JPS62177721A - Magnetic recording body - Google Patents
Magnetic recording bodyInfo
- Publication number
- JPS62177721A JPS62177721A JP2067086A JP2067086A JPS62177721A JP S62177721 A JPS62177721 A JP S62177721A JP 2067086 A JP2067086 A JP 2067086A JP 2067086 A JP2067086 A JP 2067086A JP S62177721 A JPS62177721 A JP S62177721A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- alloy
- film
- layer
- recording body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000531 Co alloy Inorganic materials 0.000 claims abstract description 14
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 12
- 239000000956 alloy Substances 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 5
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 3
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 3
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 3
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 3
- 229910052802 copper Inorganic materials 0.000 claims abstract 2
- 229910052749 magnesium Inorganic materials 0.000 claims abstract 2
- 229910052748 manganese Inorganic materials 0.000 claims abstract 2
- 229910052759 nickel Inorganic materials 0.000 claims abstract 2
- 229910052710 silicon Inorganic materials 0.000 claims abstract 2
- 239000010936 titanium Substances 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 3
- 239000011651 chromium Substances 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- 239000011777 magnesium Substances 0.000 claims 2
- 239000011572 manganese Substances 0.000 claims 2
- 239000010955 niobium Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910000838 Al alloy Inorganic materials 0.000 abstract description 3
- 238000005336 cracking Methods 0.000 abstract 2
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 23
- 238000000034 method Methods 0.000 description 5
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 4
- 239000010952 cobalt-chrome Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 229910000599 Cr alloy Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910020632 Co Mn Inorganic materials 0.000 description 1
- 229910020678 Co—Mn Inorganic materials 0.000 description 1
- 229910020516 Co—V Inorganic materials 0.000 description 1
- 229910020515 Co—W Inorganic materials 0.000 description 1
- 229910019580 Cr Zr Inorganic materials 0.000 description 1
- 229910019817 Cr—Zr Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- FPVKHBSQESCIEP-JQCXWYLXSA-N pentostatin Chemical compound C1[C@H](O)[C@@H](CO)O[C@H]1N1C(N=CNC[C@H]2O)=C2N=C1 FPVKHBSQESCIEP-JQCXWYLXSA-N 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、垂直磁気記録体に関するものであり、コバル
ト合金垂直磁気記録膜の垂直配向性を向上させかつカー
ルやクラックの発生を抑制させ製造マージンを改善させ
た磁気記録体を提供するものである。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a perpendicular magnetic recording body, and it is possible to improve the perpendicular alignment of a cobalt alloy perpendicular magnetic recording film and suppress the occurrence of curls and cracks. The present invention provides a magnetic recording medium with improved margin.
（従来の技術）
従来の長手（面内）磁化を用いる磁気記録方式にかわり
近年原理的に高密度記録の可能な方式として垂直磁化を
用いる磁気記録方式が提案されている。(Prior Art) In place of the conventional magnetic recording method using longitudinal (in-plane) magnetization, a magnetic recording method using perpendicular magnetization has been proposed in recent years as a method capable of high-density recording in principle.
ここで用いられる垂直異方性磁性膜としては、スパッタ
及び蒸着で作製したＣｏ−Ｃｒ合金膜に代表されるコバ
ルト合金膜が代表的である。また記録感度と再生出力を
増大させる方法として、基板とコバルト合金垂直磁化膜
との間に軟磁性居を設けることが試みられている。The perpendicularly anisotropic magnetic film used here is typically a cobalt alloy film typified by a Co--Cr alloy film produced by sputtering and vapor deposition. Furthermore, as a method of increasing recording sensitivity and reproduction output, attempts have been made to provide a soft magnetic layer between the substrate and the perpendicularly magnetized cobalt alloy film.
（発明が解決しようとする問題点）
しかしながら、可焼性を有するフレキシブル磁気ディス
クや磁気テープ等に適用し実用化するにはいくつかの問
題点があった。すなわち、スパッタ法及び蒸着法で形成
した磁性膜は、大きな内部応力、主として引張り応力を
生し又有機高分子基板との熱膨張率や伸長度が異なるた
めカールやクラックが発生することがあった。(Problems to be Solved by the Invention) However, there are several problems in applying the method to flammable flexible magnetic disks, magnetic tapes, etc. and putting it into practical use. In other words, magnetic films formed by sputtering and vapor deposition generate large internal stress, mainly tensile stress, and curls and cracks may occur due to the difference in thermal expansion coefficient and degree of elongation from the organic polymer substrate. .
また、一般に長尺のフィルムに磁性薄膜を形成する際に
フィルムを回転するキャンに沿わせて連続成膜するが、
この際にスパッタ法においてはマスクとキャンの隙間か
らのスパッタ粒子が回り込み垂直配向性を劣化させるこ
とがある。さらに前記の軟磁性膜としてパーマロイ（Ｎ
ｉＦｅ）を用いた場合、パーマロイの結晶性の影響を受
けて垂直配向性が劣化するためチタン（Ｔｉ）薄膜を下
地層として用いることが提案されている。Generally, when forming a magnetic thin film on a long film, the film is continuously formed along a rotating can.
At this time, in the sputtering method, sputtered particles from the gap between the mask and the can may wrap around and deteriorate the vertical alignment. Furthermore, as the soft magnetic film, permalloy (N
When using Permalloy (iFe), the vertical alignment deteriorates due to the influence of the crystallinity of permalloy, so it has been proposed to use a titanium (Ti) thin film as the underlayer.
本発明はかかる現状の問題点を解決した製造マージン及
び高垂直配向性を有する高性能な磁気記録体を提供する
ことを目的としたものである。It is an object of the present invention to provide a high-performance magnetic recording medium having a manufacturing margin and high vertical alignment that solves the current problems.
（問題点を解決するための手段）
すなわち本発明は基板上に下地層とコバルト合金垂直磁
気記録体膜が形成されている磁気記録体において該コバ
ルト合金垂直磁気記録膜に接する下地層としてアルミニ
ウム合金層が形成されていることを特徴とする磁気記録
体である。ところで、本発明で基板としてポリエチレン
テレフタンート、ポリイミド及びその他の耐熱性フィル
ムがあり、リジット磁気ディスクとしてリジットの基板
を用いてもよい。コバルト合金垂直磁気記録体としてＣ
ｏ−Ｃｒ、 Ｃｏ−Ｗ、 Ｃｏ−Ｍｎ、 Ｃｏ−Ｖ、
Ｃｏ−Ｃｒ−Ｔａ、 Ｃｏ−Ｃｒ−Ｎｂ、 Ｃｏ−Ｃｒ
−Ｍｏ、 Ｃｏ−Ｃｒ−Ｚｒ、 Ｃｏ−Ｃｒ−Ｔｉなと
のコバルト合金がある。(Means for Solving the Problems) That is, the present invention provides an aluminum alloy as a base layer in contact with a cobalt alloy perpendicular magnetic recording film in a magnetic recording body in which a base layer and a cobalt alloy perpendicular magnetic recording film are formed on a substrate. This is a magnetic recording body characterized in that a layer is formed. Incidentally, in the present invention, polyethylene terephthanate, polyimide, and other heat-resistant films are used as the substrate, and a rigid substrate may be used as the rigid magnetic disk. C as a cobalt alloy perpendicular magnetic recording medium
o-Cr, Co-W, Co-Mn, Co-V,
Co-Cr-Ta, Co-Cr-Nb, Co-Cr
There are cobalt alloys such as -Mo, Co-Cr-Zr, and Co-Cr-Ti.
（作用）
本発明によるアルミニウムと他の金属の合金の下地層を
設けることにより、コバルト合金垂直磁気記録媒体の垂
直配向を向上させることができる。またこれらの下地層
は延性を有しそれ自体ベースフィルムを補強しコバルト
合金垂直磁気記録媒体のクラックやカールの発生を抑制
させ製造マージンを向上させることが出来る。また耐食
性を向上させる金属を添加することによりアルミニウム
合金の耐食性は向上する。(Function) By providing the underlayer of the alloy of aluminum and other metals according to the present invention, the perpendicular alignment of the cobalt alloy perpendicular magnetic recording medium can be improved. Furthermore, these underlayers have ductility and can themselves reinforce the base film, suppress the occurrence of cracks and curls in the cobalt alloy perpendicular magnetic recording medium, and improve the manufacturing margin. Furthermore, the corrosion resistance of aluminum alloys can be improved by adding metals that improve corrosion resistance.
（実施例）
以下に実施例を述べる。実施例に用いた基板は５０ｐｍ
厚さのポリイミドのフィルムを用い、以下衣に示す試料
を作製した。試料Ｎｏ、１〜１２は本発明に係る実施例
であり、試料Ａ、Ｂは下地層を有しない比較例である。(Example) Examples will be described below. The substrate used in the example was 50pm.
A sample shown below was prepared using a polyimide film of the same thickness. Samples Nos. 1 to 12 are examples according to the present invention, and samples A and B are comparative examples having no underlayer.
なおＡ１合金はＲＦスパッタ法で０．１ｐｍ形成し、引
き続き下地層上にターゲットとしＣｏ−Ｃｒ合金（Ｃｒ
２４ａｔ％）を用いＲＦマグネットロンスパッタ装置で
０．２ｐｍのＣｏ−Ｃｒ合金膜を形成した。The A1 alloy was formed to a thickness of 0.1 pm by RF sputtering, and then Co-Cr alloy (Cr
A Co--Cr alloy film with a thickness of 0.2 pm was formed using an RF magnetron sputtering device.
なお、試料Ｎｏ、１２はフィルム上にＮ１５ｏＦｅ２ｏ
合金の軟磁性層を０．５１１ｍ形成しこの上に１０ａｔ
％のＣｒを含むＡｌＣｒ合金を下地層として設けこの上
にＣｏＣｒ合金膜を形成した。試料Ａは比較例としてフ
ィルム上に前記と同条件で直接ＣｏＣｒ合金膜を作製し
た。試料Ｂは比較例としてＮ１５ｏＦｅ２ｏの軟磁性層
０．５１１ｍ形成し、この上に直接、前記と同じ条件で
ＣｏＣｒ合金膜を形成した。第１表に本実施例及び比較
例の結果をまとめた。表では膜の垂直配向性の指標とな
るＭ−Ｈループから求めた垂直磁気異方性Ｈｋを示した
。In addition, sample No. 12 has N15oFe2o on the film.
A soft magnetic layer of alloy is formed with a thickness of 0.511 m and a layer of 10 at
% of Cr was provided as a base layer, and a CoCr alloy film was formed thereon. Sample A is a comparative example in which a CoCr alloy film was directly formed on a film under the same conditions as above. Sample B was a comparative example in which a soft magnetic layer of N15oFe2o was formed to a thickness of 0.511 m, and a CoCr alloy film was directly formed thereon under the same conditions as above. Table 1 summarizes the results of the present example and comparative example. The table shows the perpendicular magnetic anisotropy Hk determined from the M-H loop, which is an index of the perpendicular orientation of the film.
第１表
Ａ１合金を下地層を設けた磁気記録体はフィルムだけの
場合と較べてＣｏＣｒ合金膜のクラックの発生を抑制出
来た。また本下地層は耐食性元素を用いればＡｌだけと
較べて耐食性も向上し、信頼性と磁気特性の向上を達成
出来る。The magnetic recording body provided with the underlayer of the A1 alloy in Table 1 was able to suppress the occurrence of cracks in the CoCr alloy film compared to the case of only a film. Furthermore, if a corrosion-resistant element is used in this underlayer, corrosion resistance will be improved compared to Al alone, and reliability and magnetic properties can be improved.
（発明の効果）
このように、本磁気記録体は従来のものと較べて磁気特
性及び製造マージンが大幅に改善されていることがわか
る。(Effects of the Invention) As described above, it can be seen that the present magnetic recording body has significantly improved magnetic properties and manufacturing margins compared to conventional magnetic recording bodies.
この発明はこのように、コバルト合金垂直磁気記録膜の
下地層がアルミニウムと他の金属との合金とすることに
より良好な特性を得ることを可能にし、磁気記録体とし
て種々の応用が期待されるものである。As described above, this invention makes it possible to obtain good characteristics by making the underlayer of a cobalt alloy perpendicular magnetic recording film an alloy of aluminum and other metals, and is expected to find various applications as a magnetic recording medium. It is something.
Claims (1)
成されている磁気記録体において、該コバルト合金垂直
磁気記録膜に接する下地層としてアルミニウム（Ａｌ）
合金層が形成されていることを特徴とする磁気記録体。 ２、アルミニウム（Ａｌ）合金層には、クロム（Ｃｒ）
、チタン（Ｔｉ）、タンタル（Ｔａ）、ジルコニュウム
（Ｚｒ）、ニオブ（Ｎｂ）、マグネシウム（Ｍｇ）、マ
ンガン（Ｍｎ）、ニッケル（Ｎｉ）、シリコン（Ｓｉ）
、銅（Ｃｕ）のうちの１つもしくは２つ以上が含まれて
いる。特許請求の範囲第１項記載の磁気記録体。[Claims] 1. In a magnetic recording body in which a base layer and a cobalt alloy perpendicular magnetic recording film are formed on a substrate, aluminum (Al) is used as the base layer in contact with the cobalt alloy perpendicular magnetic recording film.
A magnetic recording body characterized by forming an alloy layer. 2. Chromium (Cr) in the aluminum (Al) alloy layer
, titanium (Ti), tantalum (Ta), zirconium (Zr), niobium (Nb), magnesium (Mg), manganese (Mn), nickel (Ni), silicon (Si)
, copper (Cu). A magnetic recording medium according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2067086A JPS62177721A (en) | 1986-01-31 | 1986-01-31 | Magnetic recording body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2067086A JPS62177721A (en) | 1986-01-31 | 1986-01-31 | Magnetic recording body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62177721A true JPS62177721A (en) | 1987-08-04 |
Family
ID=12033636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2067086A Pending JPS62177721A (en) | 1986-01-31 | 1986-01-31 | Magnetic recording body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62177721A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5032470A (en) * | 1989-04-17 | 1991-07-16 | Mitsui Petrochemical Industries, Ltd. | Optical recording medium with an aluminum alloy metallic layer containing at least hafnium |
| US6020060A (en) * | 1997-09-25 | 2000-02-01 | Fujitsu Limited | Magnetic recording medium, process for producing the same and magnetic disk device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5451804A (en) * | 1977-09-30 | 1979-04-24 | Shiyunichi Iwasaki | Magnetic recording medium |
| JPS57117123A (en) * | 1981-01-13 | 1982-07-21 | Toshiba Corp | Magnetic recoding body |
| JPS5877026A (en) * | 1981-10-31 | 1983-05-10 | Tdk Corp | Magnetic recording medium |
-
1986
- 1986-01-31 JP JP2067086A patent/JPS62177721A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5451804A (en) * | 1977-09-30 | 1979-04-24 | Shiyunichi Iwasaki | Magnetic recording medium |
| JPS57117123A (en) * | 1981-01-13 | 1982-07-21 | Toshiba Corp | Magnetic recoding body |
| JPS5877026A (en) * | 1981-10-31 | 1983-05-10 | Tdk Corp | Magnetic recording medium |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5032470A (en) * | 1989-04-17 | 1991-07-16 | Mitsui Petrochemical Industries, Ltd. | Optical recording medium with an aluminum alloy metallic layer containing at least hafnium |
| US6020060A (en) * | 1997-09-25 | 2000-02-01 | Fujitsu Limited | Magnetic recording medium, process for producing the same and magnetic disk device |
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