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JPH01144209A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH01144209A
JPH01144209A JP30156387A JP30156387A JPH01144209A JP H01144209 A JPH01144209 A JP H01144209A JP 30156387 A JP30156387 A JP 30156387A JP 30156387 A JP30156387 A JP 30156387A JP H01144209 A JPH01144209 A JP H01144209A
Authority
JP
Japan
Prior art keywords
elements
group
magnetic
nonmagnetic
alloy layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30156387A
Other languages
Japanese (ja)
Other versions
JP2650282B2 (en
Inventor
Noriaki Yamagata
山形 紀明
Toru Nagaoka
徹 長岡
Nobuyuki Yoshino
信行 吉野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP62301563A priority Critical patent/JP2650282B2/en
Publication of JPH01144209A publication Critical patent/JPH01144209A/en
Application granted granted Critical
Publication of JP2650282B2 publication Critical patent/JP2650282B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To enhance both the coercive force and squareness ratio of the title medium and to decrease medium noises by providing a nonmagnetic alloy layer contg. specific 1st group elements and 2nd group elements on the surface of a nonmagnetic substrate and providing a magnetic Co alloy layer and protective layer successively on the surface thereof. CONSTITUTION:The nonmagnetic alloy layer contg. >=one kinds of the elements selected from Cr and W and >=one kinds of the elements selected from the group IVa elements and group Va elements and Mo of the periodic table is provided on the surface of the nonmagnetic substrate and the magnetic Co alloy layer and the protective layer are successively provided on the surface thereof. The compounding ratio of the 1st group elements and the 2nd group elements is preferably 99-85atom.%:1-15atom.%. The finer crystal grains of the nonmagnetic alloy are formed and the finer crystal grains of the magnetic Co alloy layer to be provided thereon are formed by providing the nonmagnetic alloy layer contg. the 1st group elements and the 2nd group elements on the surface of the nonmagnetic substrate. The magnetic film having the high coercive force and high squareness ratio is obtd. and the medium noises are greatly decreased.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明はコンぎエータ用外部記憶装置および画像記憶装
田などに用いられる磁気記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a magnetic recording medium used in an external storage device for a converter, an image storage device, and the like.

〈従来の技術〉 近年、コンピュータの小型化に伴い外部記憶装置に用い
られる磁気記録媒体はより−」の高記録密度が要求され
ている。
<Prior Art> In recent years, with the miniaturization of computers, magnetic recording media used in external storage devices are required to have even higher recording densities.

そのためには磁気記録媒体の?’J膜化、高保磁力化お
二び高喪留価束密度化が必要である。
What about magnetic recording media? 'J film, high coercive force, and high flux density are required.

これらの条件を満たす(み気記録媒体としてCO合金系
磁性薄膜が住目され、めっき法もしくはスパッタ法に工
っで実用化されている。スパッタ法はめつき法に比べて
合金組成を自由に遇択出来るため耐蝕性が良好でかつ保
磁力のコントロールがしやすい等の特徴がある。
A CO alloy-based magnetic thin film that satisfies these conditions has been used as a recording medium and has been put into practical use by plating or sputtering. Compared to plating, sputtering allows the alloy composition to be controlled more freely. It has features such as good corrosion resistance and easy control of coercive force.

スパッタ法co合金系磁性媒体は一般に非磁性基体の表
面に非磁性金属層を設け、その上にCO磁性合金層を設
け、更に保鰻膜としてカーボン層が設けられている。
A sputtered CO alloy magnetic medium generally has a nonmagnetic metal layer provided on the surface of a nonmagnetic substrate, a CO magnetic alloy layer thereon, and a carbon layer as a protective film.

非磁性金属層の材料としてはCrヲ用いるもの(%開田
61−120!130号公報および特開昭61−255
428号公報)、Moを用いるもの(特開昭61−24
6928号公報)お工びCr。
Cr is used as the material of the non-magnetic metal layer (%Kaida 61-120!130 and Japanese Patent Laid-Open No. 61-255).
428 Publication), one using Mo (Japanese Unexamined Patent Publication No. 61-24
6928 Publication) Work Cr.

Moもしくはwy&:用いるもの(特開昭61−204
830号公報)が知られている。
Mo or wy&: what is used (JP-A-61-204
No. 830) is known.

こ\で保磁力を高める定めには一役に非磁性金属、’F
j k厚くすること、もしくは真空チャンバー槽でスパ
ッタするときのAr圧力?高くすること等の手段がなさ
れている。
In order to increase the coercive force, non-magnetic metal, 'F
j k Thickening or Ar pressure when sputtering in a vacuum chamber? Measures are being taken to raise the price.

〈発明が解決I7ようとする問題点〉 しかしながら、保磁力′に高める沈めに非磁性金属層を
厚くすることは生産性が著しく低下しコスト商になる。
<Problems to be Solved by the Invention I7> However, increasing the thickness of the nonmagnetic metal layer in order to increase the coercive force results in a significant decrease in productivity and cost.

捷た、スパッタ時のAr圧力を高くすることにLっても
ある程度保磁力を高められるがAr圧力を高くすると角
形比が小さくなる等の欠点がある。
Although the coercive force can be increased to some extent by increasing the Ar pressure during sputtering and sputtering, there are drawbacks such as a decrease in the squareness ratio when the Ar pressure is increased.

また、これらの手段によって保磁力をある程度は高めら
れるが、その値は100008以下である。また優れた
高密度記録特性金得る磁気記録媒体は得られていないC
また、@記の:つな非磁性金属層の材料では、結晶粒が
大きいためにその上に設ける磁性膜の結晶粒も大きく々
夛磁気特性が改善できない。本発明は保磁力および角形
比がともに高く、かつ媒体ノイズが低い磁気記録媒体全
提供すること全目的とする。
Further, although the coercive force can be increased to some extent by these means, the value is 100,008 or less. Furthermore, no magnetic recording medium with excellent high-density recording properties has been obtained.
Further, in the case of the material of the non-magnetic metal layer described in @, the crystal grains are large, and the crystal grains of the magnetic film provided thereon are also large, making it impossible to improve the magnetic properties. It is an object of the present invention to provide a magnetic recording medium which has both high coercive force and squareness ratio and low medium noise.

く問題を解決するための手段〉 本発明らは前記問題を解決する友めに鋭意検討を行なつ
加結果、非磁性基体の表面に下記のWL1群元素と第2
群元素とを含む非母性合金層を設けることにより非磁性
合金の結晶粒が微細化しその上に設けられるCOζG准
漠の結晶粒が微細化され、このことによシCam性膜の
特性が大巾に向上出来ること、すなわち保磁力が高くか
つ角形比が高い磁性膜が得られること、tた磁性膜の結
晶粒の微細化によシ媒体ノイズが大巾に低減でき、高記
碌密度に適する磁気記録媒体となることを見出した。
Means for Solving the Problems〉 The present inventors have conducted intensive studies to solve the above problems, and as a result, we have added the following WL1 group elements and the second
By providing a non-maternal alloy layer containing group elements, the crystal grains of the non-magnetic alloy are made finer, and the crystal grains of the COζG desert provided thereon are made finer. In other words, it is possible to obtain a magnetic film with a high coercive force and a high squareness ratio, and by making the crystal grains of the magnetic film finer, media noise can be greatly reduced, resulting in a high recording density. It has been found that this material can be used as a suitable magnetic recording medium.

すなわち、本発明は非磁性基体の表面に下記の第1群元
素と第2群元素とを含む非磁性合金層を設け、その表面
にCo磁性合金層と保9層を順に設けた磁気記録媒体。
That is, the present invention provides a magnetic recording medium in which a nonmagnetic alloy layer containing the following first group element and second group element is provided on the surface of a nonmagnetic substrate, and a Co magnetic alloy layer and a magnetic layer are sequentially provided on the surface of the nonmagnetic alloy layer. .

第1群元素・・・Crお工びWから選ばれ九1種以上の
元素。
Group 1 elements: 91 or more elements selected from Cr-work W.

第2群元素・・・周期律表IVa族元素、■a族元素お
工びMoから選ばれた1九以上の 元素である。
Group 2 elements: 19 or more elements selected from Group IVa elements of the periodic table and Group A elements and Mo.

本発明において、非磁性基体とはアルミニウム合金、樹
脂、セラミックスなどを円盤に加工し表面を研摩したも
のである。アルミニウム合金など表面が比較重傷がつき
やすい基体の場合はその表面にNi −P無電解めっき
を施すなどして表面を硬くすることが好ましい。
In the present invention, the nonmagnetic substrate is a disk made of aluminum alloy, resin, ceramics, etc., and the surface thereof is polished. In the case of a substrate such as an aluminum alloy whose surface is relatively susceptible to serious injury, it is preferable to harden the surface by applying Ni--P electroless plating to the surface.

本発明で用いる第1群元素はCrお工びWから選ばれ几
1種以上の元素である。また、第2群元素は周期律表I
Va族元素、■a族元素およびMoから選ばれ九1種以
上の元素である。周期律表1Va族元素とはTi、Zr
またはHf″t′ある。また、周期律表Va族元累とは
V、NbまたはTaである。
The first group element used in the present invention is one or more elements selected from Cr and W. In addition, the elements of Group 2 are I of the periodic table.
They are 91 or more elements selected from Va group elements, a group elements, and Mo. Group 1 Va elements of the periodic table are Ti, Zr
or Hf″t′. Also, the Va group elements of the periodic table are V, Nb, or Ta.

第1群元素と第2群元素との配合割合は好ましくは99
〜85原子チ:1〜15原子係である。
The blending ratio of the first group element and the second group element is preferably 99
~85 atoms: 1 to 15 atoms.

なお、必要に応じ、上記非磁性合金の成分として上記以
外の金属を加えてもよいが、非磁性合金中の第1群元素
の配合量と第2群元素の配合量の合計は少なくとも94
原子チ以上であることが好ましい。これ以下の量では非
磁性合金の結晶粒が微細化されず、磁性Co合金の特性
が改善されない。配合方法はこれらの元素を合金として
用いるエリも、むしろ第1群元素からなるターゲツト板
上に第2群元素からなるターゲット小片を載せる方が簡
便であり、配合比率の調整が容易にできる。
If necessary, metals other than the above may be added as components of the non-magnetic alloy, but the total amount of the first group element and the second group element in the non-magnetic alloy should be at least 94.
It is preferable that the number of atoms is 1 or more. If the amount is less than this, the crystal grains of the non-magnetic alloy will not be refined and the properties of the magnetic Co alloy will not be improved. Although the blending method uses these elements as an alloy, it is simpler to place a target piece made of the second group element on a target plate made of the first group element, and the blending ratio can be easily adjusted.

これら非磁性合金層を設けるにはスパッタリング法、イ
オンブレーティング法ま友は蒸着法によるが、これらの
方法のうちスパッタリング法かによる方法が最も好まし
い。非磁性合金層の表面にC01i磁性層を設け、その
表面に係挿層を設ける。
These non-magnetic alloy layers can be formed by sputtering or ion-blating, but among these methods, sputtering is the most preferred. A C01i magnetic layer is provided on the surface of the nonmagnetic alloy layer, and an intercalating layer is provided on the surface.

保護層の材料はカーボンが好ましい。必要に薦薦 応じ保膿膜の表面に液体潤滑剤金塗布しても工い。The material for the protective layer is preferably carbon. Recommended if necessary Depending on the situation, a liquid lubricant gold may be applied to the surface of the purulent membrane.

〈実施例〉 以下、本発明を具体的実施例1〜14お工び比較例1.
2にニジ詳細に説明する。第1図は実施例の磁気記録媒
体の断面図である。
<Example> Hereinafter, specific examples 1 to 14 of the present invention and comparative example 1.
2 will be explained in detail. FIG. 1 is a sectional view of the magnetic recording medium of the example.

非磁性基体は直径95朋、厚さ1−25izのアルミニ
ウム合金円盤1に厚さ20μmのNi −P無電解めつ
き屓2を設けtのち鏡面研摩しtものを用い友。
The nonmagnetic substrate was an aluminum alloy disk 1 with a diameter of 95 mm and a thickness of 1 to 25 mm, on which a Ni--P electroless plating layer 2 with a thickness of 20 μm was provided and then mirror-polished.

実施例1〜14の場合、非磁性合金層は表1.2に示す
通り、第1群元素と第2群元素からなるものである。第
1群元素と第2群元素の配合割合は原子比で9:1にし
友。第1群元素からなる円板上に第2群元素からなるチ
ップを栽せたものをターゲットとした。比較例1.2の
場合には表1.2に示す通り第2群元素を用いなかつ窺
In the case of Examples 1 to 14, the nonmagnetic alloy layer was composed of a first group element and a second group element, as shown in Table 1.2. The mixing ratio of Group 1 elements and Group 2 elements is 9:1 in atomic ratio. The target was a disk made of group 1 elements on which chips made of group 2 elements were grown. In the case of Comparative Example 1.2, the second group element was not used as shown in Table 1.2.

I’)Cマグネトロにスパッタリング装置によυ基体上
に厚さ1500′Aの非磁性合金層3を設けもスパッタ
リング時の雰囲気はアルビン圧力10771Torr 
、ターゲット印加電力5 W / cm”であつmoつ
ぎにCo Ni Cr合金(Co 62.5原子)、N
160原子係お工びCr 7.5原子チ)全ターゲット
として上記と同じスパッタリングの条件で50OAの厚
さのCo侮注性合金層4設けた。このようにして得られ
九出気記録媒体の磁気特性をまとめて表1に示す。比較
例は第2群元素のチップ全戦せないで炸裂しkものであ
り、表1から明らかな工うに本笑施例1〜14による磁
気記録媒体は保磁力がとくに高く、かつ角形比も概して
高いことがわかる。
I') A non-magnetic alloy layer 3 with a thickness of 1500'A was provided on the υ substrate using a sputtering device in C Magnetro, but the atmosphere during sputtering was at an Albin pressure of 10771 Torr.
, target applied power 5 W/cm” and then Co Ni Cr alloy (Co 62.5 atoms), N
160 atoms, processed Cr, 7.5 atoms) A Co injectable alloy layer 4 with a thickness of 50 OA was provided as a total target under the same sputtering conditions as above. Table 1 summarizes the magnetic properties of the thus obtained 90-degree recording medium. In the comparative example, the chip of the second group element exploded without being completely destroyed, and as is clear from Table 1, the magnetic recording media according to Examples 1 to 14 had a particularly high coercive force and a low squareness ratio. It can be seen that it is generally high.

つぎにスバリング装置にエリ、これら磁気記録媒体に厚
さ600Aのカーボン保僧層5全形成し、ついでフッ素
系の液体潤滑剤6をスピンコード法により厚さ30Aで
塗布した。得られ九磁気記録媒体の記録再生特性を評価
し几。これらの結果を表2にまとめて示す。なお、上記
各実施例および比較例における磁気特性はVSMテスタ
ー(振動式%式%) 圧計で測定し丸。
Next, a carbon retainer layer 5 with a thickness of 600 Å was completely formed on these magnetic recording media using a swarming device, and then a fluorine-based liquid lubricant 6 was applied to a thickness of 30 Å by a spin cord method. The recording and reproducing characteristics of the nine magnetic recording media obtained were evaluated. These results are summarized in Table 2. The magnetic properties in each of the above Examples and Comparative Examples were measured using a VSM tester (vibration type % type) pressure gauge.

〈発明の効果〉 以上の実施例で明らかな工うに本発明は非磁性合金層と
して第1群元素と第2群元素とを含むも角 のを用いることに工す保缶力がとくに高く、かつ翫形比
も概して高い磁性膜が得られ、ま九媒体ノイズも大巾に
低減出来る。よって本発明の磁気記録媒体は高記録密度
に通ずる。
<Effects of the Invention> As is clear from the above embodiments, the present invention has a particularly high durability due to the use of a square layer containing a first group element and a second group element as a nonmagnetic alloy layer. In addition, a magnetic film with a generally high rod shape ratio can be obtained, and media noise can also be greatly reduced. Therefore, the magnetic recording medium of the present invention leads to high recording density.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は実施例の磁気記録媒体の断面図である。 符号 1・・・アルミニウム合金円盤、2・・・N1−
P無電解めっき層、3・・・非磁性合金層、4・・・C
oi性合金合金層・・・カーボン保護層、6・・・液体
潤滑剤。 特許出願人 電気化学工業株式会社
FIG. 1 is a sectional view of the magnetic recording medium of the example. Code 1...Aluminum alloy disk, 2...N1-
P electroless plating layer, 3... nonmagnetic alloy layer, 4... C
Oi alloy layer...Carbon protective layer, 6...Liquid lubricant. Patent applicant Denki Kagaku Kogyo Co., Ltd.

Claims (1)

【特許請求の範囲】 非磁性基体の表面に下記の第1群元素と第2群元素とを
含む非磁性合金層を設け、その表面にCo磁性合金層と
保護層を順に設けた磁気記録媒体。 第1群元素・・・CrおよびWから選ばれた1種以上の
元素。 第2群元素・・・周期律表IVa族元素、Va族元素およ
びMoから選ばれた1種以上の 元素。
[Claims] A magnetic recording medium in which a nonmagnetic alloy layer containing the following first group element and second group element is provided on the surface of a nonmagnetic substrate, and a Co magnetic alloy layer and a protective layer are sequentially provided on the surface of the nonmagnetic alloy layer. . Group 1 element: one or more elements selected from Cr and W. Group 2 element: one or more elements selected from group IVa elements, group Va elements, and Mo of the periodic table.
JP62301563A 1987-12-01 1987-12-01 Magnetic recording media Expired - Lifetime JP2650282B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62301563A JP2650282B2 (en) 1987-12-01 1987-12-01 Magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62301563A JP2650282B2 (en) 1987-12-01 1987-12-01 Magnetic recording media

Publications (2)

Publication Number Publication Date
JPH01144209A true JPH01144209A (en) 1989-06-06
JP2650282B2 JP2650282B2 (en) 1997-09-03

Family

ID=17898446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62301563A Expired - Lifetime JP2650282B2 (en) 1987-12-01 1987-12-01 Magnetic recording media

Country Status (1)

Country Link
JP (1) JP2650282B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG104286A1 (en) * 2000-11-29 2004-06-21 Fuji Electric Co Ltd Magnetic recording medium and manufacturing process thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6623873B1 (en) 1998-11-20 2003-09-23 Hitachi, Ltd. Magnetic recording medium and magnetic disk apparatus using the same

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61267923A (en) * 1985-05-21 1986-11-27 Nec Corp Magnetic storage body
JPS62129933A (en) * 1985-12-02 1987-06-12 Victor Co Of Japan Ltd Magnetic recording medium
JPS62129934A (en) * 1985-12-02 1987-06-12 Victor Co Of Japan Ltd Magnetic recording medium
JPS62154216A (en) * 1985-12-26 1987-07-09 Victor Co Of Japan Ltd Magnetic recording medium
JPS62195339A (en) * 1986-02-21 1987-08-28 Kotaro Ogura Conversion of methane into methanol at ordinary temperature
JPS62204177A (en) * 1986-03-04 1987-09-08 Nec Corp Pulse compressing radar transmitter and receiver
JPS62257618A (en) * 1986-04-29 1987-11-10 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション Magnetic recording medium
JPH01232522A (en) * 1987-08-06 1989-09-18 Sumitomo Metal Mining Co Ltd Magnetic disk

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61267923A (en) * 1985-05-21 1986-11-27 Nec Corp Magnetic storage body
JPS62129933A (en) * 1985-12-02 1987-06-12 Victor Co Of Japan Ltd Magnetic recording medium
JPS62129934A (en) * 1985-12-02 1987-06-12 Victor Co Of Japan Ltd Magnetic recording medium
JPS62154216A (en) * 1985-12-26 1987-07-09 Victor Co Of Japan Ltd Magnetic recording medium
JPS62195339A (en) * 1986-02-21 1987-08-28 Kotaro Ogura Conversion of methane into methanol at ordinary temperature
JPS62204177A (en) * 1986-03-04 1987-09-08 Nec Corp Pulse compressing radar transmitter and receiver
JPS62257618A (en) * 1986-04-29 1987-11-10 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション Magnetic recording medium
JPH01232522A (en) * 1987-08-06 1989-09-18 Sumitomo Metal Mining Co Ltd Magnetic disk

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG104286A1 (en) * 2000-11-29 2004-06-21 Fuji Electric Co Ltd Magnetic recording medium and manufacturing process thereof

Also Published As

Publication number Publication date
JP2650282B2 (en) 1997-09-03

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