JPH06134984A - Ink-jet recording head, manufacture thereof and recorder - Google Patents

Abstract

PURPOSE:To provide a highly reliable head, which can maintain the excellent printing quality for a long period, by increasing the strength of an ink repelling film. CONSTITUTION:The peripheral part of the orifice of an ink-jet recording head is processed with the mixture of the compound (a), which generates R1Si(OH)3 by hydrolysis (R1 is a group, which is selected from groups comprising fluoroalkyl group of C1-20, fluoroaryl group, fluorocycloalkyl group, fluoroalkylaryl group and fluoroarylalkyl group, and the ratio of the number of the element of fluorine and the number of the elements other than the fluorine and carbon is 1:1 or more) and the compound containing amino group (b). Thus, an ink repelling film 107 is formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention discharges a recording liquid generally called ink from a fine port (orifice) as a small droplet,
A recording head of an inkjet recording apparatus for flying and recording by depositing these small droplets on a recording surface, and more particularly, to an inkjet recording head with an improved peripheral edge of an ink ejection port and a manufacturing method thereof, and the recording head. The present invention relates to a recording device.

[0002]

2. Description of the Related Art Among various recording methods known at present, it is a non-impact recording method in which noise is hardly generated during recording, high-speed recording is possible, and a special fixing process is required for plain paper. The so-called ink-jet recording method, which enables recording without doing so, is recognized as an extremely useful recording method. Regarding this ink jet recording method, various methods have been proposed so far, some of which have been improved and commercialized, and some of which are still being put into practical use.

The ink jet recording method, in short, ejects small droplets of a recording liquid called ink,
Recording is performed by attaching it to a recording member such as paper. The inkjet recording method is roughly classified into several methods based on the method of generating recording droplets, the control method for controlling the flight direction of the droplets, and the like.

Among them, one of typical methods is, for example, USP3596275 (Sweet method), USP32.
No. 98030 (Lewis and Brown system), a droplet flow with a controlled charge amount is generated by a continuous vibration generation method, and the droplet flow with a controlled charge amount is uniformly distributed. By flying between the deflection electrodes in which the electric field is driven, recording is performed on the recording member while controlling the flight trajectory of the droplet. This method is also generally called a continuous method.

Another typical system to be compared with this is, for example, the system (BJ system) disclosed in Japanese Patent Laid-Open No. 54-59936. In this method, the ink is vaporized by rapidly heating the ink, and the ink is ejected due to a rapid change in the state at that time, and recording is performed on the recording member. Further, for example, USP374712
0 (Stemme method). In this method, an electric recording signal is applied to a piezoelectric vibration element attached to a recording head having an orifice for ejecting a liquid for recording, and this electric recording signal is converted into mechanical vibration of the piezoelectric vibration element. Instead, recording is performed by ejecting and ejecting liquid droplets from the orifices and adhering them to the recording member whenever necessary in accordance with the mechanical vibration. These are so-called on-demand systems.

In the ink jet recording head employed in the ink jet recording system as described above, the physical properties around the so-called orifice from which the ink is ejected are extremely important for always stably ejecting the ink.

That is, when the ink wraps around the outer peripheral surface (orifice surface) of the orifice and an ink pool occurs in a portion near the orifice, when the ink is ejected from the orifice, the flight direction of the ink deviates from the normal direction. In addition, due to the instability of the ink pool state, there is a problem that the flight direction is not constant each time it is ejected, stable droplet ejection cannot be performed, and good recording cannot be obtained. Further, if the entire surface of the orifice is covered with the ink film, a so-called splash phenomenon occurs and ink is scattered, which also makes it impossible to obtain stable recording. Alternatively, if the ink pool covering the orifice becomes large,
Ink ejection from the recording head may even be impossible.

As a method for solving these problems, a conventional method of treating the outer surface surrounding the discharge orifice with silicone oil, gum arabic or the like to make it water-repellent or oil-repellent is disclosed in Japanese Utility Model Publication No. 48-36188. It is known. However, these methods have poor durability because of poor adhesion to members such as glass and metal that form the discharge orifice, and the intended effect was only initial. In addition, the liquid repellency is not sufficient. For example, even if a silicone-based substance exhibits liquid repellency with respect to water-based ink, it is completely liquid-repellent with respect to alcohol-based, ketone-based, ester-based, etc. organic solvent-based ink. Showed no sex.

Further, as a material having improved adhesiveness and improved ink repellency, in JP-A-56-89569, a specific compound called a silane coupling agent having a fluorine-containing group is used. It solves the above problem.

As a typical one of the ink jet recording heads whose outline has been described, there is a structure as shown in FIG. 4, for example. That is, for example, a protective film for protecting the heating element 402 provided on the substrate 401 formed of glass, ceramics, metal, or the like, and the electrode (not shown) for energizing the heating element 402 from electrolytic corrosion of the ink 403. 404 (may be unnecessary), ink channel cover 40
5, the surface having the orifice 406 (orifice surface)
And an ink-repellent film 407. The ink reaches the orifice surface from the inside of the ink flow path 411 formed by the substrate 401 or the protective film 404 and the cover 405. In such an ink jet recording head 400, the heating element 4
By energizing 02, rapid heat generation occurs, bubbles are generated in the ink 403 contacting here, the meniscus 408 is destroyed by the pressure generated by the bubbles, and the ink 403 becomes ink droplets 409 from the orifice 406. , Flying toward and adhering to the recording member 410, and recording is performed. FIG. 5 is an external perspective view of the vicinity of the orifice of this head. Reference numeral 501 is a substrate, 505 is an ink flow path cover, 506 is an orifice, and 507 is an ink repellent film.

FIG. 6 shows another conventional example. That is, for example, the ink filled in the conduit 601 is provided around the outer periphery of the conduit 601 having a fine hollow formed of glass, ceramics, metal, or the like and forming a part of the flow path 604 of the ink 603. The recording head 600 is configured with a piezo element 602, which is a means for ejecting from the ejection orifice 605. As shown by an arrow P, a storage tank for supplying ink is connected to the conduit 601 from a storage tank (not shown) separately provided at one end of the conduit 601 and the flow is performed. Road 604
A pipe 606 which is made of, for example, polyvinyl chloride or the like and constitutes a part of the above is connected. And conduit 60
An ink-repellent film 607 is provided at the end portion of No. 1 to configure the inkjet recording head 600.

Conventionally, as a material for forming the ink repellent film, it has sufficient adhesiveness to the member constituting the orifice as described above, and is sufficient for both water-based ink and organic solvent-based ink. Since it exhibits excellent ink repellency,
A specific compound called a silane coupling agent having a fluorine-containing group has been used.

[0013]

However, even when a silane coupling agent having a fluorine-containing group is used, the following problems occur.

1. When the heat treatment that is usually performed in the curing process after applying the substance to the orifice surface is performed, the substance has fluidity before being cured, and the substance flows into the ink flow path. Therefore, when the completed ink jet recording head is filled with ink, a phenomenon of receding of the ink meniscus occurs, and normal ink ejection cannot be performed.

2. In order to avoid the above-mentioned problem, for example, some additional process such as applying a substance immiscible with the substance (for example, water, paraffin, etc.) into the ink flow path in advance, and then applying the substance or curing the substance is performed. Will be needed.

3. The above-mentioned substance exhibits its performance even if it is formed to be extremely thin, but the substance actually applied has a nonuniform thickness and becomes mottled. It is considered that this is due to the difference in the wettability between the orifice surface and the above substances and the cohesive force, but it is particularly difficult to cure the thickly applied portion. If necessary, the inkjet recording head may have dust or dirt on the orifice surface during use.
In order to remove the ink pool, a so-called "recovery operation" is performed in which the orifice surface is rubbed with rubber or cloth to restore the original normal state. At this time, since the thickly applied portion is insufficiently cured, it may easily peel off, move and adhere to the orifice portion, or get into the ink flow path, which deteriorates the printing quality. There was a lot to do.

The present invention has been made in view of the above points, and when used, stable ejection can be always performed with a substantially uniform liquid amount in a predetermined direction, and it can be sufficiently applied to high-speed recording. An object is to provide an inkjet recording head.

Further, at the time of processing, it is possible to apply and heat cure without requiring a special process such as filling in the ink flow path, and the obtained ink jet recording head is rubbed by a recovery operation. Endures semi-permanently,
It is an object of the present invention to provide a recording head which maintains water repellency and does not cause defects such as defective printing and unprintable properties.

Further, the present invention provides a recording apparatus equipped with such an ink jet recording head.

[0020]

The present invention for achieving the above object has a fine hole as an ink flow path, and one end of the fine hole is used as an orifice to discharge and fly a small droplet of the ink,
In an inkjet recording head that performs recording by depositing the ink droplets on the recording surface, at least the peripheral portion of the orifice is a. A compound that produces R ₁ Si (OH) ₃ by hydrolysis (wherein R ₁ is a fluoroalkyl group having 1 to 20 carbon atoms,
A group selected from the group consisting of fluoroaryl groups, fluorocycloalkyl groups, fluoroalkylaryl groups, and fluoroarylalkyl groups, wherein the ratio of the number of fluorine elements to the number of elements other than fluorine and carbon is 1: 1.
The above-mentioned fluorine-containing groups. ) And b. An ink jet recording head characterized by being treated with a mixture of an amino group-containing compound and.

The present invention will be described in detail below with reference to the drawings. In the present invention, since the solution to the problem is limited to the vicinity of the orifice, only the portion including the orifice of the recording head will be extracted and described in detail below.
The present invention is applicable to any type of ink jet recording head as long as the ink is ejected from the ejection orifice, as long as it complies with the gist of the present invention.

FIG. 2 shows an ink jet recording head in which the orifice surface is exposed, and the heating element 1 is formed on the substrate 101.
02, and further has a protective film 104. A cover 105 is provided thereon so that the heating element 102 and the ink flow path 111 are aligned with each other.

In general, the ink repellent treatment can be performed in this state, and if necessary, in order to minimize the inflow of the ink repellent treatment agent into the ink flow passage 111, a filling material is provided in the ink flow passage. You can also It is important to keep the orifice surface 112 to which the ink repellent treatment agent is applied clean. As a method of keeping clean, a method of washing with a solvent, a method of washing with a surfactant, a method of plasma treatment, a method of introducing oxygen while irradiating ultraviolet rays, and the like are conceivable. This can be omitted if not required. It should be noted that keeping the orifice surface clean is normally performed at the time of adhesion or coating, and does not limit the present invention.

Next, an ink repellent treatment agent is applied to the orifice surface. The ink repellent treatment agent used in the present invention is characterized by using a mixture of the following substances a and b in advance.

A. A compound that produces R ₁ Si (OH) ₃ by hydrolysis (wherein R ₁ is a fluoroalkyl group having 1 to 20 carbon atoms,
A group selected from the group consisting of fluoroaryl groups, fluorocycloalkyl groups, fluoroalkylaryl groups, and fluoroarylalkyl groups, wherein the ratio of the number of fluorine elements to the number of elements other than fluorine and carbon is 1: 1.
The above-mentioned fluorine-containing groups. ) And b. Amino group-containing compound.

The amino group-containing compound is hydrolyzed to give R ₂ Si (OH) ₃ or R ₂ R ₃ Si (OH).
₂ (wherein R ₂ is a group selected from the group consisting of an amino group-containing alkyl group having 1 to 20 carbon atoms and an aryl group, and R ₃ is an alkyl group having 1 to 10 carbon atoms). It is particularly preferred that it is a compound that forms.

Here, the compound a is a kind of fluorine-containing silane coupling agent, and specific examples thereof include the following.

[0028]

[Chemical 1] (15) or (16) is commercially available under the trade name KP-801 (manufactured by Shin-Etsu Chemical Co., Ltd.).

Typical compounds having an amino group include n-propylamine, diethylamine,
Examples thereof include ethylenediamine and triethylamine.

Furthermore, the following silane coupling agents having an amino group can also be used.

[0031]

[Table 1] The mixture of a and b may be a mixture of only a and b, but normally a solvent is used, and when both are dissolved, the coating film can be thinned and the entry into the ink flow path can be suppressed. It is preferable from the point.

The mixing ratio of a and b is 1 for a and 1 for b.
/ 1000 to 100 times can be selected. When the ratio of a is high, the fluidity is exhibited at the time of heat treatment, and there is a high possibility that it will enter the ink flow path. On the contrary, when the ratio of b is high, the ink repellency deteriorates.

B is sometimes used as a catalyst for hydrolysis in a general silane coupling agent for adhesion (reference document, RL Kaus et al., SPE 34th ANTEC Sec).
tion3, 22-26 (1976)). However, since it has a high amino group activity when used for a fluorine-containing silane coupling agent, it may impair the original water and oil repellency of the fluorine-containing silane coupling agent, so it has never been used until now. It was However, it has been found that this method is particularly effective when it is used for the treatment of the orifice surface of an ink jet recording head, because it is possible to suppress the above-mentioned entry into the ink flow path.

The method of applying the mixture or mixed solution of a and b onto the orifice surface is as follows: Thin a and b on the surface of elastic body such as rubber and plastic
A method of applying the mixture by applying pressure transfer to the orifice surface after applying the mixture. In this method, it is not particularly necessary to put the filler in the ink flow path. 2. Methods such as brush coating, spray coating, or dipping in a diluting solution. In this method, there is a possibility that the ink repellent treatment agent may enter the ink flow path, so it is necessary to fill the filling material in the ink flow path. In this case, the filling material may be removed when the application of the ink repellent treatment agent is completed or after the curing is completed.

Next, the applied ink repellent treatment agent is heat-cured to form an ink repellent film. In this way, the inkjet recording head 100 is formed. An external perspective view of the vicinity of the orifice of the obtained ink jet recording head 100 is shown in FIG.

The present invention provides excellent effects particularly in a recording head and a recording apparatus of the type which ejects ink by utilizing thermal energy among the ink jet recording systems.

With regard to its typical structure and principle, it is preferable to use the basic principle disclosed in, for example, US Pat. Nos. 4,723,129 and 4,740,796. This method can be applied to both so-called on-demand type and continuous type.

To briefly explain this recording method, the electrothermal converter arranged corresponding to the sheet or liquid path holding the liquid (ink) corresponds to the recorded information and exceeds the nucleate boiling. By applying at least one drive signal that causes a rapid temperature rise, thermal energy is generated in the electrothermal converter, causing film boiling on the heat acting surface of the recording head. In this way, bubbles can be formed in one-to-one correspondence with the drive signal applied from the liquid (ink) to the electrothermal converter, which is particularly effective for the on-demand type recording method. Due to the growth and contraction of the bubbles, the liquid (ink) is ejected through the ejection port to form at least one droplet. It is more preferable to make the driving signal into a pulse shape because bubbles can be grown and contracted immediately and appropriately, and thus a liquid (ink) with excellent responsiveness can be ejected. As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. If the conditions described in US Pat. No. 4,313,124 relating to the rate of temperature rise on the heat acting surface are adopted, more excellent recording can be performed.

The structure of the recording head is a combination of a discharge port, a liquid flow path, and an electrothermal converter as disclosed in the above-mentioned specifications (straight liquid flow path or right-angled liquid flow path).
US Pat. No. 4,558,333 and US Pat. No. 4,4 which disclose a configuration in which a heat acting portion is arranged in a bending region.
The construction using the specification of No. 59,600 is also included in the present invention.

In addition, Japanese Laid-Open Patent Publication No. 123670/1984 discloses a structure in which a common slit is used as a discharge portion of the electrothermal converter for a plurality of electrothermal converters, and a pressure wave of thermal energy is absorbed. The present invention is also effective as a structure based on Japanese Patent Laid-Open No. 138461 of 1984, which discloses a structure in which the corresponding opening is made to correspond to the ejection portion.

Further, as a recording head to which the present invention is effectively used, there is a full line type recording head having a length corresponding to the maximum width of the recording medium which can be recorded by the recording apparatus. The full line head may be a full line configuration formed by combining a plurality of print heads as disclosed in the above specification, or may be a single full line print head integrally formed.

In addition, by being mounted on the apparatus main body, it can be electrically connected to the apparatus main body and can be supplied with ink from the apparatus main body by a replaceable chip type recording head or the recording head itself. The present invention is also effective when a cartridge-type recording head that is specially provided is used.

Further, it is preferable to add recovery means for the recording head, preliminary auxiliary means, etc. to the recording apparatus of the present invention because the recording apparatus of the present invention can be made more stable. is there. If you list these specifically,
Capping means, cleaning means, pressurizing or sucking means, electrothermal converters or other heating elements for the recording head, preheating means by a combination of these, preliminary ejection for ejection other than recording It is also effective to add means for performing the ejection mode for stable recording.

Further, the recording mode of the recording apparatus is not limited to the recording mode of only the mainstream color such as black, but may be the recording head integrally formed or a combination of plural recording heads. However, the present invention is also extremely effective for an apparatus provided with at least one of a multicolor of different colors or a full color by color mixing.

In the above description, the ink is described as a liquid, but it is an ink that solidifies at room temperature or below, and is softened or liquid at room temperature, or in the above-mentioned ink jet, the ink itself is 30 ° C. or higher and 70 ° C. or higher. In general, the temperature is adjusted within the following range to control the temperature of the ink so that the viscosity of the ink is within the stable ejection range. Therefore, the ink may be in a liquid state when the use recording signal is applied.

In addition, an excessive temperature rise of the head or ink due to thermal energy is prevented by using it as energy for changing the state of the ink from a solid state to a liquid state, or is left in a standing state for the purpose of preventing evaporation of the ink. It is also possible to use an ink which is solidified by. In any case, the property of being liquefied for the first time by heat energy, such as that the ink is liquefied by applying heat energy according to the recording signal and ejected as an ink liquid, or that it begins to solidify when it reaches the recording medium. The use of the ink is also applicable to the present invention.

In this case, the ink is disclosed in JP-A-54-56847.
As described in Japanese Patent Laid-Open No. 60-71260 or in a state in which it is held as a liquid or solid in the recesses or through holes of the porous sheet and faces the electrothermal converter. May be

In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

FIG. 7 is an external perspective view showing an example of an ink jet recording apparatus (IJRA) in which the recording head obtained by the present invention is mounted as an ink jet head cartridge (IJC).

In the figure, reference numeral 701 is an ink jet head cartridge (IJC) provided with a nozzle group for ejecting ink so as to face the recording surface of the recording paper fed onto the platen 707. Reference numeral 702 denotes a carriage (HC) that holds the IJC 701, which is connected to a part of a drive belt 704 that transmits the driving force of the drive motor 703 and has two guide shafts 705 and 70 arranged in parallel with each other.
By making it slidable with 6, the reciprocating movement over the entire width of the recording paper of IJC701 becomes possible.

Reference numeral 708 denotes a head recovery device, which is an IJC7
It is arranged at one end of the movement path 01, for example, at a position facing the home position. The head recovery device 708 is operated by the driving force of the motor 710 via the transmission mechanism 709, and the IJC 701 is capped. IJC7 by the cap portion 711 of the head recovery device 708
Head recovery device 7 in connection with capping to 01
The ink is sucked by an appropriate suction means provided in the nozzle 08 or the ink is pressure-fed by an appropriate pressurizing means provided in the ink supply path to the IJC 701, and the ink is forcibly discharged from the ejection port to increase the viscosity in the nozzle. Ejection recovery processing such as ink removal is performed. Further, the recording head is protected by capping at the end of recording.

Reference numeral 712 is a cleaning blade disposed on the side surface of the head recovery device 708. Blade 712
Is held by the blade holding member 713 in the form of a cantilever, and is operated by the motor 710 and the transmission mechanism 709 similarly to the head recovery device 708, and can be engaged with the ejection surface of the IJC 701. This allows the blade 71 to be operated at an appropriate timing in the recording operation of the IJC 701 or after the ejection recovery process using the head recovery device 708.
2 is projected into the movement path of IJC701, and IJC70
1, the dew condensation, wetting, dust, etc. on the ejection surface of the IJC 701 is wiped off.

[0053]

EXAMPLES Hereinafter, the recording head of the present invention will be specifically described with reference to Examples, but the present invention is not limited thereto.

Example 1 First, a heating head as shown in FIG. 2 was prepared. Board 10
1, a single crystal silicon substrate having a thickness of 0.5 mm is used, the heating resistor 102 is formed by HfB ₂ sputtering to a thickness of 500Å, an electrode is formed by aluminum vapor deposition to a thickness of 5000Å, and a protective film is formed of SiO ₂ It was made to have a thickness of 3 μm by sputtering.

As the cover 105, a plate made of a soda lime glass having a groove formed of a photosensitive resin was used, and this cover was bonded on the substrate 101 so that the position of the groove was aligned with that of the heating resistor.

On the other hand, 1% of KP-80 was added to Freon-113.
1 (manufactured by Shin-Etsu Chemical Co., Ltd.) and 1% γ-aminopropyltrimethoxysilane were dissolved and mixed, and the solution was spinner-coated on a well-washed silicon rubber having a thickness of 0.5 mm. The surface was pressure-transferred.
Then, it was heat-cured at 150 ° C. for 20 minutes.

Example 2 An ink repellent treatment was applied to an ink jet recording head having a structure as shown in FIG. That is, a piezo vibrating element 302 was attached to a glass tube 301 having a thin tip (ink flow passage inner diameter 0.2 mm, orifice portion inner diameter 0.05 mm). A polyvinyl chloride pipe 306 was connected as an ink introduction pipe to the end opposite to the orifice 305. The outer surface of the orifice surface is cerium oxide (average particle size 0.1μ
After polishing with m), it was thoroughly washed with distilled water and dried. Next, after filling the ink flow path with mercury, the same ink repellent treatment agent as in Example 1 was used, and the treatment was performed by immersing the solution in the vicinity of the orifice surface, and then the mercury was removed. An ink repellent film 307 was formed by drying and curing with hot air at ℃, and an ink jet recording head was prepared.

Comparative Example 1 1% CFC-11 of KP-801 as an ink repellent treatment agent
An inkjet recording head was prepared in the same process as in Example 1 except that 3 solutions were used. It was observed that the ink repellent treatment agent entered the ink flow path during heat curing.

Comparative Example 2 The same ink repellent treatment agent as in Comparative Example 1 was used, the head was previously filled with paraffin in the ink flow path, and the ink repellent treatment agent was transferred under pressure in the same manner as in Example 1. After 150
After heat-curing at 20 ° C. for 20 minutes, paraffin was dissolved and removed with toluene to prepare an inkjet recording head.

Comparative Example 3 An ink jet recording head of the same type as in Example 2 was prepared by using the same ink repellent treatment agent as in Comparative Example 1 and performing the ink repellent treatment in the same manner as in Example 2.

Table 2 shows the results of the initial printing test and the printing test after the recovery operation using the ink jet recording heads prepared in the above Examples and Comparative Examples.

[0062]

[Table 2] As is clear from the table, the ink jet recording head of the present invention provides good printing in initial printing, and
Good printing was obtained even after the recovery operation of "orifice wiping" with a rubber blade. Moreover, it was revealed that the orifice surface was durable and not changed from the initial state.
On the other hand, in Comparative Example 1, the ink-repellent agent entered the inside of the orifice due to the heat-curing treatment, so that the initial printing was defective. In Comparative Examples 2 and 3, good initial printing was obtained, but the recovery operation performed damaged the ink-repellent film, and the dust entered the inside of the orifice, causing printing failure.

[0063]

As described above, the following effects can be obtained by using a mixture of a fluorine-containing silane coupling agent and an amino group-containing compound as an ink repellent treatment agent.

1. The strength of the ink repellent film is increased. Therefore, it has durability against rubbing such as recovery operation. As a result, a good print quality can be maintained for a long time and a highly reliable head can be provided.

2. When the ink repellent treatment agent is heat-cured, the applied substance does not move, and therefore the treatment can be performed even with the orifice opened. In that case, since it is not necessary to put a filling material in the ink flow path, processing can be easily performed,
It is possible to reduce the cost for producing the head.

[Brief description of drawings]

FIG. 1 is an external perspective view of the vicinity of an orifice of an inkjet recording head embodying the present invention.

FIG. 2 is a cross-sectional view of an example of an inkjet recording head immediately before implementing the present invention.

FIG. 3 is a sectional view showing an example of another ink jet recording head embodying the present invention.

FIG. 4 is a cross-sectional view of an inkjet recording head that has been subjected to conventional processing.

5 is an external perspective view of the vicinity of the orifice of the inkjet recording head of FIG.

FIG. 6 is a cross-sectional view of an inkjet recording head that has been subjected to conventional processing.

FIG. 7 is an external perspective view showing an example of an inkjet recording apparatus mounted as a recording head inkjet head cartridge obtained according to the present invention.

[Explanation of symbols]

 101, 401 Substrate 102, 402 Heating element 107, 407 Ink repellent film 301, 601 Conduit 302, 602 Piezo element 307, 607 Ink repellent film

Claims (6)

[Claims] 1. An ink jet having a fine hole as an ink flow path, wherein one end of the fine hole is used as an orifice to eject and fly a small droplet of the ink, and the ink droplet is attached to a recording surface to perform recording. In the recording head, at least the peripheral portion of the orifice is a. A compound that produces R ₁ Si (OH) ₃ by hydrolysis (wherein R ₁ is a fluoroalkyl group having 1 to 20 carbon atoms,
A group selected from the group consisting of fluoroaryl groups, fluorocycloalkyl groups, fluoroalkylaryl groups, and fluoroarylalkyl groups, wherein the ratio of the number of fluorine elements to the number of elements other than fluorine and carbon is 1: 1.
The above-mentioned fluorine-containing groups. ) And b. An ink jet recording head, which is treated with a mixture of an amino group-containing compound and. 2. The amino group-containing compound is hydrolyzed to form R ₂ Si (OH) ₃ or R ₂ R ₃ Si (OH) ₂ (wherein R ₂ is an alkyl group containing an amino group and having 1 to 20 carbon atoms). A group selected from the group consisting of an aryl group,
R ₃ is an alkyl group having 1 to 10 carbon atoms. The ink jet recording head according to claim 1, which is a compound that produces 3. The ink jet recording head according to claim 1, wherein the ink jet recording head is a full line type in which a plurality of orifices are provided over the entire width of the recording area of the recording medium. 4. An ink jet having a fine hole as an ink flow path, wherein one end of this fine hole is used as an orifice to eject and fly a small droplet of the ink, and the ink droplet is attached to a recording surface to perform recording. In the manufacturing method of the recording head,
At least the peripheral portion of the orifice, a. A compound that produces R ₁ Si (OH) ₃ by hydrolysis (wherein R ₁ is a fluoroalkyl group having 1 to 20 carbon atoms,
A group selected from the group consisting of fluoroaryl groups, fluorocycloalkyl groups, fluoroalkylaryl groups, and fluoroarylalkyl groups, wherein the ratio of the number of fluorine elements to the number of elements other than fluorine and carbon is 1: 1.
The above-mentioned fluorine-containing groups. ) And b. A method for producing an ink jet recording head, which comprises treating with a mixture of an amino group-containing compound and. 5. The amino group-containing compound is hydrolyzed to form R ₂ Si (OH) ₃ or R ₂ R ₃ Si (OH) ₂ (wherein R ₂ is an alkyl group containing an amino group and having 1 to 20 carbon atoms). A group selected from the group consisting of a group, a cycloalkyl group and an aryl group, and R ₃ is an alkyl group having 1 to 10 carbon atoms). Of manufacturing an inkjet recording head. 6. The inkjet recording head according to claim 1, wherein an orifice for ejecting ink is provided facing a recording surface of the recording medium, and a member for mounting the recording head. A recording device characterized by: