JPH05309568A - Injection stream machining device - Google Patents

Abstract

PURPOSE:To carry out a minute machining of a good surface structure with no stream by spraying a single-phase jet of a high pressure fluid from one side of a pair of injection nozzles, while spraying two-phase jet of a high pressure fluid and particulates from the other side nozzle, to the machining surface of a workpiece. CONSTITUTION:Particulates 32 fed from a particulate feeding device 31 are dispersed evenly by a high pressure fluid 1 in a stirring device 27, and they are fed to a two-phase jet generating device 25. In the two-phase jet generating device 25, the two-phase jet of the particulates 32 and the high pressure fluid 1 is produced, it is injected from one side injection nozzle 11b to the machined surface 39a of a workpiece 39 at a high speed, and a good surface structure with no streak is processed minutely. And from the other side injection nozzle 11a, a single-phase jet of only the high pressure fluid 1 is injected to the machined surface 39a at a high speed, and the machined surface 39a is cleaned.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jet flow processing apparatus for spraying fine particles onto a surface to be processed of a workpiece for polishing.

[0002]

2. Description of the Related Art A lapping machine for lapping using a lap as a tool is known as an apparatus for polishing a surface of a workpiece. This device puts abrasive grains mixed with oil or the like between the tool and the work surface, presses the tool with an appropriate pressure on the work surface, and relatively moves the work piece and the tool, Fine processing of the surface to be processed is performed by the grains.

Abrasive grains used in the above apparatus have a grain size of several μm to several tens of μm, and a hard metal such as cast iron has been used as a tool. For this reason,
Fine irregular marks were left on the processed surface due to lapping and showed dull gloss. In order to remove the streaks, conventionally, fine particles of 1 μm or less were used as post-processing, and the work surface of the work was mirror-finished with a soft tool.

[0004]

However, according to the conventional processing method as described above, since two steps of rough polishing and finish polishing are required, the setup and processing take time,
It also took a lot of time to wash and dry after processing. Also, the dimensional accuracy and surface roughness of the surface to be processed change greatly due to the lapping pressure, making it difficult to perform uniform processing. Furthermore, if the lapping pressure becomes excessive, the surface to be processed may deteriorate due to heat and the surface quality may not be maintained in a normal state. Further, the lap as a tool is worn, maintenance is troublesome, and the surface to be processed may be scratched. Moreover, it is difficult to satisfy the processing conditions unless the abrasive grains are uniform and dust and other foreign matter do not adhere. Further, there are problems that the surface to be processed is sagging and it is difficult to process a curved surface or an aspherical surface.

The present invention has been made in view of the above circumstances, and it is possible to perform fine processing of a good surface structure, and to improve the processing efficiency without the need for post-processing such as washing and drying. An object is to provide a jet flow processing device.

[0006]

A jet flow processing apparatus according to a first aspect of the present invention provides a fine particle 3 on a surface 39a of a workpiece 39 to be processed.
In a jet-flow processing apparatus for injecting 2 to perform polishing, a rotation support device 40 as a rotation support unit that supports and rotates a work piece 39, and a work surface 39 of the work piece 39.
an injection nozzle 11 as a pair of injection means arranged facing a, a high pressure fluid supply device 2 as high pressure fluid supply means for supplying the high pressure fluid 1 to the injection nozzle 11, and fine particles for supply of fine particles 32 A fine particle supply device 31 as a supply means, and a fine particle 32 supplied from the fine particle supply device 31.
A stirring device 27 as stirring means for stirring the high pressure fluid 1 branched from the high pressure fluid supply device 2 and fine particles 32 supplied from the stirring device 27 and a pair of injection nozzles 1
The two-phase flow generation device 25 as a two-phase flow generation unit that mixes the high-pressure fluid 1 supplied to one side 11b of the two.

In the jet flow processing apparatus according to the second aspect, one of the pair of jet nozzles 11a is a one-phase flow of the high-pressure fluid 1 and the other 11b is a two-phase flow of the high-pressure fluid 1 and the fine particles 32. It is characterized in that they are respectively jetted onto the surface 39a to be processed of the object 39 to be processed.

In the jet flow processing apparatus according to a third aspect of the present invention, the jet port of the jet nozzle 11 is formed in a rectangular shape having a long side in the diametrical direction of the rotary table 42 as a rotation supporting means, and the long side is rotated. The width X ₁ is the rotation width X of the processed surface 39a
It is characterized by making it larger than ₂ .

[0009]

In the jet processing apparatus according to the first and second aspects, the fine particles 32 supplied from the fine particle supply device 31 are
It is uniformly dispersed by the high-pressure fluid 1 in the stirrer 27 and supplied to the two-phase flow generator 25. In the two-phase flow generation device 25, a two-phase flow of the fine particles 32 and the high-pressure fluid 1 is generated and jetted at high speed from the one injection nozzle 11b to the surface 39a to be processed of the workpiece 39, which is excellent in that there are no scratches. Microfabrication of the surface structure is performed. The other injection nozzle 1
From 1a, the one-phase flow of only the high-pressure fluid 1 is the processed surface 39a.
Is sprayed at high speed, and the surface 39a to be processed is cleaned.

In the jet flow processing apparatus according to the third aspect of the present invention, since the length X ₁ of the long side of the jet port 51 of the jet nozzle 11 is made larger than the rotation width X _{2 of the} surface 39a to be machined, a uniform mirror finish is obtained. Processing can be performed.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the jet processing apparatus of the present invention will be described below with reference to the drawings.

1 and 2 show the configuration of an embodiment of the present invention. In FIG. 1, a high pressure fluid 1 such as air or dry nitrogen pressurized to 6 kg / cm ² or more is a high pressure fluid supply device 2
It is filled inside. The high-pressure fluid supply / supply device 2 is connected to the inlet of the dryer 4 via a pipe 3,
Includes a coupling 5, a direct stop valve 6, and a coupling 7.
Is provided. Two pipes 9 and 10 are branched and connected to the outlet of the dryer 4 via a T-shaped pipe 8.
One of the pipes 9 is connected to the one-phase flow injection nozzle 11a. The pipe 9 is provided with a 90-degree bent pipe 12, a coupling 13, a pressure reducing valve with a pressure gauge 14, a direct stop valve 15, a tapered pipe 16, and a coupling 17.

Two pipes 19 and 20 are branched and connected to the other pipe 10 via a T-shaped pipe 18, and one pipe 19 is connected to a two-phase flow injection nozzle 11b. .. The pipe 19 is provided with a coupling 21, a pressure reducing valve 22 with a pressure gauge, a direct stop valve 23, a tapered pipe 24, a two-phase flow generator 25, and a coupling 26.
The other pipe 20 is connected to the stirring device 27, and the pipe 20 is provided with a pressure reducing valve 28 with a pressure gauge, a direct stop valve 29, and a coupling 30.

A fine particle supply device 31 is provided above the stirring device 27, and the fine particle supply device 31 is made of Al.
Hopper 3 for storing fine particles 32 such as ₂ O ₃ and SiO
3, a screw type fine particle constant quantity supply device 34, a screw motor 35 for driving the screw, and a partition plate 36 are provided. The stirring device 27 is a device that uniformly stirs the high-pressure fluid 1 supplied from the pipe 20 and the fine particles 32 supplied from the fine particle supply device 31 by the air vibrating effect. The stirrer 27 and the side surface of the two-phase flow generator 25 are connected by a pipe 38 via a coupling 37.

On the other hand, below the jet nozzle 11, there is provided a rotary support device 40 that supports and rotates the workpiece 39. The rotary support device 40 includes a rotary table 42 fixed to the upper end of the rotary shaft 41, and a motor 43 provided at the hand end of the rotary shaft 41 and rotationally driving the rotary shaft 41. The rotating shaft 41 is rotatably supported by bearings 44a and 44b contained in a bearing housing (not shown). Also, on the turntable 42,
A workpiece 39 is placed via a mounting jig 45.
Further, the rotation support device 40 is movable in the XYZ axis directions by a drive guide device (not shown) provided below the rotation support device 40.

As shown in FIG. 2, the injection nozzles 11a and 11b are arranged symmetrically with respect to the rotary shaft 41 on the diameter of the mounting jig 45, and the respective injection ports 51a and 5b are provided.
1b is a rectangular prism having long sides in the diameter direction.
The length X ₁ of the long side is the surface 39 of the workpiece 39 to be processed.
It is larger than the rotation width X ₂ of the work surface 39a when a is rotated in the direction of arrow A. In addition, the injection ports 51a, 5
The short side Y of 1b is 0.1 mm to 0.5 mm, and the distance Z between the jet nozzles 11a and 11b and the surface 39a to be processed shown in FIG. 1 is 1 mm to 30 mm.

Next, the operation of this embodiment will be described. By opening the direct stop valve 6, the high pressure fluid 1 is supplied from the high pressure fluid supply device 2 to the dryer 4. The high-pressure fluid 1 from which moisture has been removed by the dryer 4 is
It is branched into a system and flows into pipes 9 and 10. The high-pressure fluid 1 flowing through the pipe 9 opens the direct stop valve 15 and is adjusted by the pressure reducing valve 14 so that the pressure becomes 1 kg / cm ^{2 to} 6 kg / cm ^2. It is jetted as a high-pressure fluid 1 of a phase flow onto a work surface 39a of a work piece 39. As a result, the processed surface 39a can be cleaned.

The high-pressure fluid 1 flowing in the pipe 10 is further
It is branched by the character pipe 18 and flows into the pipes 19 and 20.
The high pressure fluid 1 flowing in the pipe 19 opens the direct stop valve 23, and the pressure reducing valve 22 controls the pressure to 3 kg / cm ^{2 to} 6 kg / cm ^2.
And is supplied to the two-phase flow generator 25. The high-pressure fluid 1 that has flowed into the pipe 20 has a direct stop valve 29.
Open the pressure reducing valve 28 to adjust the pressure to 1 kg / cm ^{2 to} 2 kg / cm.
^It is adjusted to ² and supplied to the stirring device 27.

In the stirring device 27, the fine particle supply device 3
The fine particles 32 replenished from the hopper 32 of No. 1 are screw-type fine particle quantitative feeder 3 by a screw motor 35.
By operating No. 4, a constant amount is supplied to the stirring device 27 via the partition plate 36. The high pressure fluid 1 supplied to the stirring device 27 through the pipe 20 causes the fine particles 32
Are uniformly stirred. Here, in this embodiment, the fine particles 32
Has a particle size of about 1 μm. The fine particles 32 thus uniformly stirred are supplied to the side surface of the two-phase flow generator 25 via the pipe 38 and mixed with the high-pressure fluid 1 supplied from the tapered pipe 24. As a result, the fine particles 32 are accelerated by the high-pressure fluid 1 and generate a two-phase flow uniformly dispersed.

The two-phase flow of the fine particles 32 and the high-pressure fluid 1 is passed through the coupling 26 from the injection nozzle 11b to the workpiece 39.
Is sprayed on the surface 39a to be processed, and fine processing such as mirror finishing is performed. At this time, the rotation support device 40 is XYZ-mounted by a drive guide device (not shown) so that the surface 39a to be processed of the workpiece 39 comes to the predetermined positions of the jet nozzles 11a and 11b.
Move in the axial direction.

According to this embodiment, since the two-phase flow of the high-pressure fluid 1 and the fine particles 32 uniformly dispersed is jetted at high speed from the jet nozzle 11b to the work surface 39a of the workpiece 39, there is no streak. Fine processing with a good surface structure can be performed. In this case, since the one-phase flow of the high-pressure fluid 1 is simultaneously jetted from the jet nozzle 11a to the surface 39a to be processed, the surface 3 to be processed 3
9a can be cleaned and fine particles, cutting dust, dust, etc. sprayed from the spray nozzle 11b can be removed, and fine processing with high processing efficiency can be performed without causing various scratches. Further, since the high-speed injection energy of the fine particles 32 is directly converted into the processing energy, the heat generation is small and the generation of the altered layer can be prevented.

Since the high-pressure fluid 1 is jetted from the post-processing jet nozzle 11a to wash the surface 39a to be processed, there is no need to provide a washing / drying step as a separate step.
The number of steps can be reduced and the cost can be reduced. Furthermore, since the length X ₁ of the long side of the jet port 51 of the jet nozzle 11 is made longer than the rotation width X _{2 of the} surface 39a to be processed, uniform mirror finishing can be performed. Even when the surface 39a to be processed is a curved surface or an aspherical surface, it can be easily processed.

In the above embodiment, the case where the high pressure fluid 1 is air or dry nitrogen has been described, but water or pure water may be used as the high pressure fluid 1.

[0024]

As described above, according to the jet flow processing apparatus of the first and second aspects, one of the pair of jet nozzles serves as the one-phase flow of the high-pressure fluid and the other serves as the high-pressure fluid. Since the two-phase flow with the fine particles is sprayed onto the surface to be processed of the object to be processed, it is possible to efficiently perform fine processing with a good surface structure without scratches.

According to the jet flow machining apparatus of the third aspect, since the length of the long side of the jet port of the jet nozzle is made larger than the rotation width of the surface to be machined, uniform mirror finishing can be performed. ..

[Brief description of drawings]

FIG. 1 is a block diagram showing the configuration of an embodiment of a jet flow processing apparatus of the present invention.

FIG. 2 is a view taken along the line BB of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 High-pressure fluid 2 High-pressure fluid supply device (high-pressure fluid supply means) 11 Injection nozzle (injection means) 25 2 Phase flow generation device (two-phase flow generation means) 27 Stirring device (stirring means) 31 Fine particle supply device (fine particle supply means) 32 Fine Particles 39 Workpiece 39a Worked Surface 40 Rotation Support Device (Rotation Support Means) 42 Rotary Table

Claims (3)

[Claims] 1. A jet flow processing apparatus for injecting fine particles onto a surface to be processed of a workpiece to perform polishing, a rotation support means for supporting and rotating the workpiece, and the workpiece to be processed. A pair of jetting means arranged to face the surface, a high-pressure fluid supplying means for supplying a high-pressure fluid to the jetting means, a fine particle supplying means for supplying fine particles, and the fine particles supplied from the fine particle supplying means. Stirring means for stirring with the high-pressure fluid branched and supplied from the high-pressure fluid supply means, the fine particles fed from the stirring means, and the high-pressure fluid supplied to one of the pair of jetting means And a two-phase flow generating means for mixing the two. 2. One of the pair of jetting means jets a one-phase flow of the high-pressure fluid and the other jets a two-phase flow of the high-pressure fluid and the fine particles onto the surface to be processed of the workpiece. The jet processing device according to claim 1, wherein 3. The injection port of the injection unit is formed in a rectangular shape having a long side in the diameter direction of the rotation supporting unit, and the rotation width of the long side is larger than the rotation width of the surface to be processed. The jet processing device according to claim 1 or 2.