corporation Agent Patent Attorney Yutaka 1) Takehisa (and 1 other person) Section 1 4c 14c Figure 4 Figure 2 Figure 3 Attenuation 1 Figure 5

Claims (1)

【特許請求の範囲】[Claims] 磁界強度が周囲と異なる微小面積の複数のスポットをほ
ぼ直線状に並べてなる複数の列を、変位検出対象物の変
位方向に対して交差する方向に並列に配列するとともに
、各列における前記スポットの配列パターンを異ならせ
ることにより、変位検出対象物上に磁界変化パターン群
を予め形成しておき、ホール素子列、磁気抵抗素子列あ
るいはピックアップコイル等の磁気検出手段によつて、
前記変位検出対象物上に形成された磁界変化パターンの
検出を行い、検出した磁界変化パターンを電気信号に変
換して変位検出対象物の変位を求めることを特徴とする
変位検出方法。
A plurality of rows in which a plurality of spots with a small area of magnetic field strength different from the surroundings are arranged in a substantially straight line are arranged in parallel in a direction intersecting the displacement direction of the displacement detection target, and the spots in each row are By making the arrangement patterns different, a group of magnetic field change patterns is formed in advance on the displacement detection target object, and by magnetic detection means such as a Hall element array, a magnetoresistive element array, or a pickup coil,
A displacement detection method, comprising detecting a magnetic field change pattern formed on the displacement detection object, converting the detected magnetic field change pattern into an electric signal, and determining the displacement of the displacement detection object.
JP8621188A 1988-04-07 1988-04-07 Displacement detection Pending JPH01257202A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8621188A JPH01257202A (en) 1988-04-07 1988-04-07 Displacement detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8621188A JPH01257202A (en) 1988-04-07 1988-04-07 Displacement detection

Publications (1)

Publication Number Publication Date
JPH01257202A true JPH01257202A (en) 1989-10-13

Family

ID=13880446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8621188A Pending JPH01257202A (en) 1988-04-07 1988-04-07 Displacement detection

Country Status (1)

Country Link
JP (1) JPH01257202A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5314036A (en) * 1991-01-21 1994-05-24 Toyota Jidosha Kabushiki Kaisha Steering angle sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5314036A (en) * 1991-01-21 1994-05-24 Toyota Jidosha Kabushiki Kaisha Steering angle sensor

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