JPH064142Y2 - Vacuum gate valve for elongated openings - Google Patents
Vacuum gate valve for elongated openingsInfo
- Publication number
- JPH064142Y2 JPH064142Y2 JP1986086748U JP8674886U JPH064142Y2 JP H064142 Y2 JPH064142 Y2 JP H064142Y2 JP 1986086748 U JP1986086748 U JP 1986086748U JP 8674886 U JP8674886 U JP 8674886U JP H064142 Y2 JPH064142 Y2 JP H064142Y2
- Authority
- JP
- Japan
- Prior art keywords
- vertical moving
- moving member
- valve
- opening
- valve plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Description
【考案の詳細な説明】 （産業上の利用分野） 本考案は、細長い開口部用真空ゲート弁に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a vacuum gate valve for an elongated opening.
（従来の技術） 従来、真空ゲート弁は箱形をした弁箱の前後に開口部を
有し、両側の案内材に沿ってシリンダ等により上下動す
る上下動材に弁板を連結して、上下動材の下降位置にお
いて前記弁板が開口部内側周辺に設けたシール材を押圧
して開口部を閉塞するごとくしていた。(Prior Art) Conventionally, a vacuum gate valve has an opening at the front and rear of a box-shaped valve box, and a valve plate is connected to a vertically moving member that moves up and down along a guide member on both sides by a cylinder or the like. In the lowered position of the vertically movable member, the valve plate presses the sealing material provided around the inside of the opening to close the opening.
（考案が解決しようとする課題） 真空ゲート弁が大型になって左右巾が長くなると、両側
の案内材で弁板を押えているので中央部のモーメントが
大となり、弁板が撓んで洩れが発生するという不都合が
あり、大型にするには部材を大規模にする等、面倒であ
った。(Problems to be solved by the invention) When the size of the vacuum gate valve becomes large and the width of the left and right becomes long, the guide plate on both sides presses the valve plate, so that the moment in the central part becomes large and the valve plate bends and leaks. However, there is an inconvenience that it occurs, and it is troublesome to make the member large in size.
この考案の目的は、真空ゲート弁が大型になっても、弁
板の撓みを抑えて洩れの発生をなくすことにある。An object of the present invention is to prevent the occurrence of leakage by suppressing the bending of the valve plate even if the vacuum gate valve becomes large.
（課題を解決するための手段） この目的のために、この考案の解決手段は、箱形をした
弁箱の前後壁にそれぞれ左右方向へ長い開口部を互いに
対応して設け、前側開口部内側周辺にシール材を設け、
該弁箱の内部にシリンダ等により左右端の案内材に沿っ
て上下動する上下動材を設け、該上下動材の後側上下端
部に、各々、左右方向に延びる軸により回動可能に支持
されかつ上記弁箱の後側開口部内側上下周縁を転動可能
な上側及び下側の押圧ローラをそれぞれ上下動材の左右
両端部を除く中央部に左右方向に適宜間隔をもって適宜
数配設し、該各押圧ローラの軸にそれぞれリンクを介し
て上下動材前側に位置する１つの弁板を連結し、上下動
材の下降位置において、前記押圧ローラが後側開口部内
側上下縁を押圧するとともに前記弁板が前側開口部内側
周辺のシール材を押圧して前側開口部を閉塞するごとく
構成した。(Means for Solving the Problem) For this purpose, the solution means of the present invention is to provide the front and rear walls of a box-shaped valve box with openings that are long in the left-right direction in correspondence with each other, and Provide a sealing material around the
A vertical moving member that moves up and down along a guide member at the left and right ends by a cylinder or the like is provided inside the valve box, and the upper and lower end portions of the rear side of the vertical moving member can be rotated by shafts extending in the horizontal direction. Appropriate numbers of upper and lower pressure rollers supported and rollable on the inner peripheral edges of the rear opening of the valve box are arranged at appropriate intervals in the left-right direction at the central portion of the vertical moving member excluding the left and right ends. Then, one valve plate located on the front side of the vertical moving member is connected to the shaft of each pressing roller via a link, and when the vertical moving member is in the lowered position, the pressing roller presses the inner upper and lower edges of the rear opening. In addition, the valve plate presses the sealing material around the inside of the front opening to close the front opening.
（作用） この考案では、上下動材の下降位置においては、リンク
の略水平方向への回動により、上側及び下側の押圧ロー
ラの各々が後側開口部内側上下縁の中央部の適宜位置を
押圧するとともに、それに対応する位置において弁板が
前側開口部内側周辺のシール材を押圧して開口部を閉塞
する。このように弁板が左右端部のみならず中央部でも
各リンクの突張りにより弁箱後壁に支持されるので、細
長い開口部であっても、弁板の中央部におけるモーメン
トが大とならず、弁板が撓まないから、洩れが発生する
という不都合がなく、真空ゲート弁を大型にすることが
できる。(Operation) In the present invention, when the vertical moving member is in the lowered position, the upper and lower pressing rollers are appropriately positioned at the central portions of the upper and lower edges of the rear opening inside by the rotation of the link in the substantially horizontal direction. And the valve plate presses the sealing material around the inside of the front opening to close the opening at a position corresponding thereto. In this way, the valve plate is supported on the rear wall of the valve box not only at the left and right ends but also at the center by the protrusions of the links, so even if the opening is long and narrow, the moment at the center of the valve plate will not be large. In addition, since the valve plate does not bend, there is no inconvenience that leakage occurs, and the vacuum gate valve can be made large.
また、上下動材の後側上下端部にそれぞれ押圧ローラが
軸支され、この各押圧ローラの軸にそれぞれ弁板とのリ
ンクが連結されているので、上下動材が下降位置に移動
する際、押圧ローラの各々は弁箱の後壁に当接した後、
その後壁面を転動しながら下降する。このため、リンク
は略水平方向に容易に回動することとなる。一方、上下
動材が下降位置から上昇する際にも、押圧ローラの転動
によりリンクがスムーズに略水平方向から逆方向に回動
する。従って、真空ゲート弁の開閉をスムーズに行うこ
とができる。In addition, since the pressing rollers are axially supported respectively at the upper and lower rear end portions of the vertical moving member, and the links of the pressing rollers are connected to the valve plate respectively, when the vertical moving member moves to the lowered position. , Each of the pressure rollers comes into contact with the rear wall of the valve box,
After that, it rolls down the wall surface and descends. Therefore, the link can easily rotate in the substantially horizontal direction. On the other hand, when the up-and-down moving member rises from the lowered position, the link smoothly rotates in the reverse direction from the substantially horizontal direction due to the rolling of the pressing roller. Therefore, the vacuum gate valve can be opened and closed smoothly.
さらに、各押圧ローラの軸にリンクが連結されているの
で、押圧ローラの軸とリンクの軸とを共用して、部品点
数を低減することができる。Furthermore, since the link is connected to the shaft of each pressing roller, the shaft of the pressing roller and the shaft of the link can be shared, and the number of parts can be reduced.
（実施例） 以下、図面に示す実施例について説明する。尚、説明の
便宜上、第２図の左・右をそれぞれ「前」・「後」、第
１図の左・右をそれぞれ「左」・「右」と呼称する。(Example) Hereinafter, the Example shown in drawing is described. For convenience of explanation, the left and right of FIG. 2 are referred to as “front” and “rear”, and the left and right of FIG. 1 are referred to as “left” and “right”, respectively.
１は真空ゲート弁で、その前側が真空装置Ｖ１の開口部
に連結されており、後側は真空装置Ｖ２の開口部に連結
されている。２は弁箱で、その前壁及び後壁にはそれぞ
れ左右に巾の長い前側及び後側開口部１ａ，１ｂが互い
に対応して設けられており、前側開口部１ａの内側周辺
にはシール材としてのＯリング３が押え金具４によって
一部が内側へ突出するごとく取着されている。Reference numeral 1 denotes a vacuum gate valve, the front side of which is connected to the opening of the vacuum device V 1 and the rear side of which is connected to the opening of the vacuum device V 2 . Reference numeral 2 denotes a valve box, and front and rear walls thereof are respectively provided with front and rear openings 1a and 1b having long widths on the left and right in correspondence with each other, and a sealing material is provided around the inside of the front opening 1a. The O-ring 3 is attached by the pressing metal fitting 4 so that a part thereof protrudes inward.
弁箱２の上部前後には点検孔５ａ，５ｂが設けられてい
る。６ａ，６ｂはこの点検孔５ａ，５ｂ用の蓋で、Ｏリ
ングを内蔵して点検孔５ａ，５ｂを気密に閉塞してい
る。Inspection holes 5a and 5b are provided at the front and rear of the upper portion of the valve box 2. Reference numerals 6a and 6b are lids for the inspection holes 5a and 5b, and an O-ring is built in to hermetically close the inspection holes 5a and 5b.
７は上下動材であり、その左右両側の上下部には左右方
向を規制するガイドローラ８と前後方向を規制するガイ
ドローラ９がそれぞれ４個設けられており、これらガイ
ドローラ８，９の規制により上下動材７が弁箱２の左右
側壁内に設けた両側の案内材としてのガイドレール１０
ａ，１０ｂに沿って上下動するごとくなっている。Reference numeral 7 is a vertically movable member, and four guide rollers 8 for restricting the left-right direction and four guide rollers 9 for restricting the front-rear direction are provided at the upper and lower portions on both the left and right sides of the movable member. The vertical moving member 7 is provided with guide rails 10 as guide members on both sides provided in the left and right side walls of the valve box 2.
Each time it moves up and down along a and 10b.
１１は弁箱２の上部に設けられたシリンダで、その下方
に延びるピストンロッド１１ａの先端は上下動材７の上
部に取着された取付金具１２に連結されている。Reference numeral 11 is a cylinder provided in the upper portion of the valve box 2, and the tip of a piston rod 11a extending downward is connected to a mounting member 12 attached to the upper portion of the vertical moving member 7.
１３は上側押圧ローラで、上下動材７の後側上端部に取
着されたローラ取付材１５に左右方向に延びる軸１３ａ
により回転自在に支持されている。１４は下側押圧ロー
ラで、同様に、上下動材７の後側下端部に取着されたロ
ーラ取付材１６に左右方向に延びる軸１４ａにより回転
自在に支持されている。これら上側及び下側押圧ローラ
１３，１４はそれぞれ上下動材７の左右両端部を除く中
央部に左右方向に適宜間隔をもって適宜数設けられてい
る。Reference numeral 13 denotes an upper pressing roller, which is a shaft 13a extending in the left-right direction on a roller mounting member 15 attached to the rear upper end of the vertically movable member 7.
It is rotatably supported by. Reference numeral 14 denotes a lower pressing roller, which is also rotatably supported by a roller mounting member 16 attached to the lower rear end of the vertical moving member 7 by a shaft 14a extending in the left-right direction. These upper and lower pressure rollers 13 and 14 are provided in appropriate numbers in the left-right direction at appropriate intervals in the central portion of the vertical moving member 7 excluding the left and right ends.
１７，１８はそれぞれ上下のスライド板で、このスライ
ド板１７，１８は弁箱２の後側開口部１ｂの内側上下に
おいて、上下動材７が下降位置にあるときの前記押圧ロ
ーラ１３，１４と対向する位置に固着されている。Reference numerals 17 and 18 denote upper and lower slide plates, and the slide plates 17 and 18 are above and below the pressing rollers 13 and 14 when the vertical moving member 7 is in the lowered position above and below the rear opening 1b of the valve box 2. It is fixed at the opposite position.
１９は上下動材７の前側に配置され前記前側開口部１ａ
をその内側から閉塞するための１つの弁板、２０，２１
は前記上側及び下側押圧ローラ１３，１４に対応して設
けられたリンクであって、各リンク２０，２１は、各々
基端が押圧ローラ１３，１４の軸１３ａ，１４ａに回動
自在に支承され、先端は弁板１９に回動自在に連結され
ている。Numeral 19 is arranged on the front side of the vertical moving member 7 and is located on the front side opening portion 1a.
Valve plate for closing the valve from the inside, 20, 21
Is a link provided corresponding to the upper and lower pressing rollers 13 and 14, and the bases of the links 20 and 21 are rotatably supported by the shafts 13a and 14a of the pressing rollers 13 and 14, respectively. The tip is rotatably connected to the valve plate 19.
２２は送り込みローラで、左右２個設けられており、該
送り込みローラ２２，２２に対向する弁板１９下部には
それぞれ板２３，２３が固着されており、該板２３が送
り込みローラ２２に当接することで弁板１９の下降端位
置を規制している。Reference numeral 22 denotes a feed roller, which is provided in two left and right sides. Plates 23 and 23 are fixed to the lower portions of the valve plate 19 facing the feed rollers 22 and 22, respectively, and the plate 23 contacts the feed roller 22. This regulates the lower end position of the valve plate 19.
２４はシリンダ１１のピストンロッド１１ａ周りをシー
ルするＯリング、２４ａはその押え板である。Reference numeral 24 is an O-ring that seals around the piston rod 11a of the cylinder 11, and 24a is a holding plate thereof.
しかして、この実施例では、開弁時、シリンダ１１が縮
短しており、このとき、弁板１９は上下動材７に当接し
て吊り上げられており、真空装置Ｖ１と真空装置Ｖ２と
は連通している（第６図参照）。Therefore, in this embodiment, when the valve is opened, the cylinder 11 is shortened, and at this time, the valve plate 19 is abutted against the up-and-down moving member 7 to be lifted, and the vacuum device V 1 and the vacuum device V 2 are connected. Are in communication with each other (see FIG. 6).
これに対し、閉弁するときには、シリンダ１１が伸長す
る。これに伴い、上下動材７が弁板１９を吊ったまま下
降し、弁板１９下部の板２３が送り込みローラ２２上に
当接すると、その後はシリンダ１１の伸長力によってリ
ンク２０，２１が軸１３ａ，１４ａを中心に略水平方向
になるよう回動し、これにより弁板１９が送り込みロー
ラ２２上を前方へ移動してＯリング３を押圧し、前側開
口部１ａを閉塞する。このとき、リンク２０，２１が突
っ張った状態となり、押圧ローラ１３，１４はスライド
板１７，１８を押圧する。On the other hand, when closing the valve, the cylinder 11 extends. Along with this, the vertical moving member 7 descends while suspending the valve plate 19, and the plate 23 under the valve plate 19 abuts on the feed-in roller 22, and thereafter, the links 20, 21 are axially moved by the extension force of the cylinder 11. It rotates about 13a and 14a so as to be substantially horizontal, whereby the valve plate 19 moves forward on the feeding roller 22 and presses the O-ring 3, thereby closing the front opening 1a. At this time, the links 20 and 21 are in a stretched state, and the pressing rollers 13 and 14 press the slide plates 17 and 18.
その際、上下動材７に上下の押圧ローラ１３，１４が設
けられているので、上下動材７が下降位置に移動すると
きには、各押圧ローラ１３，１４は弁箱２後壁のスライ
ド板１７，１８にそれぞれ当接した後、その面上を転動
しながら下降する。このため、リンク２０，２１は略水
平方向に容易に回動する。At this time, since the vertical moving member 7 is provided with the upper and lower pressing rollers 13 and 14, when the vertical moving member 7 moves to the lowered position, the pressing rollers 13 and 14 are moved to the slide plate 17 on the rear wall of the valve box 2. , 18 respectively, and then descends while rolling on the surface. Therefore, the links 20 and 21 easily rotate in a substantially horizontal direction.
一方、閉弁状態から再度開弁するときには、シリンダ１
１の縮短により上下動材７が下降位置から上昇し、前記
と逆の動作が行われる。このときにも、押圧ローラ１
３，１４の転動によりリンク２０，２１がスムーズに略
水平方向から逆方向に回動する。このことから、真空ゲ
ート弁の開閉をスムーズに行うことができる。On the other hand, when opening the valve again from the closed state, the cylinder 1
Due to the contraction of 1, the up-and-down moving member 7 rises from the lowered position, and the reverse operation is performed. Also at this time, the pressing roller 1
The links 20 and 21 smoothly rotate from the substantially horizontal direction to the opposite direction due to the rolling of the members 3 and 14. Therefore, the vacuum gate valve can be opened and closed smoothly.
従って、真空装置Ｖ２側を真空にした場合、弁板１９は
真空装置Ｖ１側の圧力によって押されるものの、その巾
方向の中央部の適宜位置においてローラ１３，１４及び
リンク２０，２１によって後壁から押されるため、前側
開口部１ａが左右に長い場合でも弁板１９は撓まず、前
側開口部１ａの閉塞が破れて洩れが発生するということ
がない。よって真空ゲート弁を支障なく大型にすること
ができる。Therefore, when the vacuum device V 2 side is evacuated, the valve plate 19 is pushed by the pressure of the vacuum device V 1 side, but is moved by the rollers 13, 14 and the links 20, 21 at an appropriate position in the center portion in the width direction. Since it is pushed from the wall, the valve plate 19 does not bend even if the front opening 1a is long in the left-right direction, and the blockage of the front opening 1a does not break and leakage does not occur. Therefore, the vacuum gate valve can be made large without any trouble.
（考案の効果） 以上説明したように、この考案によると、箱形をした弁
箱の前後に左右方向へ長い開口部を設け、前側開口部内
側周辺にシール材を設け、弁箱の内部にシリンダ等によ
り左右端の案内材に沿って上下動する上下動材を設け、
上下動材の後側上下端部に、各々上下動材に軸支される
上側及び下側の押圧ローラをそれぞれ上下動材の左右両
端部を除く中央部に左右方向に適宜間隔をもって適宜数
設け、この各押圧ローラの軸からリンクによって前側の
弁板を連結し、上下動材の下降位置において、押圧ロー
ラが後側開口部内面上下縁を押圧するとともに弁板がシ
ール材を押圧して前側開口部を閉塞するごとくしたか
ら、真空ゲート弁の開閉をスムーズに行い、かつ部品点
数の低減を図りつつ、左右方向に長い弁板が外側から圧
力によって押された場合でもその中央部でモーメントが
大とならず、弁板が撓まないから開口部の閉塞が破れて
洩れが発生するのを防いで装置を大型にすることができ
る。(Effects of the Invention) As described above, according to the present invention, a long opening in the left-right direction is provided in the front and rear of the box-shaped valve box, a sealing material is provided around the inside of the front opening, and the inside of the valve box is provided. A vertical moving material that moves up and down along the guide material at the left and right ends by a cylinder etc. is provided.
At the rear upper and lower ends of the vertical moving member, upper and lower pressure rollers pivotally supported by the vertical moving member are provided at appropriate numbers in the left and right directions at appropriate intervals in the central portion of the vertical moving member except for the left and right ends. , The front valve plate is connected by a link from the shaft of each pressure roller, and when the vertical moving member is in the lowered position, the pressure roller presses the upper and lower edges of the inner surface of the rear opening and the valve plate presses the sealing material to the front side. Since the opening is closed, the vacuum gate valve can be opened and closed smoothly, and the number of parts can be reduced.Even when the valve plate that is long in the left-right direction is pressed by pressure from the outside, the moment is generated at the center. Since the valve plate does not become large and the valve plate is not bent, the blockage of the opening is prevented from being broken and the leakage can be prevented, and the device can be made large.
図面は本考案の一実施例を示し、第１図は真空ゲート弁
の正面図、第２図は第１図のII−IIから見た断面図、第
３図は第１図のIII−IIIから見た断面図、第４図は第１
図のIV−IVから見た断面図、第５図は第４図のＶ−Ｖか
ら見た断面図、第６図は作動を示す第２図と同様の断面
図である。 １…真空ゲート弁、１ａ，１ｂ…開口部、２…弁箱、３
…Ｏリング、７…上下動材、１１…シリンダ、１３…上
側押圧ローラ、１３ａ…軸、１４…下側押圧ローラ、１
４ａ…軸、１９…弁板。The drawing shows one embodiment of the present invention. Fig. 1 is a front view of a vacuum gate valve, Fig. 2 is a sectional view taken along line II-II in Fig. 1, and Fig. 3 is III-III in Fig. 1. Sectional view seen from above, FIG.
4 is a sectional view taken along line IV-IV in FIG. 5, FIG. 5 is a sectional view taken along line VV in FIG. 4, and FIG. 6 is a sectional view similar to FIG. 1 ... Vacuum gate valve, 1a, 1b ... Opening part, 2 ... Valve box, 3
... O-ring, 7 ... Vertical moving material, 11 ... Cylinder, 13 ... Upper pressing roller, 13a ... Shaft, 14 ... Lower pressing roller, 1
4a ... Shaft, 19 ... Valve plate.
Claims (1)
向へ長い開口部を互いに対応して設け、前側開口部内側
周辺にシール材を設け、該弁箱の内部にシリンダ等によ
り左右端の案内材に沿って上下動する上下動材を設け、
該上下動材の後側上下端部に、各々、左右方向に延びる
軸により回動可能に支持されかつ上記弁箱の後側開口部
内側上下周縁を転動可能な上側及び下側の押圧ローラを
それぞれ上下動材の左右両端部を除く中央部に左右方向
に適宜間隔をもって適宜数配設し、該各押圧ローラの軸
にそれぞれリンクを介して上下動材前側に位置する１つ
の弁板を連結し、上下動材の下降位置において、前記押
圧ローラが後側開口部内側上下縁を押圧するとともに前
記弁板が前記前側開口部内側周辺のシール材を押圧して
前側開口部を閉塞するごとくした細長い開口部用真空ゲ
ート弁。1. A front and rear wall of a box-shaped valve box is provided with openings that are long in the left-right direction in correspondence with each other, a sealing material is provided around the inside of the front opening, and the left and right sides are provided inside the valve box by a cylinder or the like. Provide a vertical moving material that moves up and down along the end guide material,
Upper and lower pressing rollers rotatably supported on the rear upper and lower ends of the vertical moving member by shafts extending in the left-right direction and rollable on the inner upper and lower peripheral edges of the rear opening of the valve box. Are disposed in the central portion of the vertical moving member excluding the left and right ends at appropriate intervals in the left-right direction, and one valve plate positioned on the front side of the vertical moving member via links on the shafts of the pressing rollers is provided. In the lower position of the vertical moving member, the pressing roller presses the inner edge of the rear opening inside and the valve plate presses the sealing material around the inside of the front opening to close the front opening. Vacuum gate valve for elongated openings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986086748U JPH064142Y2 (en) | 1986-06-06 | 1986-06-06 | Vacuum gate valve for elongated openings |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986086748U JPH064142Y2 (en) | 1986-06-06 | 1986-06-06 | Vacuum gate valve for elongated openings |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62199567U JPS62199567U (en) | 1987-12-18 |
| JPH064142Y2 true JPH064142Y2 (en) | 1994-02-02 |
Family
ID=30943345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986086748U Expired - Lifetime JPH064142Y2 (en) | 1986-06-06 | 1986-06-06 | Vacuum gate valve for elongated openings |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064142Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4092038B2 (en) * | 1999-03-10 | 2008-05-28 | 新明和工業株式会社 | Vacuum gate valve |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4846925A (en) * | 1971-10-14 | 1973-07-04 |
-
1986
- 1986-06-06 JP JP1986086748U patent/JPH064142Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62199567U (en) | 1987-12-18 |
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