JPH06350250A - Production of printed wiring board - Google Patents
Production of printed wiring boardInfo
- Publication number
- JPH06350250A JPH06350250A JP13564793A JP13564793A JPH06350250A JP H06350250 A JPH06350250 A JP H06350250A JP 13564793 A JP13564793 A JP 13564793A JP 13564793 A JP13564793 A JP 13564793A JP H06350250 A JPH06350250 A JP H06350250A
- Authority
- JP
- Japan
- Prior art keywords
- wiring board
- printed wiring
- conductive paste
- conductive
- synthetic resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は印刷配線板の製造方法に
係り、特に貫通型の導体配線部で、配線層間を接続する
構成を備え、かつ高密度な配線および実装が可能な信頼
性の高い印刷配線板を、工数の低減を図りながら、歩留
まり良好に製造し得る方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a printed wiring board, and more particularly, it has a structure for connecting wiring layers in a through-type conductor wiring portion and has high reliability for high-density wiring and mounting. The present invention relates to a method capable of manufacturing a high printed wiring board with a good yield while reducing the number of steps.
【0002】[0002]
【従来の技術】たとえば両面型印刷配線板もしくは多層
型印刷配線板においては、両面導電パターンなどの配線
層間の電気的な接続を、次のようにして行っている。す
なわち、両面型印刷配線板の場合は、両面銅箔張り基板
の所定位置に孔明け加工(穿設加工)を施し、穿設した
孔の内壁面を含めて全面に化学メッキ処理を施してか
ら、電気メッキ処理で厚付けし、孔の内壁面の金属層の
を厚くして信頼性を高め、配線層間の電気的な接続を行
っている。また、多層印刷配線板の場合は、基板両面に
張られた銅箔をそれぞれパターニングした後、そのパタ
ーニング面上に絶縁シート(たとえばプリプレグ層)を
介して銅箔を積層・配置し、加熱加圧により一体化した
後、前述の両面型印刷配線板のときと同様に、孔明け加
工およびメッキ処理による配線層間の電気的な接続、表
面銅箔についてのパターニングにより多層型印刷配線板
を得ている。なお、より配線層の多い多層型印刷配線板
の場合は、中間に介挿させる両面型印刷配線板数を増加
する方式で製造できる。2. Description of the Related Art For example, in a double-sided printed wiring board or a multi-layered printed wiring board, electrical connection between wiring layers such as double-sided conductive patterns is made as follows. That is, in the case of a double-sided printed wiring board, perforation processing (perforation processing) is performed at a predetermined position on the double-sided copper foil-clad substrate, and chemical plating treatment is applied to the entire surface including the inner wall surface of the perforated hole. The thickness of the metal layer on the inner wall surface of the hole is increased by electroplating to improve reliability and to electrically connect the wiring layers. Also, in the case of a multilayer printed wiring board, after patterning the copper foils stretched on both sides of the board, copper foils are laminated and arranged on the patterned surfaces with an insulating sheet (for example, a prepreg layer) interposed between them, and heated and pressed. After the integration, the multi-layer printed wiring board is obtained by electrical connection between wiring layers by punching and plating, and patterning on the surface copper foil, as in the case of the double-sided printed wiring board described above. . A multilayer printed wiring board having more wiring layers can be manufactured by a method of increasing the number of double-sided printed wiring boards to be inserted in the middle.
【0003】前記印刷配線板の製造方法において、配線
層間の電気的な接続をメッキ法によらず行う方法とし
て、両面銅箔張り基板の所定位置に孔明けし、この孔内
に導電性ペーストを印刷法などにより流し込み・充填
し、孔内に流し込み・充填した導電性ペーストを硬化さ
せて、配線層間を電気的に接続する方法も知られてい
る。In the method of manufacturing a printed wiring board described above, as a method of electrically connecting wiring layers without using a plating method, a hole is formed at a predetermined position of a double-sided copper foil-clad substrate, and a conductive paste is placed in the hole. There is also known a method of pouring / filling by a printing method or the like, and hardening the conductive paste poured / filled in the holes to electrically connect wiring layers.
【0004】[0004]
【発明が解決しようとする課題】上記で説明したよう
に、配線層間の電気的な接続にメッキ法を利用する印刷
配線板の製造方法においては、基板に配線層間の電気的
な接続用の孔明け(穿孔)加工、穿設した孔内壁面を含
めたメッキ処理工程などを要し、印刷配線板の製造工程
が冗長であるとともに、工程管理も繁雑であるという欠
点がある。一方、配線層間の電気的な接続用の孔に、導
電性ペーストを印刷などにより埋め込む方法の場合も、
前記メッキ法の場合と同様に孔明け工程を必要とする。
しかも、穿設した孔内に、均一(一様)に導体性ペース
トを流し込み埋め込むことが難しく、電気的な接続の信
頼性に問題があった。As described above, in a method of manufacturing a printed wiring board that utilizes a plating method for electrical connection between wiring layers, holes for electrical connection between wiring layers are formed in a substrate. It has the drawbacks of requiring opening (perforation) processing, a plating process including the inner wall surface of the bored hole, a redundant manufacturing process of the printed wiring board, and complicated process control. On the other hand, in the case of embedding a conductive paste in the holes for electrical connection between the wiring layers by printing,
As in the case of the plating method, a drilling step is required.
In addition, it is difficult to evenly (uniformly) pour and embed the conductive paste into the bored holes, and there is a problem in reliability of electrical connection.
【0005】いずれにしても、前記孔明け工程などを要
することは、印刷配線板のコストや歩留まりなどに反映
し、低コスト化などへの要望に対応し得ないこと、さら
に高密度配線化に伴い、穿設孔の径が比較的小さくなる
と、メッキ法や導電性ペースト充填による信頼性の高い
電気的な接続を達成し難いことなどの欠点がある。ま
た、前記配線層間の電気的な接続構成の場合は、印刷配
線板の表裏面に、配線層間接続用の導電体孔が設置され
ているため、その導電体孔の領域に配線を形成・配置し
得ないし、加えて電子部品を搭載することもできないの
で、配線密度の向上が制約されるとともに、電子部品の
実装密度向上も阻害されるという問題がある。つまり、
従来の製造方法によって得られる印刷配線板は、高密度
配線や高密度実装による回路装置のコンパクト化、ひい
ては電子機器類の小形化などの要望に、十分応え得るも
のといえず、前記コスト面を含め、実用的により有効な
印刷配線板の製造方法が望まれている。In any case, the necessity of the perforating step is reflected in the cost and yield of the printed wiring board, and it is not possible to meet the demand for cost reduction, and further high density wiring is required. Along with this, if the diameter of the drilled hole is relatively small, there is a drawback that it is difficult to achieve highly reliable electrical connection by plating or filling with a conductive paste. Further, in the case of the electrical connection configuration between the wiring layers, since conductor holes for wiring layer connection are installed on the front and back surfaces of the printed wiring board, the wiring is formed and arranged in the area of the conductor holes. This is not possible, and in addition, since electronic parts cannot be mounted, there is a problem that improvement in wiring density is restricted and improvement in mounting density of electronic parts is also hindered. That is,
The printed wiring board obtained by the conventional manufacturing method cannot be said to sufficiently meet the demands for compact circuit devices by high-density wiring and high-density mounting, and eventually for miniaturization of electronic devices, and the above cost aspect is not satisfied. Including the above, a practically more effective method for producing a printed wiring board is desired.
【0006】本発明は上記事情に対処してなされたもの
で、簡易なプロセスで、より高密度の配線および実装が
可能で、かつ信頼性の高い印刷配線板を歩留まりよく製
造し得る方法の提供を目的とする。The present invention has been made in consideration of the above circumstances, and provides a method capable of producing a printed wiring board having a high yield, which enables high-density wiring and mounting by a simple process and has high reliability. With the goal.
【0007】[0007]
【課題を解決するための手段】本発明に係る印刷配線板
の製造方法は、第1の基体主面の所定位置に導電性ペー
ストを突起状に配置する工程と、前記配置した突起状の
導電性ペースト先端面に、第2の基体主面を位置合わせ
・対接させる工程と、前記第1の基体および第2の基体
の対向面を引き離し、突起状の導電性ペーストほぼ中央
で引き伸し切断し、先端部が尖った導電性バンプを形成
する工程と、前記導電性バンプを形成面に、合成樹脂系
シート主面を対接させて積層配置する工程と、前記積層
体を加熱して合成樹脂系シートの樹脂分が可塑状態にな
った温度で積層体を加圧し、前記合成樹脂系シートの厚
さ方向に、前記導電性バンプを貫挿させて貫通型の導体
配線部を形成する工程とを具備して成ることを特徴とす
る。A method of manufacturing a printed wiring board according to the present invention comprises a step of arranging a conductive paste in a protrusion shape at a predetermined position on a first main surface of a substrate, and the protrusion-shaped conductor arranged as described above. Of the main surface of the second base body to the tip surface of the conductive paste, and the facing surfaces of the first base body and the second base body are separated from each other, and the conductive paste in the shape of a protrusion is stretched almost at the center. Cutting and forming a conductive bump having a sharp tip; a step of stacking the conductive bumps on the surface on which the synthetic resin sheet main surface is in contact; and heating the stack. The laminated body is pressed at a temperature at which the resin content of the synthetic resin sheet becomes plastic, and the conductive bumps are inserted in the thickness direction of the synthetic resin sheet to form a through-type conductor wiring portion. And a process.
【0008】本発明において、導電性バンプを形設する
第1の基体としては、たとえば剥離性の良好な合成樹脂
シート類,もしくは導電性シート(箔)などが挙げられ
る。そして、この第1の基体は、作業性の点から1枚の
シートであることがより望ましいが、予めパターン化し
たものでもよく、その形状も特には限定されない。ま
た、本発明において、突起状導電性ペーストが切断し、
その一部が転写される形態を採る第2の基体としては、
たとえば剥離性の良好な合成樹脂シート類,もしくは導
電性シート(箔)などが挙げられる。In the present invention, examples of the first substrate on which the conductive bumps are formed include synthetic resin sheets having good releasability or conductive sheets (foil). The first substrate is more preferably a single sheet from the viewpoint of workability, but it may be patterned in advance, and its shape is not particularly limited. In the present invention, the protruding conductive paste is cut,
As the second substrate having a form in which a part of it is transferred,
For example, synthetic resin sheets or a conductive sheet (foil) having good peelability can be used.
【0009】本発明において、導電性バンプの構成に用
いる導電性ペーストとしては、たとえば銀,金,銅,半
田粉などの導電性粉末、これらの合金粉末もしくは複合
(混合)金属粉末と、たとえばポリカーボネート樹脂,
ポリスルホン樹脂,ポリエステル樹脂,フェノキシ樹
脂,フェノール樹脂,ポリイミド樹脂などのバインダー
成分とを混合して調製されたものが挙げられる。そし
て、この導電性ペーストについては、所要の導電性を備
えるとともに、未乾燥状態である程度の粘性を有する一
方、乾燥によりある程度の硬さなどを呈することが要求
され、また、前記導電性ペースト突起(柱状体)の形設
は、たとえば比較的厚いメタルマスクを用いた印刷法に
より、アスペクト比の高い突起(柱状体)を形成でき、
その突起ないし柱状体の高さ,径,および分布は、形成
する貫通型の導体配線部の構成に応じて適宜設定され
る。具体的には最終的に構成する、貫通型の導体配線部
の配置構造などを考慮して決められ、たとえば合成樹脂
系シートが、ガラスクロス入りのBステージエポキシ樹
脂層の場合、両面側から圧入する形態のときはBステー
ジエポキシ樹脂層厚の80〜 120%程度、片面側から圧入
する形態のときはBステージエポキシ樹脂層厚の 180〜
220%程度の高さが好ましい。なお、前記突起(柱状
体)の配置は、たとえば厚さ 5mm程度のステンレス板の
所定位置に、 0.3mmの孔を明けて成るマスクを筐体の全
面に配置し、この筐体内に収容した導電性ペーストを加
圧して、前記マスクの孔から導電性ペーストを押し出す
構成の、いわゆるスタンプ方式で行うことも可能であ
る。また、前記配置された突起状導電性ペースト切断
し、その一部を第2の基体に転写して、先端の尖った突
起(柱状体)を形成する際、切断した後乾燥してある程
度の硬さを付与してもよいし、切断に先立って乾燥して
ある程度の硬さを付与した場合は、アスペクト比の高い
ものを形成し易い。さらに、その配置は、たとえば一定
のピッチでマトリックス状に配置し、貫通型の導体配線
部がマトリックス状に配置された配線板とし、それら貫
通型の導体配線部を任意に選択利用する形態を採っても
よい。In the present invention, the conductive paste used for forming the conductive bumps is, for example, conductive powder such as silver, gold, copper, solder powder, alloy powder or composite (mixed) metal powder of these, and, for example, polycarbonate. resin,
Examples thereof include those prepared by mixing with a binder component such as polysulfone resin, polyester resin, phenoxy resin, phenol resin and polyimide resin. The conductive paste is required to have required conductivity and have a certain degree of viscosity in an undried state, while exhibiting a certain degree of hardness or the like when dried, and the conductive paste protrusion ( The columnar bodies can be formed by, for example, a printing method using a relatively thick metal mask to form protrusions (columnar bodies) with a high aspect ratio,
The heights, diameters, and distributions of the protrusions or columnar bodies are appropriately set according to the configuration of the through-hole type conductor wiring portion to be formed. Specifically, it is determined in consideration of the layout structure of the through-type conductor wiring part to be finally configured. For example, when the synthetic resin sheet is a B-stage epoxy resin layer containing glass cloth, press-fitting is applied from both sides. 80 to 120% of the thickness of the B-stage epoxy resin layer in the case of the press-fitting mode, and 180-120% of the thickness of the B-stage epoxy resin layer in the case of press fitting from one side
A height of about 220% is preferable. The protrusions (pillars) are arranged, for example, on a stainless steel plate having a thickness of about 5 mm at a predetermined position by arranging a mask having a hole of 0.3 mm on the entire surface of the housing, and the conductive material housed in the housing. It is also possible to use a so-called stamp method in which the conductive paste is pressed and the conductive paste is pushed out from the holes of the mask. In addition, when the protruding conductive paste arranged as described above is cut and a part of the conductive paste is transferred to the second substrate to form a projection (columnar body) having a sharp tip, cutting and drying are performed to a certain degree. It is possible to impart a certain degree of hardness, or if a certain degree of hardness is imparted by drying prior to cutting, it is easy to form a material having a high aspect ratio. Further, the arrangement is, for example, a wiring board in which the through-hole conductor wiring portions are arranged in a matrix at a constant pitch, and the through-hole conductor wiring portions are arranged in a matrix, and the through-hole conductor wiring portions are arbitrarily selected and used. May be.
【0010】本発明において、前記導電性バンプが貫挿
され、貫通型の導体配線部を形成する合成樹脂系シート
としては、たとえば熱可塑性樹脂フイルム(シート)が
挙げられ、その厚さは25〜 300μm 程度が好ましい。こ
こで、熱可塑性樹脂シートとしては、たとえばポリカー
ボネート樹脂,ポリスルホン樹脂,熱可塑性ポリイミド
樹脂,4フッ化ポリエチレン樹脂,6フッ化ポリプロピ
レン樹脂,ポリエーテルエーテルケトン樹脂などのシー
ト類が挙げられる。また、硬化前状態に保持される熱硬
化性樹脂シートとしては、エポキシ樹脂,ビスマレイミ
ドトリアジン樹脂,ポリイミド樹脂,フェノール樹脂,
ポリエステル樹脂,メラミン樹脂,あるいはブタジェン
ゴム,ブチルゴム,天然ゴム,ネオプレンゴム,シリコ
ーンゴムなどの生ゴムのシート類が挙げられる。これら
合成樹脂は、単独でもよいが絶縁性無機物や有機物系の
充填物を含有してもよく、さらにガラスクロスやマッ
ト、有機合成繊維布やマット、あるいは紙などの補強材
と組み合わせて成るシートであってもよい。In the present invention, examples of the synthetic resin sheet having the conductive bumps inserted therethrough to form a through-type conductor wiring portion include a thermoplastic resin film (sheet) having a thickness of 25 to About 300 μm is preferable. Here, examples of the thermoplastic resin sheet include sheets of polycarbonate resin, polysulfone resin, thermoplastic polyimide resin, tetrafluoropolyethylene resin, hexafluoropolypropylene resin, polyetheretherketone resin, and the like. Further, as the thermosetting resin sheet to be kept in the pre-curing state, epoxy resin, bismaleimide triazine resin, polyimide resin, phenol resin,
Examples thereof include polyester resins, melamine resins, and raw rubber sheets such as butadiene rubber, butyl rubber, natural rubber, neoprene rubber, and silicone rubber. These synthetic resins may be used alone or may contain an insulating inorganic or organic filler, and are a sheet formed by combining with a reinforcing material such as glass cloth or mat, organic synthetic fiber cloth or mat, or paper. It may be.
【0011】さらに、本発明においては、導電性ペース
トの突起(柱状体)を形設した第1の基体主面に第2の
基体主面を対向配置し、軽く圧着後、突起ないし柱状体
をほぼ中央部で切断する際の圧着時、あるいは導電性バ
ンプ形成後、合成樹脂系シート主面を対接させて積層配
置して成る積層体を加熱・加圧するとき、両側に当て板
として、寸法や変形の少ない金属板もしくは耐熱性樹脂
板、たとえばステンレス板,真鍮板、ポリイミド樹脂板
(シート),ポリテトラフロロエチレン樹脂板(シー
ト)などを使用することが望ましい。Further, according to the present invention, the second base main surface is opposed to the first main base surface on which the projection (columnar body) of the conductive paste is formed, and the projections or columnar bodies are lightly pressure-bonded. When pressure is applied when cutting at approximately the center, or after the conductive bumps are formed, when the laminated body made by stacking the synthetic resin sheet main surfaces in contact with each other is heated and pressed, the size of the contact plates on both sides It is desirable to use a metal plate or a heat-resistant resin plate with little deformation, such as a stainless plate, a brass plate, a polyimide resin plate (sheet), or a polytetrafluoroethylene resin plate (sheet).
【0012】[0012]
【作用】本発明に係る印刷配線板の製造方法によれば、
配線層間を電気的に接続する層間の導体配線部は、いわ
ゆる積層一体化する工程での加熱・加圧により、層間絶
縁層を成す合成樹脂系シートの可塑状態化と、支持基体
面の先端の尖った導電性バンプの圧入とによって、確実
に信頼性の高い配線層間の電気的な接続が達成される。
つまり、層間接続用孔の穿設工程の省略など、プロセス
の簡易化を図りながら、微細な配線パターン層間を任意
な位置(箇所)で、高精度にかつ信頼性の高い電気的な
接続を形成し得るので、配線密度の高い印刷配線板を低
コストで製造することが可能となり、また前記配線パタ
ーン層間の電気的な接続に当たり、接続孔の形設も不要
となるので、その分高密度配線および高密度実装の可能
な印刷配線板が得られることになる。According to the method of manufacturing a printed wiring board according to the present invention,
The conductor wiring portion between the layers for electrically connecting the wiring layers is heated and pressed in a so-called laminated integration process so that the synthetic resin sheet forming the interlayer insulating layer is plasticized and the tip of the support base surface is By press-fitting the sharp conductive bumps, reliable electrical connection between wiring layers is achieved.
In other words, while simplifying the process such as omitting the step of forming holes for interlayer connection, highly precise and reliable electrical connection is formed at any position (location) between fine wiring pattern layers. Therefore, it becomes possible to manufacture a printed wiring board having a high wiring density at low cost, and it is not necessary to form a connection hole for electrical connection between the wiring pattern layers. And a printed wiring board capable of high-density mounting can be obtained.
【0013】[0013]
【実施例】以下図1〜図9を参照して本発明の実施例を
説明する。Embodiments of the present invention will be described below with reference to FIGS.
【0014】実施例1 図1〜図7は本実施例の実施態様を模式的に示したもの
である。先ず、厚さ50μm のポリイミド樹脂フィルム
(商品名,カプトンフィルム,東レKK)を第1の基体
シート1として、また粘度 700 dPa・s(25℃) ,チクソ
比 7.5(1rpm:10rpm)のポリサルホン樹脂をバインダーと
して成る銀ペースト(乾燥時の銀組成比92%)を導電性
ペーストとして、さらに板厚 100μm のステンレス板の
所定箇所に0.4mm径の穴を明けたメタルマスクを用意し
た。そして、前記ポリイミド樹脂フィルム1面に、前記
メタルマスクを位置決め配置して導電性ペーストをスク
リーン印刷し、導電性ペーストの突起(柱状体)2を塗
布・形成した。その後、導電性ペーストの柱状体2を塗
布・形成したポリイミド樹脂フィルム1を、厚さ10mmの
ステンレス板3面に熱圧着により張り付け平面性を保持
する一方、別に厚さ10mmのステンレス板3′面に、第2
の基体としてのポリイミド樹脂フィルム1′を熱圧着に
より張り付け平面性を保持させたものを用意した。次い
で、前記ステンレス板3,3′面に張り付けられたポリ
イミド樹脂フィルム1,1′を、図1に断面的に示すよ
うに対向・配置し、導電性ペースト柱状体2の先端面
に、第2の基体を成すポリイミド樹脂フィルム1′を軽
く圧着させて、図2に断面的に示すような状態を採らせ
た。Example 1 FIGS. 1 to 7 schematically show an embodiment of this example. First, a 50 μm thick polyimide resin film (trade name, Kapton film, Toray KK) is used as the first base sheet 1, and a polysulfone resin having a viscosity of 700 dPa · s (25 ° C.) and a thixo ratio of 7.5 (1 rpm: 10 rpm). As a conductive paste, a silver paste (92% of the silver composition ratio when dried) was used as a binder, and a metal mask having a 0.4 mm diameter hole was prepared at a predetermined position of a stainless steel plate having a plate thickness of 100 μm. Then, the metal mask was positioned and arranged on the surface of the polyimide resin film 1, and the conductive paste was screen-printed to apply and form the projections (columnar bodies) 2 of the conductive paste. After that, the polyimide resin film 1 on which the columnar body 2 of the conductive paste is applied and formed is adhered to the surface of the stainless steel plate 3 having a thickness of 10 mm by thermocompression bonding to maintain the flatness, while the surface of the stainless steel plate 3'having a thickness of 10 mm is separately attached. Second
A polyimide resin film 1'as a substrate was attached by thermocompression to maintain its flatness. Next, the polyimide resin films 1 and 1 ′ attached to the stainless steel plates 3 and 3 ′ are opposed and arranged as shown in a sectional view in FIG. The polyimide resin film 1'that forms the substrate of Fig. 2 was lightly pressure-bonded to obtain a state as shown in a sectional view in Fig. 2.
【0015】上記により、対向する両ポリイミド樹脂フ
ィルム1,1′面間に、導電性ペースト柱状体2を圧着
的に保持した後、これら両ポリイミド樹脂フィルム1,
1′の対向面間を徐々に引き離すと、前記導電性ペース
ト柱状体2は生乾き状態であるため、前記対向面間の引
き離しに対応して、図3に断面的に示すように伸長され
る。この導電性ペースト柱状体2の伸長過程で、適宜加
熱処理を施すと、導電性ペースト柱状体2は乾燥硬化
(固化)する一方、ほぼ中央部で引っ張り・切断するこ
とにより、図4に断面的に示すように、互いに対応する
主面位置(箇所)に、先端の尖った導電性バンプ4がそ
れぞれ形成された。As described above, after the conductive paste columnar body 2 is pressure-bondedly held between the opposing polyimide resin films 1 and 1'side, both polyimide resin films 1 and 1 '
When the opposing surfaces of 1'are gradually separated, the conductive paste columnar body 2 is in a dry state, so that the conductive paste columnar bodies 2 are expanded as shown in a sectional view in FIG. 3, corresponding to the separation between the opposed surfaces. When the heat treatment is appropriately applied in the process of extending the conductive paste columnar body 2, the conductive paste columnar body 2 is dried and hardened (solidified), while it is pulled and cut at substantially the center portion to form a cross-section in FIG. As shown in FIG. 3, the conductive bumps 4 having sharp tips were formed at the main surface positions (locations) corresponding to each other.
【0016】次に、前記先端の尖った導電性バンプ4を
形成したポリイミド樹脂フィルム1,1′面間に、ガラ
スクロス入り合成樹脂系シート5、すなわちポリフェニ
レンサルファイド樹脂含浸・被着の厚さ75μm (ガラス
クロスの織り密度60×46本/25mm,厚さ60μm )の合成
樹脂系シート5を、図5に断面的に示すごとく配置し、
約 300℃に保持した熱プレスの熱板間に配置して(図示
せず)、合成樹脂系シート5が熱可塑化した状態のと
き、樹脂圧として 500 MPaで加圧し、そのまま冷却後取
りだし、表裏のシート1,1′を剥離したところ、図6
に断面的に示すごとく、前記対向する導電性バンプ4が
合成樹脂系シート5中にに圧入し、互いに対向する導電
性バンプ4同士が接続して合成樹脂系シート5の厚さ方
向に貫通する導体配線部6を備えた印刷配線板が得られ
た。Next, a synthetic resin sheet 5 containing glass cloth, that is, a polyphenylene sulfide resin impregnated / adhered thickness of 75 μm is provided between the surfaces of the polyimide resin films 1 and 1'on which the conductive bumps 4 having sharp tips are formed. A synthetic resin sheet 5 having a glass cloth weave density of 60 × 46/25 mm and a thickness of 60 μm is arranged as shown in a sectional view in FIG.
It is placed between hot plates of a hot press maintained at about 300 ° C (not shown), and when the synthetic resin sheet 5 is in a thermoplasticized state, it is pressurized with a resin pressure of 500 MPa, then cooled and taken out, When the front and back sheets 1 and 1'are peeled off, as shown in FIG.
As shown in cross section, the opposing conductive bumps 4 are press-fitted into the synthetic resin sheet 5, and the opposing conductive bumps 4 are connected to each other and penetrate in the thickness direction of the synthetic resin sheet 5. A printed wiring board including the conductor wiring portion 6 was obtained.
【0017】前記形成した貫通型の導体配線部6につい
て、テスターで各導体配線部6を表裏面から導通テスト
したところ、全数が 0.5Ω以下の抵抗であった。また、
前記印刷配線板の両面に導電性ペースト系の配線パター
ンを印刷形成し、貫通型の導体配線部6を利用して両面
導通型の印刷配線板として十分な機能を発揮した。With respect to the through-hole type conductor wiring portions 6 formed as described above, a continuity test was conducted on the respective conductor wiring portions 6 from the front and back sides with a tester. As a result, the total resistance was 0.5 Ω or less. Also,
A conductive paste wiring pattern was formed by printing on both surfaces of the printed wiring board, and the penetrating conductor wiring portion 6 was utilized to exert a sufficient function as a double-sided conductive printed wiring board.
【0018】なお、上記実施例において、ポリイミド樹
脂フィルム1面に、所要のメタルマスクを位置決め配置
し、導電性ペーストをスクリーン印刷して、導電性ペー
ストの突起(柱状体)2を一定間隔の格子状に塗布・形
成した以外は、同様にして対向する導電性バンプ4が合
成樹脂系シート5中に圧入し、互いに対向する導電性バ
ンプ4同士が接続して、図7に要部構成を斜視的に示す
ような、合成樹脂系シート5の厚さ方向に貫通する導体
配線部6を格子状に備えた印刷配線板を得た。そして、
この印刷配線板の両面に導電性ペースト系の配線パター
ンを印刷形成し、貫通型の導体配線部6の一部を選択的
に利用して両面導通型の印刷配線板として十分な機能を
発揮した。In the above embodiment, the required metal mask is positioned and arranged on the surface of the polyimide resin film, the conductive paste is screen-printed, and the projections (columnar bodies) 2 of the conductive paste are arranged at regular intervals. The conductive bumps 4 facing each other are press-fitted into the synthetic resin sheet 5 in the same manner except that the conductive bumps 4 are applied and formed in a similar manner, and the conductive bumps 4 facing each other are connected to each other. To obtain a printed wiring board in which the conductor wiring portions 6 penetrating in the thickness direction of the synthetic resin sheet 5 as shown in FIG. And
A conductive paste wiring pattern is formed by printing on both sides of this printed wiring board, and a part of the through-type conductor wiring portion 6 is selectively used to exert a sufficient function as a double-sided conduction type printed wiring board. .
【0019】実施例2 図8および図9は本実施例の実施態様を模式的に示す断
面図である。本実施例は、上記実施例1の場合におい
て、第1の基体シート1としてポリイミド樹脂フイルム
を、また通常、印刷配線板の製造に使用されている厚さ
18μm の電解銅箔1a′(第2の基体シート1′)片面張
りBステージのガラスクロス入りエポキシ樹脂系シート
5を、さらに粘度 600 dPa・s(25℃) ,チクソ比 5.5(1
rpm:10rpm)のエポキシ樹脂をバインダーとして成る銀ペ
ースト(乾燥時の銀組成比92%)を導電性ペーストとし
てそれぞ用意した。Embodiment 2 FIGS. 8 and 9 are sectional views schematically showing an embodiment of this embodiment. In this example, in the case of the above-mentioned Example 1, a polyimide resin film was used as the first base sheet 1, and a thickness normally used for manufacturing a printed wiring board.
An 18 μm electrolytic copper foil 1a ′ (second substrate sheet 1 ′) with a single-sided B-stage glass cloth-containing epoxy resin sheet 5 further having a viscosity of 600 dPa · s (25 ° C.) and a thixo ratio of 5.5 (1
A silver paste (silver composition ratio of 92% when dried) using an epoxy resin as a binder (rpm: 10 rpm) was prepared as a conductive paste.
【0020】次いで、実施例1の場合と同様にして、先
ず図4に示すような先端の尖った導電性バンプ4を形成
したポリイミド樹脂フィルム1を、前記電解銅箔1a′片
面張りBステージのガラスクロス入りエポキシ樹脂系シ
ート5面に、図8に断面的に示すごとく、導電性バンプ
4をエポキシ樹脂系シート5面と対向させて積層配置
し、この積層体につき 120℃,樹脂圧 500 kPaの条件で
プレス加工を行ってから、 170℃に昇温してエポキシ樹
脂系シート5の樹脂分を硬化させた。その後、冷却・取
り出し、ポリイミド樹脂フィルム1を剥離したところ、
図9に断面的に示すように、前記先端の尖った導電性バ
ンプ4がエポキシ樹脂系シート5を貫通し、その先端部
が電解銅箔1a′面に電気的に接続した片面銅箔1a′張り
板を作成した。 この銅箔1a′張り板の銅箔1a′面に、
通常のエッチングレジストインク(商品名,PSR-4000
H,太陽インキKK)をスクリーン印刷し、導体パター
ン部をマスクしてから、塩化第2銅をエッチング液とし
てエッチング処理後、レジストマスク剥離して、両面印
刷配線板を得た。こうして製造した両面型印刷配線板に
ついて、通常実施されている電気チェックを行ったとこ
ろ、全ての接続に不良ないし信頼性などの問題が認めら
れなかった。Then, in the same manner as in Example 1, first, the polyimide resin film 1 having the conductive bumps 4 with sharp tips as shown in FIG. As shown in a sectional view in FIG. 8, conductive bumps 4 are laminated on the surface of the epoxy resin sheet 5 containing glass cloth so as to face the surface of the epoxy resin sheet 5, and the laminated body is 120 ° C. and the resin pressure is 500 kPa. After press working under the conditions described above, the temperature was raised to 170 ° C. to cure the resin component of the epoxy resin sheet 5. After that, when cooled and taken out and the polyimide resin film 1 was peeled off,
As shown in a sectional view in FIG. 9, the conductive bumps 4 having sharp tips penetrate the epoxy resin sheet 5, and the tips thereof are electrically connected to the electrolytic copper foil 1a ′ surface. Created a veneer. On the copper foil 1a 'side of this copper foil 1a' clad plate,
Normal etching resist ink (product name, PSR-4000
H, Taiyo Ink KK) was screen-printed to mask the conductor pattern portion, and after the etching treatment with cupric chloride as an etching solution, the resist mask was peeled off to obtain a double-sided printed wiring board. When the thus-produced double-sided printed wiring board was subjected to an electrical check that is usually carried out, no problems such as defects or reliability were found in all connections.
【0021】実施例3 本実施例は、上記実施例2の場合において、第1の基体
シートとしてポリイミド樹脂フイルムの代わりに厚さ35
μm の電解銅箔を用いた外は、実施例2の場合と同様の
条件とし、先ず、先端が尖った導電性バンプを、前記両
電解銅箔面の対向位置にそれぞれ形成した後、これら先
端が尖った導電性バンプの対向面間に、合成樹脂系シー
トを積層的に配置し、加熱・加圧加工を施して、両電解
銅箔間を貫通型に接続した導体配線部を有する両面銅張
板を作成した。Example 3 This example is the same as the above Example 2, except that the first base sheet has a thickness of 35 mm instead of the polyimide resin film.
Under the same conditions as in Example 2 except that the electrolytic copper foil of μm was used, first, conductive bumps having sharp tips were respectively formed at the facing positions of the both electrolytic copper foil surfaces, and then these tips were formed. A double-sided copper with conductor wiring part in which synthetic resin sheets are stacked in layers between the facing surfaces of sharp conductive bumps and subjected to heating and pressure processing, and a through-type connection is made between both electrolytic copper foils. Created a veneer.
【0022】この両面銅張板の両面に、通常のエッチン
グレジストインク(商品名,PSR-4000 H,製造元:太陽
インキKK)をスクリーン印刷し、導体パターン部をマ
スクしてから、塩化第2銅をエッチング液としてエッチ
ング処理後、レジストマスク剥離して、両面印刷配線板
を得た。こうして製造した両面型印刷配線板について、
通常実施されている電気チェックを行ったところ、全て
の接続に不良ないし信頼性などの問題が認められなかっ
た。また、前記両面導電パターン間の接続の信頼性を評
価するため、ホットオイルテストで( 260℃のオイル中
に10秒浸漬,20℃のオイル中に20秒浸漬のサイクルを 1
サイクルとして)、 500回行っても不良発生は認められ
ず、従来の銅メッキ法による場合に比較して、導電(配
線)パターン層間の接続信頼性が格段にすぐれていた。A normal etching resist ink (trade name, PSR-4000 H, manufacturer: Taiyo Ink KK) is screen-printed on both sides of this double-sided copper clad board, and after masking the conductor pattern portion, cupric chloride After the etching treatment with the above as an etching solution, the resist mask was peeled off to obtain a double-sided printed wiring board. Regarding the double-sided printed wiring board manufactured in this way,
When the electrical check that was normally performed was performed, no problems such as defects or reliability were found in all the connections. In addition, in order to evaluate the reliability of the connection between the double-sided conductive patterns, a hot oil test (a cycle of immersion in oil at 260 ° C for 10 seconds and immersion in oil at 20 ° C for 20 seconds 1
As a cycle), no defect was observed even after 500 times, and the connection reliability between the conductive (wiring) pattern layers was remarkably excellent as compared with the case of the conventional copper plating method.
【0023】[0023]
【発明の効果】本発明によれば、導体(配線)パターン
層間を接続する導電性バンプを形設する工程、合成樹脂
系シートを積層的に配置して熱プレスする工程、外層パ
ターニングする工程というプロセスの簡略化、換言する
と製造工程数を従来の製造方法に比べ格段に少ない工程
に低減しながら、両面型印刷配線板ないし多層型印刷配
線板を容易に製造することが可能となる。特に工程の繰
り返しが多い多層型印刷配線板の製造においては、大幅
な工程数の低減となり、生産性ないし量産性の向上に効
果がある。そして、従来の多層型印刷配線板などの製造
工程で、必要不可欠であった孔明け工程、メッキ工程が
不要になることに伴い、製造工程で発生する不良が大幅
に抑えられ、歩留まりが向上するばかりでなく、信頼性
の高い印刷配線板が得られることになる。According to the present invention, the steps of forming conductive bumps for connecting conductor (wiring) pattern layers, the steps of arranging synthetic resin sheets in a laminated manner and hot pressing, and the steps of patterning the outer layer are included. It becomes possible to easily manufacture a double-sided printed wiring board or a multilayer printed wiring board while simplifying the process, in other words, reducing the number of manufacturing steps to a significantly smaller number of steps as compared with the conventional manufacturing method. Particularly in the production of a multilayer printed wiring board in which many steps are repeated, the number of steps is significantly reduced, which is effective in improving productivity or mass productivity. Then, since the punching step and the plating step, which are indispensable in the conventional manufacturing process of the multilayer printed wiring board and the like, are not necessary, the defects occurring in the manufacturing process are significantly suppressed, and the yield is improved. Not only that, a highly reliable printed wiring board can be obtained.
【0024】また、製造される印刷配線板は、層間接続
用の孔が表面に存在しないので、配線密度の格段な向上
を図り得るし、電子部品の実装用エリアも、孔の位置に
関係なく設定し得ることになり、実装密度も格段に向上
し、ひいては実装電子部品間の距離を短縮できるので、
回路の性能向上をも図り得る。つまり、本発明は、印刷
配線板の低コス化に寄与するだけでなく、実装回路装置
のコンパクト化や、高性能化などにも大きく寄与するも
のといえる。Further, since the printed wiring board to be manufactured does not have holes for interlayer connection on the surface, the wiring density can be remarkably improved, and the mounting area for electronic parts can be irrespective of the position of the holes. Since it can be set, the mounting density is significantly improved, and the distance between the mounted electronic components can be shortened.
The performance of the circuit can be improved. That is, it can be said that the present invention not only contributes to the reduction of the cost of the printed wiring board, but also contributes to the downsizing of the mounted circuit device and the high performance thereof.
【図1】本発明の実施態様例を模式的に示すもので、導
電性ペーストの突起を設けた第1の基板面を第2の基板
面と対向配置した状態を示す断面図。FIG. 1 is a cross-sectional view schematically showing an embodiment of the present invention, showing a state in which a first substrate surface provided with protrusions of a conductive paste is arranged so as to face a second substrate surface.
【図2】本発明の実施態様例を模式的に示すもので、第
1の基板面に設けた導電性ペースト突起を対向する第2
の基板面に圧接した状態を示す断面図。FIG. 2 schematically shows an embodiment example of the present invention, in which a second conductive paste projection provided on a first substrate surface is opposed to a second conductive paste projection.
FIG. 4 is a cross-sectional view showing a state in which the substrate surface is pressed against.
【図3】本発明の実施態様例を模式的に示すもので、第
1の基板および第2の基板を引き離し圧接した導電性ペ
ースト突起を引き伸ばす状態を示す断面図。FIG. 3 schematically shows an embodiment of the present invention, and is a cross-sectional view showing a state in which a conductive paste protrusion that is separated from the first substrate and the second substrate and pressed against each other is stretched.
【図4】本発明の実施態様例を模式的に示すもので、第
1の基板および第2の基板を引き離し導電性ペースト突
起を切断し導電性バンプを形成した状態を示す断面図。FIG. 4 is a cross-sectional view schematically showing an embodiment of the present invention, showing a state in which a first substrate and a second substrate are separated and conductive paste projections are cut to form conductive bumps.
【図5】本発明の実施態様例を模式的に示すもので、第
1の基板および第2の基板の導電性バンプ形成面間に、
合成樹脂系シートを介在させて積層配置した状態を示す
断面図。FIG. 5 schematically shows an embodiment example of the present invention, in which the conductive bump formation surfaces of the first substrate and the second substrate are
FIG. 3 is a cross-sectional view showing a state in which a synthetic resin sheet is interposed and stacked.
【図6】本発明の実施態様例を模式的に示すもので、第
1の基板,合成樹脂系シー,および第2の基板積層体を
熱プレスし、合成樹脂系シートの厚さ方向に貫通する導
体配線部を圧入形成した後、第1の基板および第2の基
板を剥離した状態を示す断面図。FIG. 6 schematically shows an embodiment example of the present invention, in which a first substrate, a synthetic resin sheet, and a second substrate laminate are hot pressed to penetrate the synthetic resin sheet in the thickness direction. FIG. 4 is a cross-sectional view showing a state in which the first substrate and the second substrate are separated after the conductor wiring portion to be formed is press-fitted.
【図7】本発明の他の実施態様例において製造した印刷
配線板の要部を示す斜視図。FIG. 7 is a perspective view showing a main part of a printed wiring board manufactured according to another embodiment of the present invention.
【図8】本発明のさらに他の実施態様例を模式的に示す
もので、第1の基板の導電性バンプ形成面を、片面銅箔
張り合成樹脂系シートに位置合わせ配置した状態を示す
断面図。FIG. 8 is a schematic view showing still another embodiment of the present invention, showing a state in which the conductive bump formation surface of the first substrate is aligned and arranged on a single-sided copper foil-clad synthetic resin sheet. Fig.
【図9】本発明のさらに他の実施態様例において製造し
た片面銅箔張り印刷配線板の要部を示す斜視図。FIG. 9 is a perspective view showing a main part of a single-sided copper foil-clad printed wiring board manufactured according to still another embodiment of the present invention.
1…第1の基体 1′,1a′…第2の基体 2…導
電性ペースト突起(柱状体) 3,3′…ステンレス
板(支持板) 4…導電性バンプ 5…合成樹脂系
シート 6…層間貫通型の導体配線部DESCRIPTION OF SYMBOLS 1 ... 1st base | substrate 1 ', 1a' ... 2nd base | substrate 2 ... Conductive paste protrusion (columnar body) 3, 3 '... Stainless plate (supporting plate) 4 ... Conductive bump 5 ... Synthetic resin type sheet 6 ... Interlayer penetration type conductor wiring part
───────────────────────────────────────────────────── フロントページの続き (72)発明者 新井 康司 神奈川県川崎市幸区小向東芝町1番地 株 式会社東芝小向工場内 (72)発明者 古渡 定雄 神奈川県川崎市幸区小向東芝町1番地 株 式会社東芝小向工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Koji Arai, 1 Komukai Toshiba-cho, Sachi-ku, Kawasaki-shi, Kanagawa Inside the Komukai factory, Toshiba Corporation (72) Inventor Sadao Furuwato, Komukai-Toshiba, Kawasaki-shi, Kanagawa Town No. 1 Incorporation company Toshiba Komukai factory
Claims (1)
ストを突起状に配置する工程と、 前記配置した突起状導電性ペースト先端面に、第2の基
体主面を対接させる工程と、 前記第1の基体および第2の基体の対向面を引き離し、
突起状導電性ペーストのほぼ中央で引き伸し切断して先
端部が尖った導電性バンプを形成する工程と、 前記導電性バンプを形成面に、合成樹脂系シート主面を
対接させて積層配置する工程と、 前記積層体を加熱して合成樹脂系シートの樹脂分が可塑
状態になった温度で積層体を加圧し、前記合成樹脂系シ
ートの厚さ方向に、前記導電性バンプを貫挿させ、貫通
型の導体配線部を形成する工程とを具備して成ることを
特徴とする印刷配線板の製造方法。1. A step of arranging a conductive paste in a protruding shape at a predetermined position on a first main surface of a base, and a step of bringing the second main surface of a substrate into contact with the end surface of the protruding conductive paste thus arranged. And separating the facing surfaces of the first and second substrates,
A step of forming a conductive bump having a sharp tip by stretching and cutting at approximately the center of the protruding conductive paste; and stacking the conductive bump-forming surface with the synthetic resin sheet main surface in contact with each other. The step of arranging, the laminated body is heated and the laminated body is pressed at a temperature at which the resin content of the synthetic resin sheet becomes a plastic state, and the conductive bump is penetrated in the thickness direction of the synthetic resin sheet. And a step of forming a penetrating conductor wiring portion, the method for manufacturing a printed wiring board.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13564793A JP3428070B2 (en) | 1993-06-07 | 1993-06-07 | Manufacturing method of printed wiring board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13564793A JP3428070B2 (en) | 1993-06-07 | 1993-06-07 | Manufacturing method of printed wiring board |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06350250A true JPH06350250A (en) | 1994-12-22 |
JP3428070B2 JP3428070B2 (en) | 2003-07-22 |
Family
ID=15156694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13564793A Expired - Lifetime JP3428070B2 (en) | 1993-06-07 | 1993-06-07 | Manufacturing method of printed wiring board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3428070B2 (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997019579A1 (en) * | 1995-11-17 | 1997-05-29 | Kabushiki Kaisha Toshiba | Multilayered wiring board, prefabricated material for multilayered wiring board, process of manufacturing multilayered wiring board, electronic parts package, and method for forming conductive pillar |
US6664637B2 (en) | 1999-05-10 | 2003-12-16 | International Business Machines Corporation | Flip chip C4 extension structure and process |
KR100529405B1 (en) * | 2000-12-26 | 2005-11-17 | 가부시키가이샤 덴소 | Printed wiring board and method for manufacturing printed wiring board |
JP2009124173A (en) * | 2005-11-16 | 2009-06-04 | Samsung Electro-Mechanics Co Ltd | Printed circuit board using paste bump, and method of manufacturing the same |
EP2131394A1 (en) * | 2008-06-06 | 2009-12-09 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device and method for manufacturing the same |
JP2010067687A (en) * | 2008-09-09 | 2010-03-25 | Dainippon Printing Co Ltd | Method for manufacturing multilayer printed wiring board and method for manufacturing substrate sheet with conductive bump |
US7754978B2 (en) | 2004-01-30 | 2010-07-13 | Ibiden Co., Ltd. | Multilayer printed wiring board and method of manufacturing the same |
JP2010529693A (en) * | 2007-06-11 | 2010-08-26 | ピーピージー インダストリーズ オハイオ, インコーポレイテッド | Method for forming a solid blind via through a dielectric coating on a high density interconnect (HDI) substrate material |
US8053253B2 (en) | 2008-06-06 | 2011-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8148818B2 (en) | 2008-05-23 | 2012-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
-
1993
- 1993-06-07 JP JP13564793A patent/JP3428070B2/en not_active Expired - Lifetime
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997019579A1 (en) * | 1995-11-17 | 1997-05-29 | Kabushiki Kaisha Toshiba | Multilayered wiring board, prefabricated material for multilayered wiring board, process of manufacturing multilayered wiring board, electronic parts package, and method for forming conductive pillar |
US6010769A (en) * | 1995-11-17 | 2000-01-04 | Kabushiki Kaisha Toshiba | Multilayer wiring board and method for forming the same |
US6664637B2 (en) | 1999-05-10 | 2003-12-16 | International Business Machines Corporation | Flip chip C4 extension structure and process |
US6756680B2 (en) | 1999-05-10 | 2004-06-29 | International Business Machines Corporation | Flip chip C4 extension structure and process |
US6955982B2 (en) | 1999-05-10 | 2005-10-18 | International Business Machines Corporation | Flip chip C4 extension structure and process |
KR100529405B1 (en) * | 2000-12-26 | 2005-11-17 | 가부시키가이샤 덴소 | Printed wiring board and method for manufacturing printed wiring board |
US7971354B2 (en) | 2004-01-30 | 2011-07-05 | Ibiden Co., Ltd. | Method of manufacturing a multilayer printed wiring board |
US7754978B2 (en) | 2004-01-30 | 2010-07-13 | Ibiden Co., Ltd. | Multilayer printed wiring board and method of manufacturing the same |
JP2009124173A (en) * | 2005-11-16 | 2009-06-04 | Samsung Electro-Mechanics Co Ltd | Printed circuit board using paste bump, and method of manufacturing the same |
JP2010529693A (en) * | 2007-06-11 | 2010-08-26 | ピーピージー インダストリーズ オハイオ, インコーポレイテッド | Method for forming a solid blind via through a dielectric coating on a high density interconnect (HDI) substrate material |
US8148818B2 (en) | 2008-05-23 | 2012-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
EP2131394A1 (en) * | 2008-06-06 | 2009-12-09 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device and method for manufacturing the same |
US7888163B2 (en) | 2008-06-06 | 2011-02-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8053253B2 (en) | 2008-06-06 | 2011-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US8420409B2 (en) | 2008-06-06 | 2013-04-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
JP2010067687A (en) * | 2008-09-09 | 2010-03-25 | Dainippon Printing Co Ltd | Method for manufacturing multilayer printed wiring board and method for manufacturing substrate sheet with conductive bump |
Also Published As
Publication number | Publication date |
---|---|
JP3428070B2 (en) | 2003-07-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2006118141A1 (en) | Multilayer wiring board and method for producing same | |
JP3654982B2 (en) | Manufacturing method of multilayer printed wiring board | |
JPH06350250A (en) | Production of printed wiring board | |
JPH08139450A (en) | Manufacturing method of printed-wiring board | |
JPH06342977A (en) | Manufacture of printed circuit board | |
JP3474894B2 (en) | Printed wiring board and manufacturing method thereof | |
JP3431259B2 (en) | Manufacturing method of printed wiring board | |
JPH0923067A (en) | Multilayered printed wiring board and its manufacture | |
JP3609126B2 (en) | Printed wiring board and method for producing printed wiring board manufacturing member | |
JP3167840B2 (en) | Printed wiring board and method for manufacturing printed wiring board | |
JP3348004B2 (en) | Multilayer wiring board and method of manufacturing the same | |
JPH08264939A (en) | Manufacture of printed wiring board | |
JP3474896B2 (en) | Printed wiring board and manufacturing method thereof | |
JP3474897B2 (en) | Printed wiring board and method of manufacturing the same | |
JP3474913B2 (en) | Manufacturing method of printed wiring board | |
JPH0946041A (en) | Manufacture of printed wiring board | |
JP3694708B2 (en) | Printed wiring board manufacturing method and printed wiring board | |
JP3549063B2 (en) | Manufacturing method of printed wiring board | |
JP2008181914A (en) | Multilayer printed-wiring board and manufacturing method thereof | |
JP2002374068A (en) | Method for manufacturing multilayered printed circuit board | |
JP3474910B2 (en) | Manufacturing method of printed wiring board | |
JP3474911B2 (en) | Material for printed wiring board, printed wiring board and method for manufacturing the same | |
JP3628313B2 (en) | Printed wiring board and manufacturing method thereof | |
JP4014667B2 (en) | Manufacturing method of multilayer printed circuit board | |
JPH08125344A (en) | Manufacture of printed wiring board |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20030422 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090516 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090516 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100516 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110516 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120516 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120516 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130516 Year of fee payment: 10 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140516 Year of fee payment: 11 |
|
EXPY | Cancellation because of completion of term |