JPH09330907A - Heat exchanger for regulating temperature of liquid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify the constitution of a heat exchanger and reduce the size and weight of the exchanger, and then, to protect the exchanger from generating dust and vibrating by closely fitting and fixing power unit attaching plates made of a material having high heat conductivity to the surfaces of heat radiating bodies on the opposite side of thermoelectric conversion elements and attaching the power units of the conversion elements to the plates. SOLUTION: The heat collected by thermoelectric conversion elements 2, 2,... is radiated to the outside by cooling water passed through heat radiating bodies 6 and 6. The cooling water simultaneously absorbs the heat generated from a power unit 20 composed of a DC-AC converter, substrate, etc., from the heat radiating bodies 6 and radiates the heat to the outside. Namely, the heat generated from the power unit can be radiated together with the heat collected by the elements 2. Therefore, the temperature of a liquid can be regulated quickly in response to the fluctuation of the temperature and the installed space of a heat exchanger can be reduced by simplifying the exchanger remarkably, because the temperature of the liquid can be regulated by directly cooling the liquid without providing any additional forcibly cooling device nor through a constant temperature oven.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature control device for a liquid such as a semiconductor processing liquid, which requires particularly precise temperature control.

[0002]

2. Description of the Related Art For example, in a photo-etching process in manufacturing a semiconductor device, highly accurate temperature control of a developing solution or an etching solution is required. Conventionally, as a liquid temperature control device used for this type of application, as shown in FIG. 4, a water temperature controller 110 is attached to a constant temperature bath 100 in which a water level gauge 105 is installed. Is kept at a predetermined temperature, and in this constant temperature bath 100, a fluororesin heat exchange tube 130, which is connected to an etching device (not shown) via a liquid supply pipe 131, is housed in a coil and immersed in water. Then, the one in which the etching liquid flowing in the tube 130 is adjusted to a predetermined temperature by exchanging heat with water in the constant temperature bath is used.

As the water temperature controller 110, a thermoelectric conversion element (Peltier element) 111 is provided through a water flow path made of carbon graphite or a material having good heat conductivity such as aluminum, copper or alloys thereof. The heat transfer block body 112 and the heat dissipation body 113 made of the same material sandwich the pressure, so that heat is transferred between the thermoelectric conversion element 111 and the heat transfer block body and the heat dissipation body. A refrigeration cycle is used. 115 is
It is a flow path of cooling water for the radiator. Further, 116 is a constant temperature bath 1.
00 is a temperature detector that detects the temperature of the water flowing into the temperature controller 110, and 117 is a circulation pump that pressure-feeds the water whose temperature has been adjusted based on the detection signal.

Further, in order to control the thermoelectric conversion element, a cross current converter for converting an AC power supply (100 or 200 V) into a DC power supply is required. Further, a power supply unit such as a switching mechanism for switching the current time and direction is required, and the power supply unit is arranged in a housing separate from the heat exchanger or is housed in the same housing as the water temperature controller 110.

Since this power supply unit generates heat, a cooling blower is provided in the housing to prevent overheating.
In many cases, it was forcibly cooled.

[0006]

[Problem] In the liquid temperature control device, cooling water is allowed to pass through the heat radiator so that heat is transferred between the thermoelectric conversion element and the heat transfer block body and the heat radiator. It is done separately from the release of heat. For this reason, there is a problem that the device tends to be large and air is blown by the blower, which easily causes dust and vibration, which are harmful to precision electronic components.

[0007]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a liquid temperature control device having a simple structure, a small size and a light weight, and free from dust and vibration.

[0008]

The gist of the present invention is that a power supply unit mounting plate made of a highly conductive material for mounting a power supply unit of a thermoelectric conversion element is closely fixed to the surface of the radiator opposite to the thermoelectric conversion element. It is a characteristic heat exchanger for liquid temperature control.

[0009]

1 and 2 show a first embodiment of the present invention. It is optimal as an apparatus for adjusting the etching solution used in the photo-etching process for manufacturing a semiconductor device to a predetermined temperature. The basic principle of the heat exchanger 1 for liquid temperature control is the water temperature controller 110 described in the prior art.
The same as the thermoelectric refrigeration cycle. In FIG.
Of the three graphite plates 3a, 3b, 3c of the same shape that can be overlapped with each other, the central graphite plate 3a
Grooves 4a, 4a having a semicircular cross section on both the left and right sides of
Are formed, and the same grooves 4b, 4b, ...
c,... are formed.

The heat transfer block 3 is constructed by contacting these graphite plates 3a to 3c and forming through holes 4, 4, ... With semi-circular grooves facing each other. On the heavy contact surface of the graphite plate and the inner peripheral surface of the groove, heat conductive silicon grease (for example, G7 manufactured by Shin-Etsu Chemical Co., Ltd.) is used.
47) or by interposing a very thin thermally conductive silicon film, the adhesion and heat transfer between the heavy contact surfaces, and the adhesion and heat transfer between the liquid conduit and the groove inner peripheral surface to be described later. To improve In addition, if necessary,
Fluorine resin may be vapor-deposited on the plate contact surface and the groove inner peripheral surface in advance by a CVD method or the like to fill fine pores of graphite to improve thermal conductivity and corrosion resistance. This surface treatment is a desirable treatment even when a material other than graphite, such as an aluminum plate, is used as the heat transfer block.

On both sides of the heat transfer block, the thermoelectric conversion elements 2, 2, ... Which are modularized are similarly in contact with each other through a thin layer of heat conductive silicon grease. The graphite plate 3a is provided outside the thermoelectric conversion elements 2, 2 ,.
The heat-dissipating body 6 made of a graphite plate having the same shape as ~ c is in contact with
Furthermore, the fixing plate 10a is in contact with the radiator 6a from the outside. Further, a heat transfer plate 21 made of a plate made of aluminum is brought into contact with the fixing plate 10b on the outer side of the heat radiating body 6b, and the fixing plates are tightened with the tightening bolts 11. , Thermoelectric conversion element 2, ...
The radiators 6 and 6 and the heat transfer plate are pressed and fixed to each other.

The heat transfer plate 21 is extended from the radiator 6b, and the extended portion is bent downward at a right angle. The power source unit 20 such as a cross flow converter or a control board is provided.
Are mounted so that they are not thermally interrupted. A cooling water flow path 7 is provided in the radiator, and the cooling water enters through the inlet pipe 7a, flows through the radiator while cooling the radiator, and flows out to the outlet pipe 7b.

On the other hand, one ends 5a, 5 of the liquid conduits 5, 5, ...
are connected to a cylindrical flow-dividing chamber whose ceiling is closed at the lower end where the liquid inlet 8a is opened, and other liquid conduits protruding from the through hole group side formed by the grooves 4a and 4b. All the ends 5b, ... Are connected to and communicate with a merging chamber 9 having a liquid outlet at the lower end. 12 detects the liquid temperature in the merging chamber 9, and the power unit 20 of the thermoelectric conversion element,
It is a temperature detector that sends a detection signal. The diversion room and the merging room,
The same as the liquid conduit, which is made of fluororesin, or at least the inner surface of which is coated with fluororesin.

[0014]

In the embodiment of the heat exchanger for liquid temperature control of the present invention having the above-mentioned structure, one end of the liquid pressure feeding pipe for feeding the etching liquid from the photo etching device is connected to the liquid inlet 8a of the flow dividing chamber 8. Then, at the liquid outlet 9a of the merging chamber 9,
Connect one end of the return tube to the photoetcher.
The liquid that has entered the flow dividing chamber 8 is divided into the liquid conduits 5, ... From here, and while being passed through the heat transfer block body 3, the liquid is adjusted to a predetermined temperature, enters the merging chamber, and flows out from the outlet 9a. Return to photo etching equipment. When the cooling water passes through the radiators 6 and 6, the heat pumped by the thermoelectric conversion element is released to the outside. At the same time, the heat generated from the power supply unit 20 such as the cross flow converter or the substrate is absorbed by the cooling water from the radiator 6 via the heat transfer plate 21, and the heat is released to the outside.

FIG. 3 shows a second embodiment of the present invention, in which the heat transfer plate 21 is divided into two pieces 21a and 21b, which are fastened and assembled by screws, and the assemblability is improved. Is improving.

[0016]

According to the apparatus of the present invention described in detail above, since the heat generation of the power supply unit can be cooled in accordance with the cooling of the heat radiation of the thermoelectric conversion element, it is not necessary to separately provide a forced cooling device. Furthermore, unlike the conventional device, the liquid is directly cooled and temperature is adjusted without going through a constant temperature bath, so it is possible to respond quickly to liquid temperature changes and adjust the temperature, and the device is greatly simplified. The space required for installation has been reduced.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing a first embodiment of the present invention.

FIG. 2 is an explanatory sectional view taken along the line AA of FIG. 1;

FIG. 3 is a perspective explanatory view showing a second embodiment of the present invention.

FIG. 4 is an explanatory diagram showing an example of a conventional technique.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Heat exchanger 2 Electric conversion element 3 Heat transfer block body 4 Through hole 5 Liquid flow path 6 Radiator 20 Power supply unit 21 Heat transfer plate

Claims (1)

[Claims] 1. A heat transfer block body, which is made of a material having good thermal conductivity, and a heat radiator are arranged on both sides of the thermoelectric conversion element so as to be able to exchange heat with the thermoelectric conversion element. A liquid passage is provided so as to be able to exchange heat with the heat transfer block, and one side opening of the liquid conduit is communicated with a liquid distribution chamber having a liquid inlet for temperature adjustment, In the heat exchanger for liquid temperature adjustment, the other side opening of the liquid conduit is communicated with a liquid merging chamber having a liquid outlet, and the radiator is provided with a cooling liquid flow path. Body fluid temperature control characterized in that a power supply unit mounting plate made of a material with good heat conductivity is closely fixed to the surface opposite to the conversion device, and a power supply unit of the thermoelectric conversion device is mounted on the power supply unit mounting plate. Heat exchanger.