JPH0493149U - - Google Patents

Info

Publication number: JPH0493149U
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP40146190U

Other languages

Other versions

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-12-25

Filing date

1990-12-25

Publication date

1992-08-13

1990-12-25 Application filed filed Critical

1990-12-25 Priority to JP40146190U priority Critical patent/JP2527709Y2/en

1992-08-13 Publication of JPH0493149U publication Critical patent/JPH0493149U/ja

1997-03-05 Application granted granted Critical

1997-03-05 Publication of JP2527709Y2 publication Critical patent/JP2527709Y2/en

2005-12-25 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

JP40146190U 1990-12-25 1990-12-25 Transport parts for semiconductor manufacturing equipment Expired - Lifetime JP2527709Y2 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP40146190U JP2527709Y2 (en)	1990-12-25	1990-12-25	Transport parts for semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP40146190U JP2527709Y2 (en)	1990-12-25	1990-12-25	Transport parts for semiconductor manufacturing equipment

Publications (2)

Publication Number	Publication Date
JPH0493149U true JPH0493149U (en)	1992-08-13
JP2527709Y2 JP2527709Y2 (en)	1997-03-05

Family

ID=31879553

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP40146190U Expired - Lifetime JP2527709Y2 (en)	1990-12-25	1990-12-25	Transport parts for semiconductor manufacturing equipment

Country Status (1)

Country	Link
JP (1)	JP2527709Y2 (en)

1990
- 1990-12-25 JP JP40146190U patent/JP2527709Y2/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JP2527709Y2 (en)	1997-03-05

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